• Proceedings of the Korean Environmental Sciences Society Conference
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• 2003.05a
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• pp.279-280
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• 2003

실리콘웨이퍼 제조공정에서 폐기되는 HF에는 순수한 실라카만 함유되어 있지만 브라운관 업체에서 폐기되는 HF 폐액에는 유리의 조성에 따라서 다양한 성분들이 소량씩 함유되어 있다. 몰비로 Si:F=1:6이 되도록 조정한 후에 20% NaOH를 사용하여 pH를 6으로 조정하여 규불화소다를 얻고, 이어서 pH를 9로 조정하여 NaF를 었었다. 규불화소다에 NaCl, 칠레초석을 다양하게 첨가하여 금속 융제로 사용한 결과에 의하면 규불화소다의 양이 증가할수록 융제의 특성은 우수하였고, 가장 이상적인 첨가량은 50%~60%이었다. 따라서 각 공정에서 폐기되는 HF는 $Na_2SiF_{6}$와 NaF를 제조함으로서 재활용이 가능하였다.

• Resources Recycling
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• v.18 no.4
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• pp.62-69
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• 2009

We researched separation of mixed waste acids with HF, $CH_3COOH$, $HNO_3$ that were produced during a semiconductor wafer process to recycle these acids. At first, we manufactured the fluoride compound in form of $Na_2SiF_6$ by precipitating HF using $NaNO_3$ and Si powder. The concentration of HF was reduced from the initial concentration of 127 g/L to 0.5 g/L with an HF recovery ratio of 99.5%. After the manufacture of $Na_2SiF_6$, the concentration of $HNO_3$ and $CH_3COOH$ demonstrated 502 g/L and 117 g/L respectively. Following these findings we added NaOH in this $CH_3COOH/HNO_3$ mixed acid in order to obtain pH=4. Next we separated the $CH_3COOH$ and recoverd it through the use of vaccum evaporation at -440 mmHg, $95^{\circ}C$. The concentration of the recovered $CH_3COOH$ was approximately 15% and the recovery ratio of $CH_3COOH$ was over 85%. We precipitated the $NaNO_3$ by cooling the concentrated solution to $20^{\circ}C$ with a $HNO_3$ recovery ratio of over 93%. We confirmed that only $Na_2SiF_6$ and $NaNO_3$ were manufactured by XRD analysis after drying these precipitants at $90^{\circ}C$. The precipitants demonstrated a purity of approximately 97% and 98% respectively. Therefore, the purity of the precipitants proved to be similar to that of commercial products.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.19 no.4
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• pp.190-195
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• 2009

Na-tetrasilicic fluorine mica powders were synthesized by skull melting method. The staring materials having chemical composition of $Mg_3(OH)_2Si_4O_{10}:Na_2SiF_6:SiO_2=8.3:24.8:66.9$ mol% were charged into a cold crucible of 13 cm in diameter and 14cm in height and heated by R.F. generator at working frequency of 2.84 MHz. The materials were maintained for 1hr as a molten state and cooled down in the container. In this study, the specific electric resistance of mica was estimated and the columnar and plate shaped mica were synthesized.

• Journal of the Korean Ceramic Society
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• v.17 no.2
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• pp.61-68
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• 1980

The effect of the addition of various fluoreides on the mullitization of Korean crude kaolin was studied by X-ray powder diffraction and scanning electron microscopic methods. Kaolin without any addition of fluoreides began to be transformed into the mullite at 1, 10$0^{\circ}C$. Mullite peaks were discernible in the X-ray diffraction patterns of the specimens which contained fluorides equivalent to about 2 wt % fluorine, and which were sintered at 1, 05$0^{\circ}C$. The higher the concentration of fluorine in kaolin, the lower was the initiatinig temperature of mullitization. Experiments , for example, showed that mullite could be formed at 95$0^{\circ}C$ from kaolin mixed with 3.4% fluorine. Of the fluoride, addtives, sodiumsiliconfluoride $(Na_2SiF_6)$ was must effective in mullite formation of kaolin. In order of accelerating mullitization, the fluorides except $Na_2SiF_6$ could be placed in following sequence ; (1) sodium (NaF) (2) aluminium$(AlF_3)$ (3)potassium(KF) (4) ammonium$(NH_4F)$ (5) magnesium$(MgF_2)$ (6) calcium$(CaF_2)$. It was considered that the intrinsic characteristics of fluorides, such as size of ionic radiu, charge , bond strength between cation and anion, and electronegativity of cation affected millitization of halloysite, a main constituent mineral of kaolin.

• Journal of the Korean Chemical Society
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• v.55 no.4
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• pp.570-574
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• 2011

Large colorless single crystals of analcime with diameters up to 0.20 mm have been synthesized from gels with the composition of $3.00SiO_2$ : $1.50NaAlO_2$ : 8.02NaOH : $454H_2O$ : 5.00TEA. The fully $Na^+$-exchanged analcime have been prepared with aqueous 0.1 M NaCl (pH adjusted from 6 to 11 by dropwise addition of NaOH). The single-crystal structure of hydrated $|Na_{0.94}(H_2O)|[Si_{2.06}Al_{0.94}O_6]$-ANA per unit cell, a=13.703(3) ${\AA}$, has been determined by single-crystal X-ray diffraction technique in the orthorhombic space group Ibca at 294 K. The structure was refined using all intenties to the final error indices (using only the 1,446 reflections for which $F_o$ > $4{\sigma}(F_o))R_1/wR_2$ = 0.054/0.143. About 15 $Na^+$ ions are located at three nonequivalent positions and octahedrally coordinated. The chemical composition is $Na_{0.94}(H_2O)Si_{2.06}Al_{0.94}O_6$. The Si/Al ratio of synthetic analcime is 2.19 determined by the occupations of cations, 14.79, in the single-crystal determination work.

• Applied Chemistry for Engineering
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• v.29 no.1
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• pp.122-126
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• 2018

Mesoporous molecular sieves were prepared by the reaction of $Na_2SiO_3$ and $H_2SiF_6$ using nonionic micelle templates in an aqueous solution. Well-crystalline mesoporous molecular sieves were obtained after several seconds at atmospheric conditions. Powder samples exhibited d-spacing of 3.8-5.1 nm with the sharpness of the d00l peak, showing well-crystalline mesoporous molecular sieves, pore size distributions of 2.5-3.1 nm and large specific surface areas of $290-1,018m^2/g$, depending on types of surfactants. SEM images of samples showed well-divided spherical particles with an uniform size of ${\sim}0.5{\mu}m$ and TEM images demonstrated uniform pores with a worm hole shape.

• Resources Recycling
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• v.17 no.5
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• pp.3-10
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• 2008

We researched recycle of mixed waste acids including HF, $CH_{3}COOH$, $HNO_3$ produced during semiconductor wafer process. At first, we recovered HF in form of $Na_{2}SiF_6$ by precipitation using $NaNO_3$ and $Na_{2}SiO_3$. Concentration of HF was made down from 110 g/L, initial concectration, to 0.5 g/L and Recovery rate of HF was 99.5%. After recovery of HF, concentration of $HNO_3$ and $CH_{3}COOH$ is 498 g/L, 265 g/L respectively. From that mixed acid, we recovered $CH_{3}COOH$ using 2 stages of fractional distillation. In first stage, $CH_{3}COOH$ was distilled for separation from $HNO_3$. And in second stage, we recoverd refined $CH_{3}COOH$ by using fractional distillation for removing a little amount of $HNO_3$ in $CH_{3}COOH$ vapor. The concentration of recovered $CH_{3}COOH$ in second stage is 20% and finally recovery rate of $CH_{3}COOH$ is about 87.5%.

• Journal of Radiation Protection and Research
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• v.26 no.1
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• pp.7-12
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• 2001

Sintered LiF:Mg,Cu,Na,Si thermoluminescence (TL) pellets were developed for application in radiation dosimetry. In the present study, the TL dosimetric properties of LiF:Mg,Cu,Na,Si TL pellets have been investigated for emission spectrum, dose response, energy response, and fading characteristics. LiF:Mg,Cu,Na,Si TL pellets were made by using a sintering process, that is, pressing and heat treatment from TL powders. Photon irradiations for the experiments were carried out using X-ray beams and a $^{137}Cs$ gamma source at the Korea Atomic Energy Research Institute (KAERI). The average energies and the dose were in the range of 20-662 keV and $10^{-6}-10^{-2}\;Gy$, respectively. The glow curves were measured with a manual type TLD reader(System 310, Teledyne) at a constant nitrogen flux and a linear heating rate. For a constant heating rate of $5^{\circ}C\;s^{-1}$, the main dosimetric peak of glow curve appeared at $234^{\circ}C$, the activation energy was 2.34 eV and frequency factor was $1.00{\times}10^{23}$. TL emission spectrum is appeared at the blue region centered at 410 nm. A linearity of photon dose response was maintained up to 100 Gy. The photon energy responses relative to $^{137}Cs$ response were within ${\pm}20%$ at overall photon energy region. The fading of TL sensitivity of the pellets stored at the room temperature was not found for one year.

• Journal of Korean Ophthalmic Optics Society
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• v.6 no.1
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• pp.149-153
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• 2001

Three-dimensional thermoluminescence(TL) spectra of LiF: Mg, Cu, Na, Si TL material based on temperature, wavelength and intensity were measured and analyzed. The glow curves were obtained by integration of luminescence intensity for wavelength at each temperature, and various trapping parameters related to the trap formation were determined by analyzing these curves. Computerized glow curve deconvolution(CGCD) method which based on general order kinetics(GOK) model were used for the glow curve analysis. The glow curves of LiF:Mg, Cu, Na, Si TL material were deconvoluted to six isolated glow curves which have peak temperature at 333 K, 374 K, 426 K, 466 K, 483 K and 516 K, respectively. The 466 K main glow peak had an activation energy of 2.06 eV and a kinetic order of 1.05. This TL material was also found to have three recombination centers, 1.80 eV, 2.88 eV and 3.27 eV by TL spectra analysis based on Franck-Condon model. It showed that 2.88 eV is the dominant center, followed by 3.27 eV level, and 1.80 eV center is ascertained as emission center of this material even though its very weak emission intensity.

• Journal of the Korean Ceramic Society
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• v.37 no.11
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• pp.1105-1113
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• 2000

Bioglass 조성 중 45S5 (46.1SiO$_2$.24.4$Na_2$O.26.9CaO.2.6P$_2$O$_{5}$ : 몰비)를 기본 조성으로 하여 46P4 (46.2SiO$_2$.49.5CaO.4.3P$_2$O$_{5}$ : 몰비), 46SF (46.1SiO$_2$24.4$Na_2$O.16.1CaO.2.6P$_2$O$_{5}$.10.8CaF : 몰비) 그리고 55SF (55.1SiO$_2$.9.2$Na_2$O.27.8CaO.3.4P$_2$O$_{5}$.4.5CaF : 몰비)를 제조하여 tris-완충용액 및 유사 생체용액(simulated body fluid)에서 반응시킨 후 생체활성유리의 표면에 생성되는 아파타이트 결정형에 관하여 연구하였다. 45S5 유리를 tris-완충용액에 반응시켰을 경우 6시간 반응시부터 수산화 아파타이트가 생성되었으나 유사 생체용액에 반응시켰을 경우에는 24시간까지도 수산화 아파타이트 결정이 생성되지 못하고 비정질 상태의 칼슘 인산염만 형성되었다. tris-완충용액에 각 조성의 유리를 200시간 반응시킨 경우 불소를 함유하지 않은 유리에서는 잎사귀 모양의 수산화 아파타이트가, 불소를 함유한 유리에서는 구상의 플루오르 아파타이트가 형성되었다. 그러나 유사 생체용액에 각 조성의 유리를 200시간 반응시켰을 경우 불소를 함유하지 않은 유리에서는 누에고치형의 수산화 아파타이트가 형성되었고 불소를 함유한 유리에서는 무정형의 칼슘 인산염이 생성되었다.