• Transactions of the Korean hydrogen and new energy society
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• v.22 no.2
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• pp.161-167
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• 2011

Proton conductors have attracted considerable attention for solid oxide fuel cell (SOFC), hydrogen pump, gas sensor, and membrane separators. Doped $SrCeO_3$ exhibits appreciable proton conductivity in hydrogen-containing atmosphere at high temperature. However commercial realization has been hampered due to the reactivity of $SrCeO_3$ with $CO_2$. The chemical stability and proton conductivity are dependent on dopant type. The purpose of this work is to investigate chemical stability of $SrCe_{0.95}Gd_{0.05}O_{3-\alpha}-Ce_{0.9}Gd_{0.1}O_{2-\beta}$ composites in $CO_2$ and $H_2$ gases. Thermogravimetric analysis (TGA) was performed in gaseous $CO_2$ and electrical conductivity of the composites were also measured between 500 and $900^{\circ}C$ in air and $H_2$ atmosphere. $SrCe_{0.95}Gd_{0.05}O_{3-\alpha}-Ce_{0.9}Gd_{0.1}O_{2-\beta}$ composite membranes showed good chemical stability of in $CO_2$ atmosphere and high conductivity at hydrogen condition. The hydrogen permeation of $SrCe_{0.95}Gd_{0.05}O_{3-\alpha}-Ce_{0.9}Gd_{0.1}O_{2-\beta}$ composite membranes was investigated as a function of volumetric content of $SrCe_{0.95}Gd_{0.05}O_{3-\alpha}$. The $SrCe_{0.95}Gd_{0.05}O_{3-\alpha}-Ce_{0.9}Gd_{0.1}O_{2-\beta}$(6:4) membrane with a thickness of 1.0 mm showed the highest hydrogen permeability with the flux reaching of 0.12 $ml/min{\cdot}cm^2$ at $800^{\circ}C$ in 100%$H_2/N_2$ as feed gas.

• Journal of the Korean institute of surface engineering
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• v.57 no.1
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• pp.38-48
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• 2024

We fabricated In₂O₃ zig-zag nanocolumns(ZZNCs) by oblique angle deposition method based on e-beam evaporator for highly sensitive and selective CH₃COCH₃ sensor. Our results indicate that as the ZZNCs layer stacks, the gas response also increases. In comparison to thin films, ZZNCs at 5 layer show a 117-fold enhancement in gas response and a rapid response time (~2 s). When measured with various gases, it showed a high selectivity towards acetone. Under conditions of 80% R.H., exposure to CH₃COCH₃ gas theoretically indicated a detection limit of 1.2 part-per-billion(ppb). These results suggest the potential of In₂O₃ ZZNCs as a breath analyzer for the diagnosis of diabetes.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.67-70
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• 2003

단원계 및 이원계 촉매를 이용하여 나노 감지 소자를 합성하였고, 이를 이용하여 가연성 후막 가스 센서를 제작, 촉매 시스템에 따른 가스 감지 특성을 비교하였다. 단원계의 경우 Pd 및 Pt를 각각 3wt%로, 이원계의 경우 Pd:Pt 농도를 1:2~2:1wt%로 각각 제어하여 평균 입도가 15 nm 인 $SnO_2$ 나노 분말에 도핑, 감지물질을 합성하였다. 그 후 감지물질을 paste로 만들어 인쇄, 가스센서 제작 후 $450{\sim}600^{\circ}C$의 온도로 열처리하였다. 그 결과 이원계 촉매 시스템을 가진 가스 센서는 시효 시간에 따라 감도 값이 변하는 불안정한 현상을 나타내었다, 그러나 단원계 촉매의 경우 시효 시간이 지나도 감도 값이 안정된 현상을 나타내었다. 특히 3wt% pt를 도핑하여 $500^{\circ}C$에서 열처리한 경우 5시간 시효 후에도 감도 값의 변화 폭이 3.5% 이하의 매우 안정된 특성을 나타내었고 반응 시간도 20초 이하로 매우 빠른 응답 특성을 나타내었다.

• Proceedings of the KIEE Conference
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• 2008.04a
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• pp.45-46
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• 2008

There are various polluting emissions related to the air quality such as $NO_x$, $CO_2$, CO, VOCs, $O_3$, $SO_2$, $CH_4$, $H_2S$, $NH_3$, etc. We need the system that reduces emission of these environment gases and detects risk factors in modern society. Therefore, if we use the USN(Ubiquitous Sensor Network) technology and a MAV(Micro Air Vehicle) Quad Rotor which can be hovering and moving free for setting up the environment gas sensing system, the realtime measurement on environment gases is facilitated and by extension, in application of traffic watchdog, forest fire surveillance and counter-terrorism efforts, we anticipate making better use of a Quad Rotor.

• Korean Journal of Materials Research
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• v.19 no.6
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• pp.325-329
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• 2009

Titanium dioxide thin films were fabricated as hydrogen sensors and its sensing properties were tested. The titanium was deposited on a $SiO_2$/Si substrate by the DC magnetron sputtering method and was oxidized at an optimized temperature of $850^{\circ}C$ in air. The titanium film originally had smooth surface morphology, but the film agglomerated to nano-size grains when the temperature reached oxidation temperature where it formed titanium oxide with a rutile structure. The oxide thin film formed by grains of tens of nanometers size also showed many short cracks and voids between the grains. The response to 1% hydrogen gas was ${\sim}2{\times}10^6$ at the optimum sensing temperature of $200^{\circ}C$, and ${\sim}10^3$ at room temperature. This extremely high sensitivity of the thin film to hydrogen was due partly to the porous structure of the nano-sized sensing particles. Other sensor properties were also examined.

• Journal of Sensor Science and Technology
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• v.31 no.5
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• pp.343-347
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• 2022

Recently, the problem of global warming caused by greenhouse gases is getting serious due to the development of industry and the increase in transportation means. Accordingly, the need for a technology to reduce carbon dioxide, which accounts for most of the greenhouse gas, is increasing. Among them, a catalyst for converting carbon dioxide into fuel is being actively studied. Catalysts for reducing carbon dioxide are classified into thermal catalysts and photocatalysts. In particular, the photocatalyst has the advantage that carbon dioxide can be reduced only by irradiating ultraviolet rays at room temperature without high temperature or additional gas. TiO₂ is widely used as a photocatalyst because it is non-toxic and has high stability, but has a disadvantage of low carbon dioxide reduction efficiency. To increase the reduction efficiency, 1-propanol was used in the synthesis process. This prevents agglomeration of the catalyst and increases the specific surface area and pores of TiO₂, thereby increasing the surface area in contact with carbon dioxide. As a result of measuring the CO₂ reduction efficiency, it was confirmed that the efficiency of TiO₂ with 1-propanol and TiO₂ without 1-propanol was 19% and 12.3%, respectively, and the former showed a 1.5 times improved efficiency.

• Journal of Sensor Science and Technology
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• v.24 no.6
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• pp.379-384
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• 2015

An infrared image sensor is a core device in a thermal imaging system. The fabrication method of a focal plane array (FPA) is a key technology for a high resolution infrared image sensor. Each pixels in the FPA have $Si_3N_4/SiO_2$ membranes including legs to deposit bolometric materials and electrodes on Si readout circuits (ROIC). Instead of polyimide used to form a sacrificial layer, the feasibility of an amorphous silicon (${\alpha}-Si$) was verified experimentally in a $8{\times}8$ micro-bolometer array with a $50{\mu}m$ pitch. The elimination of the polyimide sacrificial layer hardened by a following plasma assisted deposition process is sometimes far from perfect, and thus requires longer plasma ashing times leading to the deformation of the membrane and leg. Since the amorphous Si could be removed in $XeF_2$ gas at room temperature, however, the fabricated micro-bolomertic structure was not damaged seriously. A radio frequency (RF) sputtered nickel oxide film was grown on a $Si_3N_4/SiO_2$ membrane fabricated using a low stress silicon nitride (LSSiN) technology with a LPCVD system. The deformation of the membrane was effectively reduced by a combining the ${\alpha}-Si$ and LSSiN process for a nickel oxide micro-bolometer.

• Journal of Sensor Science and Technology
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• v.9 no.2
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• pp.146-152
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• 2000

Lithium doped zinc oxide(ZnO:Li) films are prepared by rf magnetron sputtering on Corning 7059 glass substrate using specifically designed ZnO targets containing different amount of $Li_2CO_3$ powder as the Li doping source. The structural properties of the Li doped ZnO films are investigated by XRD, SEM and AFM. The electrical properties of the ZnO:Li films are measured for various deposition conditions, such as the substrate temperature, $O_2$/Ar gas ratio and rf power. The effects of the $Li_2CO_3$ content in target and the deposition conditions on the structural and electrical properties were studied. When ZnO:Li films were sputtered at the substrate temperature of $200^{\circ}C$, $O_2$/Ar gas ratio of 100% and rf power of 100W with a target containing less than 1wt% content of $Li_2CO_3$, showed good surface morphology, strong c-axis orientation and high resistivity of more than $10^8{\Omega}cm$.

• Journal of the Korean Applied Science and Technology
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• v.12 no.1
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• pp.125-131
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• 1995

Ultra thin films of Tetra-3-hexadecylsulphamoylcopperphthalocyanine(HDSM-CuPc) were formed on various substrates by Langmuir-Blodgett method, where HDSM-CuPc was synthesized by attaching long-chain alkylamine(hexa-decylamine) to CuPc. The reaction product was identified with FT-IR, UV-visible absorption spectroscopies, elemental analysis and thin layer chromatography. The formation of Ultrathin Langmuir-Blodgett(LB) films of HDSM-CuPc was confirmed by FT-IR and UV-visible spectroscopies. A quartz piezoelectric crystal coated with LB films of HDSM-CuPc was examined as a gas sensor for $N0_2$ gas. HDSM-CuPc LB films were transferred to a quartz crystal microbalance(QCM) in the form of Z-type multilayers. Response characteristics of film-coated QCM to $NO_2$ gas concentrations over a range of $100{\sim}600ppm$ have been tested with a thickness of $5{\sim}20$ layers of HDSM-CuPc. Changes in frequency by adsorption of $NO_2$ were increased With the number of LB layers and $NO_2$ concentration, but the response time was slow.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09a
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• pp.416-417
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• 2006

Nanostructured ceria powder was synthesized by a thermochemical process and investigated its applicability for an oxygen gas sensor. An amorphous precursor powders prepared by spray drying a cerium-nitrate solution were transformed successfully into nanostructured ceria by heat-treatment in air atmosphere. The powders were a loose agglomerated structure with extremely fine $CeO_2$ particles about 15 nm in size, resulting in a very high specific surface area $(110\;m^2/g)$. The oxygen sensitivity and the response time $t_{90}$ measured at sintered sample at $1000^{\circ}C$ was about -0.25 and very short, i.e., $3{\sim}5$ seconds, respectively.