• International Journal of Ocean System Engineering
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• 제2권4호
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• pp.244-249
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• 2012

In this study, a monolithic MoSi2 matrix reinforced with 20 vol% SiC particles, a SiC/MoSi2 composite matrix reinforced with 20 vol% ZrO2 particles, and a ZrO2/MoSi2 composite were fabricated using hot press sintering at $1350^{\circ}C$ for 1 h under a pressure of 30 MPa. The Vickers hardness and sliding wear resistance of the monolithic MoSi2, ZrO2/MoSi2, and SiC/MoSi2 composite were investigated at room temperature. A wear behavior test was carried out using a disk-type wear tester with a silicon nitride ball. The ZrO2/MoSi2 composite showed an average Vickers hardness value and excellent wear resistance compared with the monolithic MoSi2 and SiC/MoSi2 composite at room temperature.

• 한국세라믹학회지
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• 제37권8호
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• pp.805-810
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• 2000

The formation, microstructure and properties of MoSi2/SiC ceramic composites by polymer pyrolysis were investigated for the application of heating element material. Polymethylsiloxanes were mixed with Si, SiC, MoSi2 as filler and ceramic composites prepared by pyrolysis in N2 atmosphere at 1320~145$0^{\circ}C$ were studied. Dimensional change, density variation and phases were analyzed and correlated to the resulting material properties. Microstructures of ceramic composite prepared by polymer pyrolysis were composed of MoSi2, SiC and silicon oxycarbide glass matrix. Depending on the pyrolysis conditions, ceramic composites with a density of 86~90 TD%, a fracture strength of 213~284 MPa, a thermal expansion coefficient of 4~7$\times$10-6 were obtained. The electrical resistivity of the specimen decreased with increasing of temperature up to 50$0^{\circ}C$.

• 한국진공학회지
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• 제6권2호
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• pp.143-150
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• 1997

본 연구에서는 1000$\AA$두께의 Molybdenum화합물(Mo, Mo-N,$MoSi_2$, Mo-Si-N)의 Cu에 대한 확산방지막으로서의 특성을 면저항측정장비(four-point-probe), XRD, XPS, SEM, RBS 분석을 통하여 조사하였다. 각 박막층은 dc magnetron sputtering장비를 이용하 여 증착되었고 $300^{\circ}C$-$800^{\circ}C$의 온도구간에서 30분동안 진공열처리하였다. Mo 및 $MoSi_2$ 방지 막은 낮은 온도에서 확산방지막으로서의 특성파괴를 보였다. 결정립계를 통한 Cu의 확산과 Mo-실리사이드내의 Si의 Cu와의 반응이 그 원인인 것으로 사료된다. 질소를 첨가한 시편의 경우 확산방지특성 파괴온도는 Mo-N방지막의 경우 $650^{\circ}C$-30분, Mo-Si-N방지막의 경우 $700^{\circ}C$-30분으로 향상되었다. Cu와 Si의 확산은 방지막의 결정립계를 통하여 더욱 빠르게 확 산된다. 따라서 증착시 결정립계를 질소와 같은 물질로 채워 Cu와 Si의 확산을 저지할 수 있을 것으로 사료된다. 본 실험결과에서의 질소첨가는 이와 같은 stuffing 효과외에도 Mo- 실리사이드 박막의 결정화 온도를 다소 높인 것으로 나타났고, 그 결과 결정립계의 밀도를 감소시켜 확산방지막으로서의 특성을 향상시킨 것으로 사료된다. 또한 질소첨가는 실리사이 드내의 금속과 실리콘과의 비를 변화시켜 확산방지막의 특성에 영향을 미친 것으로 보인다. 본 실험에서 조사된 확산방지막 중에서는 Mo-Si-N박막이 Cu와 Si간의 확산을 가장 효과적 으로 저지시킨 것으로 나타났으며 $650^{\circ}C$-30분까지 안정한 특성을 보였다.

• 한국세라믹학회지
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• 제31권4호
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• pp.399-406
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• 1994

The SiC/MoSi2 composite material was prepared by infiltration with the mixture of metal Si and MoSi2 into the preform of $\alpha$-SiC and graphite under the vacuum atmosphere of 10-1 torr. The mechanical properties, phases and microstructural characteristics have been investigated by employing an universal testing machine, scanning electron microscope and X-ray diffractometer. With the increase of MoSi2/Si mixing content, the quantity of the residual silicon phase was decreased and the hardness and fracture toughness of composite materials were increased. Also, as the infiltration temperature increased, a lot of fine-grained $\beta$-SiC phases, which were produced from the reaction of graphite and liquid silicon melt, were transformed to $\alpha$-SiC phases.

• 한국표면공학회지
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• 제40권6호
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• pp.279-282
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• 2007

Cr-Mo-Si-C-N coatings were deposited on steel and Si wafer by a hybrid system of AIP and sputtering techniques using Cr, Mo and Si target in $Ar/N_2/CH_4$ gaseous mixture. Instrumental analyses of XRD and XPS revealed that the Cr-Mo-Si-C-N coatings must be a composite consisting of fine(Cr, Mo and Si)(C and N) crystallites and amorphous $Si_3N_4$ and SiC. The hardness value of Cr-Mo-Si-C-N coatings significantly increased from 41 GPa of Cr-Mo-C-N coatings to about 53 GPa with Si content of 9.3 at.% due to the refinement of (Cr, Mo and Si)(C and N) crystallites and the composite microstructure characteristics. A systematic investigation of the microstructures and mechanical properties of Cr-Mo-Si-C-N coatings prepared with various Si contents is reported in this paper.

• 한국재료학회지
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• 제6권5호
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• pp.515-523
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• 1996

세라믹 전구체로서 PCS와 PMS 두 종류의 실린콘 고분자를 합성하여 7, 15, 33 wt.%의 Mo분말, Mo(CO)6 금속화합물과 혼합한 뒤 130$0^{\circ}C$이상 가열하면 탄화물과 규화물의 다양한 세라믹복합재로 전이되었다. 특히 PMS용액에 7, 15 wt.% Mo분말을 분산하여 초음파 처리하면 열분해 수율이 60%까지 개선되고 전도성 소재인 SiC/MoSi2 복합조성의 세라믹스가 합성되었다. 그러나 풍부한 유기 반응기를 가진 PCS와 카보닐기가 탄소공급원으로 작용하는 Mo(CO)6를 반응물로 사용하였을 때는 SiC와 Mo2C와 같은 탄화물과 미향의 MoSi2 그리고 미확인상을 포함한 세라믹 복합상들이 얻어졌다.

• 전자공학회논문지A
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• 제28A권1호
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• pp.85-90
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• 1991

MoSi$_2$ was formed by RTA (Rapid Thermal Annealing at 600-1200$^{\circ}C$) under Ar ambient from the Mo-Si mixture film which was deposited on single and poly-Si substrates. The MoSi$_2$ film was investigated by SEM, X-ray diffractometer, four-points probe and AES profile. It was found that the resistivity, the surface roughness, and the formation temperature of MoSi$_2$ were independent on the type of Si substrates. The formation of MoSi$_2$ started from 800$^{\circ}C$ and the phse transformation was completed at 1000$^{\circ}C$. The stable MoSi$_2$ with the resistivity of 74${\mu}{\Omega}$-cm was formed at 1200$^{\circ}C$.

• 한국분말재료학회지
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• 제4권4호
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• pp.298-303
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• 1997

The activated sintering behavior of $MoSi_2$ powder compacts with addition of 0.5 and 1.0 wt.%Ni during the sintering under As atmosphere was studied. The shrinkage was measured and the microstructures were observed by SEM (scanning electron microscopy) and BEI (backscattered electron image) along with the phase analysis by EDS during heating up to 155$0^{\circ}C$ and holding for various time at 155$0^{\circ}C$. The most of shrinkage occurred upon heating and 92% of theoretical density was attained after sintering for 1 hr at 155$0^{\circ}C$. However, little shrinkage ensued even for prolonged sintering over 1 hr at 155$0^{\circ}C$. A liquid film formed at about 135$0^{\circ}C$ along necks and grain boundaries. The polyhedral grain structure composed of $(Mo,Ni)_5Si_3$and $Ni_2Si$ across the $MoSi_2$ grain boundary developed at 155$0^{\circ}C$. It was concluded that the activated sintering of $MoSi_2$ powder by Ni led to the diffusion of Si into Ni decreasing the liquidus temperature and the enhanced diffusion of Mo and Si through such a liquid phase and/or interboundary of $(Mo,Ni)_5Si_3$.

• 한국결정성장학회지
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• 제7권4호
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• pp.665-672
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• 1997

Molybdenum silicides $MoSi_2$ 및 $Mo_5Si_3$를 제조하기 위하여 순금속 Mo과 Si의 혼합분말을 볼밀법으로 실온에서 기계적 합금화시켰다. $MO_{33}Si_{67}$조성의 혼합분말을 100시간 볼밀처리한 결과 금속간화합물 $MoSi_2$가 생성되었으며 $725^{\circ}C$까지 후열처리시킴으로써 단상의 $MoSi_2$로 상변태함을 알 수 있었다. 얻어진 분말의 결정립 크기는 19 nm로 시판 $MoSi_2$분말보다 약 1/4로 매우 미세하였다. 또한 $Mo_{62}Si_{38}$ 조성의 혼합분말도 300시간 볼밀처리를 함으로써 금속간화합물 $Mo_5Si_3$가 생성되었는데 $1000^{\circ}C$까지의 후열처리로 단상 $Mo_5/Si_3$의 미세 결정립 분말을 얻었다. 이와같이 볼밀처리에 의한 기계적 합금화시 $Mo_5Si_3$상이 형성되기 어려운 것은 금속간화합물 $Mo_5Si_3$이 가지고 있는 복잡한 결정구조와 매우 큰 단위격자에 기인하는 것으로 판단하였다. 볼밀법에 의해 제조한 초미세 결정립 분말재료는 기계적 성질을 향상시켜 초고온 구조재료에 응용이 기대된다.

• 한국세라믹학회지
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• 제31권12호
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• pp.1588-1598
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• 1994

The SiC/MoSi2 composite materials were fabricated by infiltrating the mixture of molybdenum disilicide and metal silicon(MoSi2+Si=100) to a porous compact of silicon carbide and graphite under the vacuum atmosphere of 10-1 torr. The specimen were oxidized in dry air under 1 atm at 130$0^{\circ}C$~150$0^{\circ}C$ for 240 hours. The oxidation behavior was evaluated by the weight gain and loss per unit area of the oxidized samples. Also, SEM and XRD analysis of the oxidized surface of the samples were carried out. With increasing the MoSi2 content and oxidation temperature, the passive oxidation was found. The trend of weight gain of all samples was followed the parabolic rate law with the formation of a protective layer of cristobalite on the surface.