• Journal of the Semiconductor & Display Technology
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• v.2 no.2
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• pp.5-8
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• 2003

In this study, as Cu diffusion barrier, tantalum nitrides were successfully deposited on Si(100) substrate and $SiO_2$ by plasma assisted atomic layer deposition(PAALD) and thermal ALD, using pentakis (ethylmethlyamino) tantalum (PEMAT) and NH$_3$ as precursors. The TaN films were deposited at $250^{\circ}C$ by both method. The growth rates of TaN films were 0.8${\AA}$/cycle for PAALD and 0.75${\AA}$/cycle for thermal ALD. TaN films by PAALD showed good surface morphology and excellent step coverage for the trench with an aspect ratio of h/w -1.8:0.12 mm but TaN films by thermal ALD showed bad step coverage for the same trench. The density for PAALD TaN was 11g/cmand one for thermal ALD TaN was 8.3g/$cm^3$. TaN films had 3 atomic % carbon impurity and 4 atomic % oxygen impurity for PAALD and 12 atomic % carbon impurity and 9 atomic % oxygen impurity for thermal ALD. The barrier failure for Cu(200 nm)/TaN(10 nm)/$SiO_2$(85 nm)/ Si structure was shown at temperature above $700^{\circ}C$ by XRD, Cu etch pit analysis.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2002.11a
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• pp.14-19
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• 2002

In this study, as Cu diffusion barrier, tantalum nitrides were successfully deposited on Si(100) substrate and SiO2 by plasma assisted atomic layer deposition(PAALD) and thermal ALD, using pentakis (ethylmethlyamino) tantalum (PEMAT) and $NH_3$ as precursors. The TaN films were deposited on $250^{\circ}$C by both method. The growth rates of TaN films were $0.8{\AA}$/cycle for PAALD and $0.75{\AA}$/cycle for thermal ALD. TaN films by PAALD showed good surface morphology and excellent step coverage for the trench with an aspect ratio of h/w - $1.8 : 0.12 \mu\textrm{m}$ but TaN films by thermal ALD showed bad step coverage for the same trench. The density for PAALD TaN was $11g/\textrm{cm}^3$ and one for thermal ALD TaN was $8.3g/\textrm{cm}^3$. TaN films had 3 atomic % carbon impurity and 4 atomic % oxygen impurity for PAALD and 12 atomic % carbon impurity and 9 atomic % oxygen impurity for thermal ALD. The barrier failure for Cu(200nm)/TaN(l0nm)/$SiO_2(85nm)$/Si structure was shown at temperature above $700^{\circ}$C by XRD, Cu etch pit analysis.

• Applied Chemistry for Engineering
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• v.10 no.1
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• pp.73-79
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• 1999

The superstructured $Li_{4/3}Ti_{5/3}O_4$ was prepared by sol-gel process using a mixed solution of lithium acetate (LA) and titanium n-butoxide (TNB). The gel phase was obtained by adding ammonia water ($NH_4OH/TNB$ mole ratio of 0.35) and water ($H_2O/TNH$ mole ratio of 3.5) into the clear sol that was prepared after mixing TNB/LA mole ratio of 5/4 with AA/TNB mole raio of 0.125. It was found that the most suitable $Li_{4/3}Ti_{5/3}O_4$ was obtained by heat treatment of xerogel at $600^{\circ}C$ for 30 hrs. The synthesized $Li_{4/3}Ti_{5/3}O_4$ showed an initial discharge capacity of 174 mAh/g and the capacity loss of about 27.3% during 25 cycles in Li/1M $LiClO_4(in\;PC)/Li_{4/3}Ti_{5/3}O_4$ at current density of $0.15mA/cm^2$ and the voltage range of 0.5~3.0 V.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.13 no.1
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• pp.48-58
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• 2001

For the past few decades the vapor compression cycle with a solution circuit (VCCSC) has been known to provide high efficiency and variable capacity. In this study performance of a VCCSC cycle is examined through computer simulation. In the simulation heat exchangers were modelled by specifying UA or effectiveness values while the compressor performance was specified by an isentropic efficiency. Aqua/ammonia solution was chosen as the working fluid which can be used in the high temperature range. The results show that there exists an optimum operation condition which is dependent upon the temperatures of the external heat transfer fluids(HTFs). Besides the HTF\`s temperature, the maximum system pressure and the size of the solution heat exchanger are shown to have an influence on the optimum operation condition. Finally, as compared to a simple vapor compression heat pump with HFC134a, the COP of the VCCSC is shown to be 2∼22% higher.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.15 no.12
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• pp.1028-1034
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• 2003

The objectives of this paper are to study the effect of key parameters on the cycle performance and capacity and to estimate the cost of latent and sensible energy transportation systems. The overall conductance (UA) of each component, the ambient temperature and the absorber inlet temperature are considered the key parameters. It is concluded that COP of the solution transportation using an absorption system (STA) at ambient temperature is 10% higher than that of the conventional sensible system. It is also found that the cost of STA system can be reduced 7.5 times to that of sensible energy transportation for one year of operation with 10 km transportation distance.

• Journal of Korean Society of Environmental Engineers
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• v.39 no.3
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• pp.112-117
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• 2017

Ion exchange fiber, PADD was synthesized by the reaction between PAN based acrylic fiber and DETA with $AlCl_3{\cdot}6H_2O$, and was analyzed by FT-IR and SEM to investigate its characteristics. The experimental results of Cr(VI) removal by PADD were better fitted with Langmuir adsorption isotherm, and the maximum uptake value ($Q_{max}$) was calculated to be 6.93 mmol/g. The kinetic data can be well described by Lagergen pseudo-second order rate model. The Cr(VI) adsorption capacity of PADD was 4.11 mmol/g at pH 2, which shows the effect of pH changes on the removal of Cr(VI). The adsorption selectivity of Cr(VI) was higher than phosphate and As(V). Total ion exchange capacity of PADD was 4.70 mmol/g, which was measured by acid-base back titration.

• 한국신재생에너지학회:학술대회논문집
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• 2008.05a
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• pp.638-641
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• 2008

Geothermal water at moderate temperature in a range between 30 to $50^{\circ}C$ exists sparse in surroundings. Mostly they are utilized as heat or water source at spar zones in Korea. However, a large portion of used water is discarded due to its poor recovery quality and inferior application technologies. In this research, an innovative heat pump system based on the hybrid concept that combinate compression cycle and absorption cycle was investigated mathematically. The hybrid heat pump aims to recycle various kind of the heat sources at moderate temperature including geothermal water effectively. The prime objective of the simulation is to design a compression/absorption hybrid heat pump system which can make high temperature above the level of $90^{\circ}C$ and low temperature of $20^{\circ}C$ as well at the same using $50^{\circ}C$ geothermal heat water. As a result, primitive data was provided as a basis to design a prototype 3 RT class hybrid heat pump.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1992.11a
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• pp.136-140
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• 1992

The purpose of this research is to develop the lithium secondary battery. This paper describes the preparation, electrochemical properties of nontstoichiometric(NS)-$V_6O_{13}$ and characteristics of Li/$V_6O_{13}$ secondary battery. NS-$V_6O_{13}$ was prepared by thermal decomposition of $NH_4VO_3$ under Ar stream of 140ml/min~180ml/min flow rate. And then, this NS-$V_6O_{13}$ was used for cathode active material. Cathode sheet was prepared by compressing the composite of NS-$V_6O_{13}$, acetylene black(A.B) and teflon emulsion (T.E). Characteristics of the test cell are summarised as follows. Oxidation capacity of NS-$V_6O_{13}$ was about 20% less than its reduction capacity. A part of NS-$V_6O_{13}$ cathode active material showed irreversible reaction in early charge-discharge cycle. This phenomena seems to be caused by irreversible incoporation/discoporation of lithium cation to/from NS-$V_6O_{13}$ host. Discharge characteristics curve of Li/$V_6O_{13}$ cell showed 4 potential plateaus. Charge-discharge capacity was declined in the beginning of cycling and slowly increased in company with increasing of coulombic efficiency. Energy density per weight of $V_6O_{13}$ cathode material was as high as 522Wh/kg~765Wh/kg.

• Journal of Powder Materials
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• v.23 no.4
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• pp.287-296
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• 2016

$Ni_{1/3}Co_{1/3}Mn_{1/3}(OH)_2$ powders have been synthesized in a continuously stirred tank reactor via a co-precipitation reaction between aqueous metal sulfates and NaOH using $NH_4OH$ as a chelating agent. The co-precipitation temperature is varied in the range of $30-80^{\circ}C$. Calcination of the prepared precursors with $Li_2CO_3$ for 8 h at $1000^{\circ}C$ in air results in Li $Ni_{1/3}Co_{1/3}Mn_{1/3}O_2$ powders. Two kinds of obtained powders have been characterized by X-ray diffraction (XRD), scanning electron microscopy, particle size analyzer, and tap density measurements. The co-precipitation temperature does not differentiate the XRD patterns of precursors as well as their final powders. Precursor powders are spherical and dense, consisting of numerous acicular or flaky primary particles. The precursors obtained at 70 and $80^{\circ}C$ possess bigger primary particles having more irregular shapes than those at lower temperatures. This is related to the lower tap density measured for the former. The final powders show a similar tendency in terms of primary particle shape and tap density. Electrochemical characterization shows that the initial charge/discharge capacities and cycle life of final powders from the precursors obtained at 70 and $80^{\circ}C$ are inferior to those at $50^{\circ}C$. It is concluded that the optimum co-precipitation temperature is around $50^{\circ}C$.

• Journal of the Korean Chemical Society
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• v.29 no.5
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• pp.472-477
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• 1985

The rates for the aquation of $cis-[Co(en)(NH_3)_2Cl_2]Cl in acetone-water mixtures have been measured at various pressures and temperatures by the electric conductivity method. The rate constant measured at 25$^{\circ}$C in pure water solvent is 3.47 ${\times}10^{-4}$/sec. Rate constants are increased with increasing temperature, and decreased with increasing pressure and mole fraction of acetone. Activation volumes and other activation parameters are calculated from these rate constants. The activation volumes are all positive and lie in the limited range +2.82~+$8.2cm^3$/mole. The rate constants in aqueous acetone solution are analyzed with the solvent compositions. Plots of log $k_{obs}$ vs. Grunwald-Winstein Y values show that log $k_{obs}$ varies linearly and the gradients are about 0.25. The applications of a free energy cycle relating the process initial state ${\to}$ transition state in water to that in acetone-water mixture show that the changes in solvation of the transition state have a dominant effect on the rate. From these results the aquation of this complex would be discussed in terms of dissociative mechanism ($I_d$).