• 전기전자학회논문지
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• 제19권4호
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• pp.486-490
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• 2015

기존의 MOS 구조를 갖는 온도 센서가 가지는 누설 전류 문제를 해결하기 위하여 제안된 $Bi_2Mg_{2/3}Nb_{4/3}O_7$ (BMNO) 를 이용한 온도센서의 민감도 평가를 저주파 누설 전류 측정을 통하여 수행하였다. 측정결과에서 서로 다른 어닐링 온도 ( $600^{\circ}C$, $700^{\circ}C$, $800^{\circ}C$) 에 따른 서로 다른 패턴의 저주파 노이즈 특성을 얻을 수 있었으며, 그 결과에서 온도 센서 동작을 저해할 수 있는 공정 조건($700^{\circ}C$) 을 선별하는 결과를 얻을 수 있었다. 이와 같은 측정법은 향후 BMNO를 이용한 온도센서의 공정 최적화를 측정하는 방법으로 응용 될 수 있다.

• 센서학회지
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• 제20권5호
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• pp.294-299
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• 2011

$SnO_2$ nanoparticles were synthesized by a hydrothermal method and gas sensors were fabricated using nanoparticles to detect dimethyl methylphosphonate(DMMP) gas. The prepared $SnO_2$ nanoparticles exhibited a high response(72 at $500^{\circ}C$) to 5 ppm DMMP gas compared to commercial $SnO_2$ nanopowders, but their recovery was relatively poor. Various metals(Ni, Sb, Nb) were added to the $SnO_2$ nanoparticles to improve their recovery properties. The focus of this study was to investigate the effects of metal oxide additives on DMMP sensing behavior in $SnO_2$ nanoparticles.

• Journal of Korean Society for Atmospheric Environment
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• 제20권E2호
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• pp.69-75
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• 2004

In this study, thin film gas sensor based on tin oxide was fabricated to examine its characteristics. Target gas is acetonitrile ($CH_3$CN) which is a blood simulant for the chemical warfare agent. Sensing materials are SnO$_2$ SnO$_2$/Pt, and Sn/Pt with thickness from 1000 to 3000 $\AA$. The sensor consists of a sensing electrode with inter-digit (IDT) type in front side and a heater in rear side. Resistance changes of sensing materials are monitored on real time basis using a data acquisition board with a 12-bit analog to digital converter. Sensitivities are measured at different operating temperatures also with different gas concentrations and film thickness. The high sensitivity is obtained for Sn (3000 $\AA$)/Pt (30 $\AA$) at 30$0^{\circ}C$ for 3 ppm. Response and recovery times were about 40 and 160 s, respectively. Repetition measurements showed very good results with $\pm$3% in full scale range.

• 센서학회지
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• 제20권5호
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• pp.305-310
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• 2011

This study focuses on the fabrication of $TiO_2$ nanosheets and their gas sensor application. A simple sonochemical method is employed to fabricate the $TiO_2$ nanosheets. The obtained samples were investigated by transmission electron microscope(TEM) and X-ray Diffraction(XRD). The $TiO_2$ nanosheets were coated on substrates by a dropping method followed by heat treatment. The sensor responses to volatile organic compounds(VOCs) such as toluene, benzene, ethanol and acetaldehyde were studied. It was found that the $TiO_2$ nanosheets sensors are able to detect ppb-levels of VOC gases.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.846-850
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• 2003

Thin film $SnO_2$ Gas Sensor was fabricated by using ion beam sputtering and ultra thin film Pt catalyst of $45{\AA}$ was deposited on $SnO_2$ thin film. The effects of annealing temperature on the structural properies of $SnO_2$ were investigated using the X-ray diffraction. Using SEM, microstructures of thin film were investigated. The good gas sensitivity is shown when annealing condition is $650^{\circ}C$, 5hr and ultra thin film Pt catalyst thickness is $45{\AA}$.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.775-776
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• 2008

• 한국수소및신에너지학회논문집
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• 제16권1호
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• pp.9-16
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• 2005

We studied the electrochromic properties of hydrated amorphous ruthenium oxide ($RuO_2{\cdot}xH_2O$) thin films using in-situ Raman spectroscopy during electrochemical charging/discharging cycles. We have found that the principal effect of hydrogen insertion into $RuO_2{\cdot}xH_2O$ is reduction of $Ru^{4+}\;to\;Ru^{3+}$, and not formation of new bonds involving hydrogen. We compared the changes in the Raman spectrum of a gasochromic $Pd/RuO_2{\cdot}xH_2O$ film as it is exposed to hydrogen gas with that of electrochemical hydrogen insertion. We tested the changes in the optical transmission of the $Pd/RuO_2{\cdot}xH_2O$ film when exposed to hydrogen gas.

• Transactions on Electrical and Electronic Materials
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• 제6권2호
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• pp.70-72
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• 2005

The relation between electrical properties of YBaCuO ceramic superconductor and externally applied magnetic field was studied. Electrical characteristics of the superconductor with trapped magnetic fluxes are extremely sensitive to the external magnetic field and show the different responses which depend on the direction of the magnetic field. Considering these properties of the superconductor with trapped magnetic fluxes, a magnetic sensor is fabricated. This sensor is able to detect simultaneously both the intensity and the direction of the magnetic field. The sensitivity of the sensor is less than 10$^{-4} T.

• 한국원자력학회:학술대회논문집
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• 한국원자력학회 1997년도 춘계학술발표회논문집(1)
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• pp.199-206
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• 1997

For the Korean Next Generation Reactor(KNGR) development, LBB is considered for the Main Steam Line(MSL) piping inside its containment to achieve cost and safety Improvement. To apply LBB concept to MSL, leak sensors highly sensitive to humidity is required. In this paper, a ceramic material, MgCr$_2$O$_4$-TiO$_2$ has been developed as a humidity sensor for MSL applications. Experiments peformed to characterize the electrical conductivity shows that the conductivity of MgCr$_2$O$_4$-TiO$_2$ responds sensitively to both temperature and humidity changes. At a constant temperature below 10$0^{\circ}C$, the conductivity increases as the relative humidity increases, which makes the sensor favorable for application to the outside of MSL insulation layer But as temperature increases beyond 10$0^{\circ}C$, the sensor composition should be adjusted for the application to KNGR is to be made at temperature above 10$0^{\circ}C$.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.40-41
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• 2007

$SnO_2$ nanowires are used at the nanoscale level for the electrical transduction of the gas interaction with these sensing materials. We report on a study of high sensitivity and fast NOx gas sensor. We focused on improving the response time and refresh time by growth nanowires on the trench structure of Si substrate as air path. To improve refresh time we applied the trench structure with depth of $10\;{\mu}m$ by the inductively coupled plasma reactive ion etching(ICP-RIE). The fabricated device was measured at temperature of $200{\sim}300^{\circ}C$. The sensor exhibit ultra-fast and reversible electrical response (t90% ~4 s for response and ~3 s for recovery).