• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.377-377
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• 2012

Microprocessor technology now relies on copper for most of its electrical interconnections. Because of the high diffusivity of copper, Atomic layer deposition (ALD) $TaN_x$ is used as a diffusion barrier to prevent copper diffusion into the Si or $SiO_2$. Another problem with copper is that it has weak adhesion to most materials. Strong adhesion to copper is an essential characteristic for the new barrier layer because copper films prepared by electroplating peel off easily in the damascene process. Thus adhesion-enhancing layer of cobalt is placed between the $TaN_x$ and the copper. Because, cobalt has strong adhesion to the copper layer and possible seedless electro-plating of copper. Until now, metal film has generally been deposited by physical vapor deposition. However, one draw-back of this method is poor step coverage in applications of ultralarge-scale integration metallization technology. Metal organic chemical vapor deposition (MOCVD) is a good approach to address this problem. In addition, the MOCVD method has several advantages, such as conformal coverage, uniform deposition over large substrate areas and less substrate damage. For this reasons, cobalt films have been studied using MOCVD and various metal-organic precursors. In this study, we used $C_{12}H_{10}O_6(Co)_2$ (dicobalt hexacarbonyl tert-butylacetylene, CCTBA) as a cobalt precursor because of its high vapor pressure and volatility, a liquid state and its excellent thermal stability under normal conditions. Furthermore, the cobalt film was also deposited at various $H_2/NH_3$ gas ratio(1, 1:1,2,6,8) producing pure cobalt thin films with excellent conformality. Compared to MOCVD cobalt using $H_2$ gas as a reactant, the cobalt thin film deposited by MOCVD using $H_2$ with $NH_3$ showed a low roughness, a low resistivity, and a low carbon impurity. It was found that Co/$TaN_x$ film can achieve a low resistivity of $90{\mu}{\Omega}-cm$, a low root-mean-square roughness of 0.97 nm at a growth temperature of $150^{\circ}C$ and a low carbon impurity of 4~6% carbon concentration.

• Korean Chemical Engineering Research
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• 제43권3호
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• pp.407-411
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• 2005

분무용액에 다양한 융제들을 도입하여 분무열분해법에 의해 YAG:Tb($Y_3Al_5O_{12}:Tb$) 형광체들을 합성하였다. 융제의 종류, 유기 첨가물 및 후열처리 온도 등이 YAG:Tb 형광체의 형태, 결정성 및 발광 특성에 미치는 영향 등을 조사하였다. 유기첨가물로 사용된 구연산과 에틸렌 글리콜은 고온의 열처리 과정에서 YAG:Tb 형광체의 형태 파괴 없이 발광 특성을 증대시켰다. 반면에 다량의 융제를 포함한 분무용액으로부터 분무열분해 공정에 의해 합성된 전구체 분말은 $1300^{\circ}C$에서의 후열처리 후에 구형의 형태가 사라졌다. 리튬 탄산염을 융제로 함유한 분무용액으로부터 합성된 YAG:Tb 형광체는 후열처리 후에 미세하면서도 균일한 형태를 가졌다. 융제로서 사용된 리튬 탄산염은 YAG:Tb 형광체의 발광 휘도 개선에도 효과적이었다. 리튬 탄산염을 융제로 첨가한 경우에 합성된 YAG:Tb 형광체의 최적의 발광 세기는 융제를 첨가하지 않은 경우에 합성된 형광체의 발광세기의 189％였다.

• 한국환경농학회지
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• 제40권4호
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• pp.366-372
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• 2021

BACKGROUND: Ammonia is known as a precursor to fine particulate matter, and according to CAPSS, annual ammonia emissions in the agricultural sector were 249,777 tons as of 2018, accounting for about 79.0% of Korea's total ammonia emissions. In particular, ammonia emissions from agricultural land increased by 19,566 tons (10.2%) compared to the previous year. The Ministry of Environment is setting emission statistics using the ammonia emission coefficient developed in Korea in 2008, but researchers in the agricultural field regard it as a coefficient that does not reflect the reality of Korea's agricultural environment. Accordingly, in order to develop ammonia emission coefficients from the cultivation of apples and pears, Korea's representative fruit type, test agricultural land was set in Iksan, Jeollabuk-do. METHODS AND RESULTS: This study attempted to obtain the ammonia emission coefficient by the treatment of the composite fertilizer (N-P₂O₅-K₂O=12-7-9), and the flux was measured using a dynamic flow-through chamber method. As for the chamber, a total of 12 chambers were installed repeatedly in 4 zones and used to develop emission coefficients. Using compound fertilizers during fruit tree cultivation, the ammonia emission coefficient was evaluated as 10.4 kg NH3/ton for pears and 15.3 kg NH₃/ton for apples. The reason why the ammonia emission coefficient according to the use of composite fertilizers was calculated higher for apple cultivation is believed to be due to the relatively high pH concentration of apple orchard soil. CONCLUSION(S): This study may provide basic data for upgrading the ammonia emission coefficient when using composite fertilizers in agricultural land. In the future, it might be necessary to upgrade the calculation of emissions through the development of ammonia and fine particulate matter emission coefficients considering the agricultural environment of Korea.

• 한국결정성장학회지
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• 제24권4호
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• pp.145-150
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• 2014

3차원적 선택적 결정 성장 방법에 의해 GaN stripe 구조의 꼭지점 부분에만 GaN 나노로드를 성장하였다. GaN stripe의 꼭지점 부분의 $SiO_2$ 만을 최적화된 포토리소그라피 공정을 이용하여 제거하고 이를 선택적 결정 성장을 위한 마스크로 사용하였다. $SiO_2$가 제거된 꼭지점 부근에만 Au 금속을 증착하고, metal organic vapor phase epitaxy(MOVPE) 방법에 의해 GaN stripe의 꼭지점 부분에만 GaN 나노로드의 선택적 성장을 실시하였다. GaN 나노로드의 형상과 크기는 결정 성장 온도와 III족 원료의 공급량에 의해 변화가 있음을 확인하였다. Stripe 꼭지점에 성장된 GaN 나노로드는 단면이 삼각형형태를 가지고 있으며 끝으로 갈수록 점점 폭이 좁아지는 테이퍼 형상을 가지며 성장되었다. TEM 관측 결과, 매우 좁은 영역에서만 선택적 결정 성장이 이루어졌기 때문에 GaN 나노로드에서 관통전위(threading dislocations)는 거의 관찰되지 않음을 확인하였다. 선택성장이 시작되는 부분의 결정면과 GaN 나노로드의 성장방향의 결정면 방향의 차이에 기인하는 적층결함(stacking faults)들이 GaN 나노로드의 중심영역에서 생성되는 것을 관찰할 수 있었다.

• 생물환경조절학회지
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• 제31권3호
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• pp.170-179
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• 2022

글루탐산은 식물의 생장과 발달에 중요한 역할을 하는 필수아미노산의 전구체이며, 저온 보호 물질로 이어지는 생합성 경로를 자극하여 저온 피해를 줄이는 생물자극제 중 하나이다. 본 연구에서는 저온 스트레스 조건에서 글루탐산 엽면 처리가 배추에 미치는 영향을 평가하였다. 글루탐산 2가지 엽면시비 농도(0 및 10mg·L^-1)와 3가지 주/야간 온도 수준(11/-1℃ extremely low, E; 16/4℃ moderately low, M; 21/9℃ optimal, O)을 결합하여 6개의 처리가 수행되었다. 글루탐산의 엽면 처리는 정식 후 10일에 1회살포하고, 글루탐산 처리 직후 온도 처리는 최대 4일 동안 실시하였다. 처리 4일 후, ABA, PA, DPA 및 ABA-GE 함량은 M 처리에서 Glu 0 처리보다 Glu 10 처리에서 함량이 더 높았다. Glucose 함량은 E 및 Glu 10 처리에서 가장 높은 반면(52.1mg·100g^-1 dry weight), fructose 함량은 O 및 Glu 0 처리에서 함량이 가장 높았다(134.6mg·100g^-1 dry weight). GLP, GBS, 4MGBS, GNBS 및 GNS 함량은 E 및 Glu 10 처리에서 모든 처리 중 가장 높았다(0.72, 2.05, 1.67, 9.40 및 0.85µmol·g^-1 dry weight). 처리 2일 후 E 및 Glu 10 처리의 PA와 DPA함량에서 급격한 변화를 확인하였고, 몇몇 개별 glucosinolate 함량(GLP, GBS, 4MGBS, GNBS 및 GNS)은 저온과 글루탐산 처리에 따라 유의적 차이를 확인할 수 있었다. 또한, fructose는 glucose 대신 fructan을 에너지원으로 사용하였기 때문에 처리 4일후 E와 M처리에서 O 처리에 비하여 유의적으로 낮은 함량을 보였다. 따라서, 저온과 글루탐산 엽면 처리에 따른 PA, DPA, glucose, fructose 및 개별glucosinolate 물질들의 변이를 확인하였지만, 저온과 글루탐산의 효과에 관한 명확한 상관관계를 평가할 수는 없었다. 배추과 작물은 호냉성 채소로서 저온에 민감하게 반응하지 않고, 대부분 내한성을 가지고 있기 때문으로 판단된다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.657-662
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• 2005

In this study, the deposition of micrometer-scale metallic interconnects on LCD glass for the repair of open-circuit type defects is investigated. Although there had been a few studies Since 1980 s for the deposition of metallic interconnects by laser-induced chemical vapor deposition, those studies mostly used continuous wave lasers. In this work, a third harmonic Nd:YLF laser (351nm) of high repetition rates, up to 10 KHz, was used as the illumination source and $W(CO)_6$ was selected as the precursor. General characteristics of the metal deposit (tungsten) such as height, width, morphology as well as electrical properties were examined for various process conditions. Height of the deposited tungsten lines ranged from 35 to 500 nm depending on laser power and scan speed while the width was controlled between $3\~50{\mu}$ using a slit placed in the beam path. The resistivity of the deposited tungsten lines was measured to be below 1 $O\cdot{\mu}m$, which is an acceptable value according to the manufacturing standard. The tungsten lines produced at high scan speed had good surface morphology with little particles around the patterns. Experimental results demonstrated that it is likely that the deposit forms through a hybrid process, namely through the combination of photolytic and pyrolytic mechanisms.

• 한국대기환경학회지
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• 제19권6호
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• pp.663-677
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• 2003

The concentrations of volatile organic compounds (VOCs) in the ambient air were measured at three sites (Samil-dong, SRO and EFMC) in Yeosu industrial complex during September 2000 to August 2001. Air samples were collected for 24 hours in Silicocan canister (6l) with constant flow samplers every 6 days and analyzed using a cryogenic preconcentration system and a GC/MS. At each site, we identified 35 species known as on both the carcinogenic and mutagenicity by the EPA US (TO-14 manual). No relationship was found between YOCs concentration at three sampling points. Furthermore, the result shows that there appears to be a variety distribution of the concentration. BTX, vinyl chloride and high concentrations of 1,2-dichloroethane were observed at the sampling sites. Especially, high concentration of toxic VOCs, such as vinyl chloride, chloroform, 1,2-dichloroethane and benzene were shown at environmental facilities management cooperation (EMFC) site. They seem to be emitted from the facility of wastewater treatment in Yeosu industrial complex. It was difficult to tell the seasonal variation of total VOCs concentration. Nevertheless, the concentration in winter was typically higher than in summer The concentrations of toxic VOCs contents in Yeosu industrial complex were generally lower than those in Ulsan complex, although those were similar or less than in Seoul and Daegu. Whereas, toluene and styrene emitted from Yeosu industrial complex were higher than those of Edmonton industrial complex in Canada. Especially, toluene was third times higher than those observed from Texas, USA.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2010년도 춘계학술발표대회
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• pp.29.2-29.2
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• 2010

최근 박막형 LED 및 박막형 태양전지등의 기존 마이크로 소자들의 효율향상을 위한 개선으로 나노구조를 이용한 나노소자 제작이 관심을 받고 있다. 이는 가능성으로만 여겨져왔던 나노기술이 기존 박막형 소자에서 포화된 효율상향 접근방식의 한계에 따른 것으로 생각되며, 나아가 나노기술로 제작된 나노소자가 우리 생활을 채우게 될 날이 얼마남지 않은 것을 의미한다. 특히, 디스플레이 소자에서의 나노기술은 더욱 더 중요시 되고 있다. 그로 인해 투명성과 우수한 광전기적 특성을 지닌 산화물 반도체와 그 나노구조 대한 관심이 날로 높아지고 있으며, 그 가운데 산화아연계(ZnO, MgZnO등) 나노구조를 이용한 나노소자 제작이 많이 연구되고 있다. 산화아연은 c축으로 우선 배향성을 가지는 우르짜이트 구조로써, 나노선 성장이 다른 산화물에 비해 용이하고 그 물리적, 화학적 특성이 안정 우수하다. 이러한 산화아연 나노선 제작법 가운데, 유기금속화학기상증착법은 다른 성장법에 비해 결정학적 광학적 특성이 우수하고 성장속도가 빨라 고품질 나노선 성장에 용이한 장비로 각광받고 있다. 하지만 bottom-up 공정을 기반으로 한 나노소자제작에서 몇 가지 문제점을 가지고 있다. 1) 수직형 대면적 성장, 2) 나노선 밀도 조절의 어려움, 3) 기판과의 계면층에 자발적으로 생성되는 계면층의 제거, 4) 고온성장시 precursor의 증발 문제 등이 그것이다. 이러한 문제점을 해결하기 위해 산화아연 나노구조 성장 시, 마그네슘(Mg)을 도입하여, 각 원소의 조성 차이에 따라 기판 표면에 30nm 두께 미만의 상분리층(단결정+비정질층)을 자발적으로 형성시켰다. 성장이 진행됨에 따라, 아연이 rich한 단결정 층에서는 나노선이 선택적으로 성장하게 하였고, 마그네슘이 rich한 비정질 층에서는 성장이 이루어지지 않게 하였다. 따라서 산화아연이 증발되는 온도영역에서 10nm 이하 직경을 가지는 나노선을 자발적으로 계면층 없이 수직 성장하였다. 또한, 표면의 단결정, 비정질의 사이즈를 Mg 유량으로 적절히 조절한 결과, 산화아연계 나노월 구조성장이 가능하였다.

• 한국대기환경학회지
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• 제27권6호
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• pp.650-662
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• 2011

The statistical tools such as empirical orthogonal function (EOF), and singular value decomposition (SVD) have been applied to analyze the characteristic of air pollutant over southeast Asia as well as to evaluate Zimeke's tropospheric column ozone (ZTO) determined by tropospheric residual method. In this study, we found that the EOF and SVD analyses are useful methods to extract the most significant temporal and spatial pattern from enormous amounts of satellite data. The EOF analyses with OMI $NO_2$ and OMI HCHO over southeast Asia revealed that the spatial pattern showed high correlation with fire count (r=0.8) and the EOF analysis of CO (r=0.7). This suggests that biomass burning influences a major seasonal variability on $NO_2$ and HCHO over this region. The EOF analysis of ZTO has indicated that the location of maximum ZTO was considerably shifted westward from the location of maximum of fire count and maximum month of ZTO occurred a month later than maximum month (March) of $NO_2$, HCHO and CO. For further analyses, we have performed the SVD analyses between ZTO and ozone precursor to examine their correlation and to check temporal and spatial consistency between two variables. The spatial pattern of ZTO showed latitudinal gradient that could result from latitudinal gradient of stratospheric ozone and temporal maximum of ZTO in March appears to be associated with stratospheric ozone variability that shows maximum in March. These results suggest that there are some sources of error in the tropospheric residual method associated with cloud height error, low efficiency of tropospheric ozone, and low accuracy in lower stratospheric ozone.

• Progress in Superconductivity
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• 제7권2호
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• pp.135-139
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• 2006

We fabricated YBCO coated conductors (CCs) by TFA-MOD process and evaluated microstructure, texture formation, and critical temperature ($T_c$) and current ($I_c$). YBCO precursor solution was synthesized using metal-trifluoroacetates and dip coated on $LaAlO_3$(LAO) substrate. The phase formation and microstructure was characterized by X-ray diffraction and scanning electron microscopy (SEM) and the degree of texture was evaluated by pole-figure analysis. The CC was heat-treated in various calcining temperatures ($370^{\circ}C-460^{\circ}C$) and firing temperatures ($750^{\circ}C-800^{\circ}C$). As fired at $775^{\circ}C$ for 4h, the CC had the highest $T_c$ of 89.5 K and $I_c$ of 40 A/cm-width ($J_c=2.0\;MA/cm^2$). Microstructural observation indicated that the YBCO film was dense and homogeneous and had a strong cube texture without formation of second phase and its in-plane full-width at half-maxima; $5.2^{\circ}$ under optimum condition.