• International Journal of Ocean System Engineering
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• v.2 no.4
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• pp.244-249
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• 2012

In this study, a monolithic MoSi2 matrix reinforced with 20 vol% SiC particles, a SiC/MoSi2 composite matrix reinforced with 20 vol% ZrO2 particles, and a ZrO2/MoSi2 composite were fabricated using hot press sintering at $1350^{\circ}C$ for 1 h under a pressure of 30 MPa. The Vickers hardness and sliding wear resistance of the monolithic MoSi2, ZrO2/MoSi2, and SiC/MoSi2 composite were investigated at room temperature. A wear behavior test was carried out using a disk-type wear tester with a silicon nitride ball. The ZrO2/MoSi2 composite showed an average Vickers hardness value and excellent wear resistance compared with the monolithic MoSi2 and SiC/MoSi2 composite at room temperature.

• Journal of the Korean Ceramic Society
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• v.37 no.8
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• pp.805-810
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• 2000

The formation, microstructure and properties of MoSi2/SiC ceramic composites by polymer pyrolysis were investigated for the application of heating element material. Polymethylsiloxanes were mixed with Si, SiC, MoSi2 as filler and ceramic composites prepared by pyrolysis in N2 atmosphere at 1320~145$0^{\circ}C$ were studied. Dimensional change, density variation and phases were analyzed and correlated to the resulting material properties. Microstructures of ceramic composite prepared by polymer pyrolysis were composed of MoSi2, SiC and silicon oxycarbide glass matrix. Depending on the pyrolysis conditions, ceramic composites with a density of 86~90 TD%, a fracture strength of 213~284 MPa, a thermal expansion coefficient of 4~7$\times$10-6 were obtained. The electrical resistivity of the specimen decreased with increasing of temperature up to 50$0^{\circ}C$.

• Journal of the Korean Vacuum Society
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• v.6 no.2
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• pp.143-150
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• 1997

In this study, doffusion barrier properties of 1000 $\AA$ thick molybdenum compound(Mo, Mo-N, $MoSi_2$, Mo-Si-N) films were investigated using sheet resistance measurement, X-ray diffraction(XRD), X-ray photoelectron spectroscopy(XPS), Scanning electron mircoscopy(SEM), and Rutherford back-scattering spectrometry(RBS). Each barrier material was deposited by the dc magnetron sputtering and annealed at 300-$800^{\circ}C$ for 30 min in vacuum. Mo and MoSi2 barrier were faied at low temperatures due to Cu diffusion through grain boundaries and defects in Mo thin film and the reaction of Cu with Si within $MoSi_2$, respectively. A failure temperature could be raised to $650^{\circ}C$-30 min in the Mo barrier system and to $700^{\circ}C$-30 min in the Mo-silicide system by replacing Mo and $MoSi_2$ with Mo-N and Mo-Si-N, respectively. The crystallization temperature in the Mo-silicide film was raised by the addition of $N_2$. It is considered that not only the $N_2$, stuffing effect but also the variation of crystallization temperature affects the reaction of Cu with Si within Mo-silicide. It is found that Mo-Si-N is the more effective barrier than Mo, $MoSi_2$, or Mo-N to copper penetraion preventing Cu reaction with the substrate for $30^{\circ}C$min at a temperature higher than $650^{\circ}C$.

• Journal of the Korean Ceramic Society
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• v.31 no.4
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• pp.399-406
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• 1994

The SiC/MoSi2 composite material was prepared by infiltration with the mixture of metal Si and MoSi2 into the preform of $\alpha$-SiC and graphite under the vacuum atmosphere of 10-1 torr. The mechanical properties, phases and microstructural characteristics have been investigated by employing an universal testing machine, scanning electron microscope and X-ray diffractometer. With the increase of MoSi2/Si mixing content, the quantity of the residual silicon phase was decreased and the hardness and fracture toughness of composite materials were increased. Also, as the infiltration temperature increased, a lot of fine-grained $\beta$-SiC phases, which were produced from the reaction of graphite and liquid silicon melt, were transformed to $\alpha$-SiC phases.

• Journal of the Korean institute of surface engineering
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• v.40 no.6
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• pp.279-282
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• 2007

Cr-Mo-Si-C-N coatings were deposited on steel and Si wafer by a hybrid system of AIP and sputtering techniques using Cr, Mo and Si target in $Ar/N_2/CH_4$ gaseous mixture. Instrumental analyses of XRD and XPS revealed that the Cr-Mo-Si-C-N coatings must be a composite consisting of fine(Cr, Mo and Si)(C and N) crystallites and amorphous $Si_3N_4$ and SiC. The hardness value of Cr-Mo-Si-C-N coatings significantly increased from 41 GPa of Cr-Mo-C-N coatings to about 53 GPa with Si content of 9.3 at.% due to the refinement of (Cr, Mo and Si)(C and N) crystallites and the composite microstructure characteristics. A systematic investigation of the microstructures and mechanical properties of Cr-Mo-Si-C-N coatings prepared with various Si contents is reported in this paper.

• Korean Journal of Materials Research
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• v.6 no.5
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• pp.515-523
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• 1996

세라믹 전구체로서 PCS와 PMS 두 종류의 실린콘 고분자를 합성하여 7, 15, 33 wt.%의 Mo분말, Mo(CO)6 금속화합물과 혼합한 뒤 130$0^{\circ}C$이상 가열하면 탄화물과 규화물의 다양한 세라믹복합재로 전이되었다. 특히 PMS용액에 7, 15 wt.% Mo분말을 분산하여 초음파 처리하면 열분해 수율이 60%까지 개선되고 전도성 소재인 SiC/MoSi2 복합조성의 세라믹스가 합성되었다. 그러나 풍부한 유기 반응기를 가진 PCS와 카보닐기가 탄소공급원으로 작용하는 Mo(CO)6를 반응물로 사용하였을 때는 SiC와 Mo2C와 같은 탄화물과 미향의 MoSi2 그리고 미확인상을 포함한 세라믹 복합상들이 얻어졌다.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.28A no.1
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• pp.85-90
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• 1991

MoSi$_2$ was formed by RTA (Rapid Thermal Annealing at 600-1200$^{\circ}C$) under Ar ambient from the Mo-Si mixture film which was deposited on single and poly-Si substrates. The MoSi$_2$ film was investigated by SEM, X-ray diffractometer, four-points probe and AES profile. It was found that the resistivity, the surface roughness, and the formation temperature of MoSi$_2$ were independent on the type of Si substrates. The formation of MoSi$_2$ started from 800$^{\circ}C$ and the phse transformation was completed at 1000$^{\circ}C$. The stable MoSi$_2$ with the resistivity of 74${\mu}{\Omega}$-cm was formed at 1200$^{\circ}C$.

• Journal of Powder Materials
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• v.4 no.4
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• pp.298-303
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• 1997

The activated sintering behavior of $MoSi_2$ powder compacts with addition of 0.5 and 1.0 wt.%Ni during the sintering under As atmosphere was studied. The shrinkage was measured and the microstructures were observed by SEM (scanning electron microscopy) and BEI (backscattered electron image) along with the phase analysis by EDS during heating up to 155$0^{\circ}C$ and holding for various time at 155$0^{\circ}C$. The most of shrinkage occurred upon heating and 92% of theoretical density was attained after sintering for 1 hr at 155$0^{\circ}C$. However, little shrinkage ensued even for prolonged sintering over 1 hr at 155$0^{\circ}C$. A liquid film formed at about 135$0^{\circ}C$ along necks and grain boundaries. The polyhedral grain structure composed of $(Mo,Ni)_5Si_3$and $Ni_2Si$ across the $MoSi_2$ grain boundary developed at 155$0^{\circ}C$. It was concluded that the activated sintering of $MoSi_2$ powder by Ni led to the diffusion of Si into Ni decreasing the liquidus temperature and the enhanced diffusion of Mo and Si through such a liquid phase and/or interboundary of $(Mo,Ni)_5Si_3$.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.7 no.4
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• pp.665-672
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• 1997

We applied mechanical alloying process by ball milling to produce molybdenum silicides $MoSi_2$ and $Mo_5Si_3$ using a mixture of elemental molybdenum and silicon powders at room temperature. The intermetallic compound MoSi$_3$ have been obtained by ball milling of $Mo_{33}Si_{67}$ mixture powders for 100 h, which is transformed to single $MoSi_2$ phase by subsequent heat treatment up to $725^{\circ}C$. The grain size of the $MoSi_2$ powders thus obtained was 19 nm, being approximately four times smaller than that of the commercial alloy. The intermetallic compound $MoSi_2$ with grain size of 30 nm have been also obtained by ball milling of $Mo_{62}Si_{38}$ mixture powders for 500 h, which is transformed to single $MoSi_2$ phase by heating up to $1000^{\circ}C$. We believe that the retarded ball milling time for the formation of $MoSi_2$ phase is attributed to its complicated crystal structure and large unit cell. The finer grain size in the ball-milled molybdenum silicides powders is expected to improve room-temperature mechanical properties for high-temperature structural materials.

• Journal of the Korean Ceramic Society
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• v.31 no.12
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• pp.1588-1598
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• 1994

The SiC/MoSi2 composite materials were fabricated by infiltrating the mixture of molybdenum disilicide and metal silicon(MoSi2+Si=100) to a porous compact of silicon carbide and graphite under the vacuum atmosphere of 10-1 torr. The specimen were oxidized in dry air under 1 atm at 130$0^{\circ}C$~150$0^{\circ}C$ for 240 hours. The oxidation behavior was evaluated by the weight gain and loss per unit area of the oxidized samples. Also, SEM and XRD analysis of the oxidized surface of the samples were carried out. With increasing the MoSi2 content and oxidation temperature, the passive oxidation was found. The trend of weight gain of all samples was followed the parabolic rate law with the formation of a protective layer of cristobalite on the surface.