• Title/Summary/Keyword: $C_4$ 전구물질

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Synthesis and Electrochemical Characteristics of Carbon Coated SiOx/ZnO Composites by Sol-gel Method (졸겔법으로 제조한 탄소피복된 SiOx/ZnO 복합체의 합성 및 전기화학적 특성)

  • Baek, Gwang-Yong;Jeong, Sang Mun;Na, Byung-Ki
    • Clean Technology
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    • v.22 no.4
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    • pp.308-315
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    • 2016
  • $SiO_x/ZnO$ composites were prepared from sol-gel method for excellent cycle life characteristics. The composites were coated by PVC as a carbon precursor. ZnO removal to create a void space therein was able to buffer the volume change during charge and discharge. To determine the crystal structure and the shape of the synthesized composite, XRD, SEM, TEM analysis was performed. The carbon contents in the composites were confirmed by TGA. The pore structure and pore size distribution of the composite was measured with the BET specific surface area analysis and BJH pore size distribution. Enhanced electric conductivity by carbon addition was determined from powder resistance measurement. Electrochemical properties were measured with the AC impedance and the charge and discharge cycle life characteristics. When carbon was coated on the $SiO_x/ZnO$ sample, the electrical conductivity and the discharge capacity were increased. After removal of ZnO with HCl the surface area of the sample was increased, but the discharge capacity was decreased. $SiO_x/ZnO$ sample without acarbon coating showed very low discharge capacity, and after carbon coating the sample showed high discharge capacity. For cycle life characteristics, $C-SiO_x/ZnO$ composite (Zn : Si : C = 1 : 1 : 8) with a capacity of $815mAh\;g^{-1}$ at 50 cycle and 0.2 C has higher capacity than existing graphite-based anode materials.

Synthesis of Pt-Bi/Carbon Electrodes by Reduction Method for Direct Methanol Fuel Cell (환원법에 의한 직접 메탄올 연료전지(DMFC)용 Pt-Bi/Carbon 전극제조)

  • Kim, Kwan Sung;Kim, Min Kyung;Noh, Dong Kyun;Tak, Yongsug;Baeck, Sung-Hyeon
    • Applied Chemistry for Engineering
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    • v.22 no.5
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    • pp.479-485
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    • 2011
  • Pt-Bi/C catalysts supported on carbon black with various Pt/Bi ratios were synthesized by a reduction method. Chloroplatinic acid hydrate ($H_2PtCl_6{\cdot}xH_2O$) and bismuth (III) nitrate pentahydrate ($Bi(NO_3)_3{\cdot}5H_2O$) were used as precursors for Pt and Bi, respectively. Before loading metal on carbon, heat treatment and pretreatment of carbon black in an acidic solution was conducted to enhance the degree of dispersion. The physical property of the synthesized catalysts was investigated by X-ray diffraction and X-ray photoelectron spectroscopy. The XRD pattern of untreated Pt-Bi/C catalyst showed BiPt and $Bi_2Pt$ peaks in addition to Pt peaks. These results imply that Bi atoms were incorporated into the Pt crystal lattice by Pt-Bi alloy formation. The catalytic activity for methanol oxidation was measured using cyclic voltammetry in a mixture of 0.5 M $H_2SO_4$ and 0.5 M $CH_3OH$ aqueous solution. The addition of proper amount of Bi was found to significantly improve catalytic activity for methanol oxidation. The catalytic activity for methanol oxidation was closely related to the stability between electrode and electrolyte. In order to investigate the stability of catalysts, chronoamperometry analysis was carried out in the same solution at 0.6 V.

Charaterization of Biomass Production and Wastewater Treatability by High-Lipid Algal Species under Municial Wastewater Condition (실제 하수조건에서 고지질 함량 조류자원의 생체생성과 하수처리 특성 분석)

  • Lee, Jang-Ho;Park, Joon-Hong
    • Journal of Korean Society of Environmental Engineers
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    • v.32 no.4
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    • pp.333-340
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    • 2010
  • Wastewater treatment using algal communities and biodiesel production from wastewater-cultivated algal biomass is a promising green growth technology. In literature, there are many studies providing information on algal species producing high content of lipid. However, very little is known about adaptability and wastewater treatability of such high-lipid algal species. In this study, we attempted to characterize algal biomass production and wastewater treatability of high-lipid algal species under municipal wastewater condition. For this, four known high-lipid algal strains including Chlorella vulgaris AG 10032, Ankistrodesmus gracilis SAG 278-2, Scenedesmus quadricauda, and Botryococcus braunii UTEX 572 were individually inoculated into municipal wastewater where its indigenuous algal populations were removed prior to the inoculation, and the algae-inoculated wastewater was incubated in the presence of light source (80${\mu}E$) for 9 days in laboratory batch reactors. During the incubations, algal biomass production (dry weight) and the removals of dissolved organics (COD), nitrogen and phosphorous were measured in laboratory batch reactors. According to algal growth results, C. vulgaris, A. gracilis and S. quadricauda exhibited faster growth than indigenuous wastewater algal populations while B. braunii did not. The wastewater-growing strains exhibited efficient removals of total-N, ${NH_4}^+$-N, Total-P and ${PO_4}^{3-}$-P which satisfy the Korea water quality standards for effluent from municipal wastewater treatment plants. A. gracilis and S. quadricauda exhibited efficient and stable treatability of COD but C. vulgaris showed unstable treatability. Taken together with the results, A. gracilis and S. quadricauda were found to be suitable species for biomass production and wastewater treatment under municipal wastewater condition.

Characteristics of CuGa precursor deposited by sputter as Electron beam irradiation (Sputtering 방법을 이용하여 증착된 CuGa precursor의 전자빔조사에 따른 특성분석)

  • Park, Insun;Kim, Chaewoong;Jung, Seungchul;Kim, Dongjin;Kwon, Hyuk;Kim, Jinhyeok;Jung, Chae Hwan
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.11a
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    • pp.52.1-52.1
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    • 2011
  • 최근에 에너지 자원의 고갈이 다가오는 상황에서 태양전지 분야가 주목받고 있으며 이에 대한 시장이 급격하게 확대되고 있다. 그러나 현재의 태양전지는 주를 이루고있는 실리콘태양전지의 경우 원재료 수급이 불안정하여 가격 변동이 심하다. 따라서 이를 대체할 2세대 태양전지인 박막형 태양전지의 연구가 활발히 이루어지고 있다. 박막형 태양전지 중에서도 주목받고 있는 것은 Cu(In,Ga)$Se_2$(CIGS)박막 태양전지이다. CIGS는 Ga의 농도에 따라 1.02~1.68eV의 다양한 에너지 밴드갭을 갖는 직접천이형 반도체 물질이다. 또한 $1{\times}10^5cm^{-1}$의 높은 광흡수계수를 가지고 있으며, $450{\sim}590^{\circ}C$의 고온공정에서도 매우 안정하여 열화현상이 거의 보이지 않아 박막형 광흡수층 재료로서 적합하다. 흡수층을 제조하는 방법은 여러 가지가 있지만, 본 연구에서는 균일성이 뛰어나고 원료사용효율이 높은 sputtering 방법을 사용하였다. 그리고 결정화하기위해서 유독기체를 사용하는 셀.렌.화. (selenization) 방법 대신 전자빔을 조사하는 방법을 채택하였다. sputtering을 통한 CIGS precursor을 제조하기위해 2~3개의 화합물target을 사용하는데, 대표적인 방법으로 동시에 sputtering하는 co-sputtering 방법과 각각의 단일 층을 쌓아 제조하는 stack형으로 분류된다. 본 연구는 CIGS precursor를 제조하기 앞서 CuGa 단일 층만을 제조하여 공정조건에 따른 박막을 제조하였다. 제조된 CuGa 단일층은 전자빔 처리에 따른 영향을 알아보기 위해 전자빔의 세기와 공정시간을 달리하여 특성을 알아보았다. 실험에서는 Cu:75wt%,Ga:25wt% 조성의 target을 사용하여 공정 압력을 각각 10~1mTorr로 변화시키며 실험을 실시하였으며 공정 power는 50W, 70W, 100W로 변화 시키며 실험을 실시하였다. 이때 실험의 초기진공은 turbo-molecular pump를 이용하여 $1{\times}10^{-6}torr$ 이하로 하였으며, Target과 기판사이의 거리는 모두 같은 조건으로 고정하여 실험을 실시하였다. 박막의 균일성을 증가시키기 위하여 5 rpm의 속도로 기판을 회전하였으며 기판 온도는 가열하지 않고 상온에서 전구체를 증착하였다. 그 후 전자빔의 세기를 고정 시킨 후 전자빔 조사 시간을 조절하여 전자빔 조사 전후의 특성을 각각 분석하였다. 전기적특성은 Hall effect, 4-point probe, 구조적 특성은 SEM,EDS, XRD, XRF 를 이용하여 분석하였다.

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Catalyst-free 유기 금속 화학 증착법을 이용한 InN 나노구조의 성장

  • Kim, Min-Hwa;Lee, Cheol-Ho;Jeong, Geon-Uk;Mun, Dae-Yeong;Jeon, Jong-Myeong;Kim, Mi-Yeong;Park, Jin-Seop;Lee, Gyu-Cheol;Yun, Ui-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.264-265
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    • 2010
  • 최근, nanorod나 nanowire와 같은 1차원의 나노구조가 나노디바이스로 각광을 받고 있다. [1] 특히 InN는 3족 질화물 반도체 중 가장 작은 밴드갭 에너지와 뛰어난 수송 특성을 가지고 있어 나노디바이스로의 응용에 적합한 물질이다. [2] 그러나 InN는 큰 평형증기압을 가지므로 쉽게 인듐과 질소로 분해되는 특성이 있어 나노구조로의 성장이 쉽지 않음이 알려져 있다. [3] 최근 연구결과에 따르면, InN 나노구조는 금속 catalyst를 사용한 방법이나, 기판 위 패턴을 이용하여 성장하는 방법, 염소를 사용한 방법이 널리 쓰이고 있다. [4,5,6] 그러나 이 방법들은 의도치 않은 불순물의 원인이 되거나 다른 추가적인 과정을 필요로 한다는 문제점도 일부 가지고 있다. 본 연구에서는 catalyst-free 유기 금속 화학 증착법 (MOCVD)를 이용하여 $Al_2O_3$ (0001)면 위에 InN nanostructure를 성장하였다. InN nanostructure 성장 시 트리메틸인듐(TMIn)과 암모니아($NH_3$) 를 전구체로 사용하였으며, 캐리어 가스로는 질소를 사용하였다. 또한 모든 샘플의 성장시간은 60분으로 고정하였으나, 성장 시 온도의 의존성을 보기 위해 $680-710^{\circ}C$ 의 온도범위에서 성장을 진행하였다. 그 결과 InN는 본 실험에서 적용된 성장온도범위 내에서 온도가 증가함에 따라 초기에는 columnar구조로 성장된 박막의 형태에서 wall이 배열된 형태로 변화하며 결국 $710^{\circ}C$ 의 온도에서 nanorod로 성장하게 된다. 성장된 InN의 나노구조는 X-선 회절 측정법, 주사 전자 현미경 그리고 투과 전자 현미경을 이용하여 각각의 구조적 특성을 분석하였다. X-선 회절 측정법과 주사 전자 현미경을 통한 분석결과에서는 이들 nanorods가 대부분 c 방향으로 수직하게 정렬되어 있음을 확인 할 수 있었다. 또한, $690^{\circ}C$ 에서 60분간 성장된 InN의 wall 구조의 두께는 200 nm, 길이는 $2-2.5\;{\mu}m$로 관찰되었으며, $710^{\circ}C$에서 60분간 성장된 InN nanorod의 지름은 150 nm, 길이는 $3\;{\mu}m$ 정도로 관찰되었다. 이를 통하여 볼 때 성장 온도가 InN의 나노구조 형성 시 표면의 모폴로지변화에 중요한 변수로 작용함을 알 수 있다. 본 발표에서는 이러한 표면 형상 및 구조 변화가 성장온도에 따른 관계성을 가짐을 InN의 분해와 성장의 경쟁적인 관계에 의해 논의할 것이다.

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Studies on Sclerotium rolfsii Sacc. isolated from Magnolia kobus DC. in Korea (목련(Magnolia kobus DC.)에서 분리한 흰비단병균(Sclerotium rolfsii Sacc.)에 관한 연구)

  • Kim Kichung
    • Korean journal of applied entomology
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    • v.13 no.3 s.20
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    • pp.105-133
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    • 1974
  • The present study is an attempt to solve the basic problems involved in the control of the Sclerotium disease. The biologic stranis of Sclerotium rolfsii Sacc., pathogen of Sclerotium disease of Magnolia kobus, were differentiated, and the effects of vitamins, various nitrogen and carbon sources on its mycelial growth and sclerotial production have been investigated. In addition the relationship between the cultural filtrate of Penicillium sp. and the growth of Sclerotium rolfsii, the tolerance of its mycelia or sclerotia to moist heat or drought and to Benlate (methyl-(butylcarbamoy 1)-2-benzimidazole carbamate), Tachigaren (3-hydroxy-5-methylisoxazole) and other chemicals were also clarified. The results are summarizee as follows: 1. There were two biologic strains, Type-l and Type-2 among isolates. They differed from each other in the mode of growth and colonial appearance on the media, aversion phenomenon and in their pathogenicity. These two types had similar pathogenicity to the Magnolia kobus and Robinia pseudoacasia, but behaved somewhat differently to the soybaen and cucumber, the Type-l being more virulent. 2. Except potassium nitrite, sodium nitrite and glycine, all of the 12 nitrogen sources tested were utilized for the mycelial growth and sclerotial production of this fungus when 10r/l of thiamine hydrochloride was added in the culture solution. Considering the forms of nitrogen, ammonium nitrogen was more available than nitrate nitrogen for the growth of mycelia, but nitrate nitrogen was better for sclerotia formation. Organic nitrogen showed different availabilities according to compounds used. While nitrite nitrogen was unavailable for both mycelial growth and sclerotial formation whether thiamine hydrochlioride was added or not. 3. Seven kinds of carbon sources examined were not effective in general, as long as thiamine hydrochloride was not added. When thiamine hydrochloride was added, glucose and saccharose exhibited mycelial growth, while rnaltose and soluble starch gave lesser, and xylose, lactose, and glycine showed no effect at all,. In the sclerotial production, all the tested carbon sources, except lactose, were effective, and glucose, maltose, saccharose, and soluble starch gave better results. 4. At the same level of nitrogen, the amount of mycelial growth increased as more carbon Sources were applied but decreased with the increase of nitrogen above 0.5g/1. The amount of sclerotial production decreased wi th the increase of carbon sources. 5. Sclerotium rolfsii was thiamine-defficient and required thiamine 20r/l for maximun growth of mycelia. At a higher concentration of more than 20r/l, however, mycelial growth decreased as the concentration increased, and was inhibited at l50r/l to such a degree of thiamine-free. 6. The effect of the nitrogen sources on the mycelial growth under the presence of thiamine were recognized in the decreasing order of $NH_4NO_3,\;(NH_4)_2SO_4,\;asparagine,\;KNO_3$, and their effects on the sclerotial production in the order of $KNO_3,\;NH_4NO_3,\;asparagine,\;(NH_4)_2SO_4$. The optimum concentration of thiamine was about 12r/l in $KNO_3$ and about 16r/l in asparagine for the growth of mycelia; about 8r/l in $KNO_3$ and $NH_4NO_3$, and 16r/l in asparagine for the production of sclerotia. 7. After the fungus started to grow, the pH value of cultural filtrate rapidly dropped to about 3.5. Hereafter, its rate slowed down as the growth amount increased and did not depreciated below pH2.2. 8. The role of thiamine in the growth of the organism was vital. If thiamine was not added, the combination of biotin, pyridoxine, and inositol did not show any effects on the growth of the organism at all. Equivalent or better mycelial growth was recognized in the combination of thiamine+pyridoxine, thiamine+inositol, thiamine+biotin+pyridoxine, and thiamine+biotin+pyridoxine+inositol, as compared with thiamine alone. In the combinations of thiamine+biotin and thiamine+biotin+inositol, mycelial growth was inhibited. Sclerotial production in dry weight increased more in these combinations than in the medium of thiamine alone. 9. The stimulating effects of the Penicillium cultural filtrate on the mycelial growth was noticed. It increased linearly with the increase of filtrate concentration up to 6-15 ml/50ml basal medium solution. 10. $NH_4NO_3$. as a nitrogen source for mycelial growth was more effective than asparasine regardless of the concentration of cultural filtrate. 11. In the series of fractionations of the cultural filtrate, mycelial growth occured in unvolatile, ether insoluble cation-adsorbed or anion-unadsorbed substance fractions among the fractions of volatile, unvolatile acids, ether soluble organic acids, ether insoluble, cation-adsorbed, cation-unadsorbed, anion-adsorbed and anion-unadsorbed. and anion-un-adsorbed substance tested. Sclerotia were produced only in cation-adsorbed fraction. 12. According to the above results, it was assumed that substances for the mycelial growth and sclerotial formation and inhibitor of sclerotial formation were include::! in cultural filtrate and they were quite different from each other. I was further assumed that the former two substances are un volatile, ether insotuble, and adsorbed to cation-exchange resin, but not adsorbed to anion, whereas the latter is unvolatile, ether insoluble, and not adsorbed to cation or anion-exchange resin. 13. Seven amino acids-aspartic acid, cystine, glysine, histidine, Iycine, tyrosine and dinitroaniline-were detected in the fractions adsorbed to cation-exchange resin by applying the paper chromatography improved with DNP-amino acids. 14. Mycelial growth or sclerotial production was not stimulated significantly by separate or combined application of glutamic acid, aspartic acid, cystine, histidine, and glysine. Tyrosine gave the stimulating effect when applied .alone and when combined with other amino acids in some cases. 15. The tolerance of sclerotia to moist heat varied according to their water content, that was, the dried sclerotia are more tolerant than wet ones. The sclerotia harvested directly from the media, both Type-1 and Type-2, lost viability within 5 minutes at $52^{\circ}C$. Sclerotia dried for 155 days at$26^{\circ}C$ had more tolerance: sclerotia of Type-l were killed in 15 mins. at $52^{\circ}C$ and in 5 mins. at $57^{\circ}C$, and sclerotia of Type-2 were killed in 10 mins. both at $52^{\circ}C$ or $57^{\circ}C$. 16. Cultural sclerotia of both strains maintained good germinability for 132 days at$26^{\circ}C$. Natural sclerotia of them stored for 283 days under air dry condition still had good germinability, even for 443 days: type-l and type-2 maintained $20\%$ and $26.9\%$ germinability, respectively. 17. The tolerance to low temperature increased in the order of mycelia, felts and sclerotia. Mycelia completely lost the ability to grow within 1 week at $7-8^{\circ}C$> below zero, while mycelial felts still maintained the viability after .3 weeks at $7-20^{\circ}C$ below zero, and sclerotia were even more tolerant. 18. Sclerotia of type-l and type-2 were killed when dipped into the $0.05\%$ solution of mercury chloride for 180 mins. and 240 mins. respectively: and in the $0.1\%$ solution, Type-l for 60 mins. and Type-2 for 30 mins. In the $0.125\%$ uspulun solution, Type-l sclerotia were killed in 180 mins., and those of Type-2 were killed for 90 mins. in the$0.125\%$solution. Dipping into the $5\%$ copper sulphate solution or $0.2\%$ solution of Ceresan lime or Mercron for 240 mins. failed to kill sclerotia of either Type-l or Type-2. 19. Inhibitory effect on mycelial growth of Benlate or Tachi-garen in the liquid culture increased as the concentration increased. 6 days after application, obvious inhibitory effects were found in all treatments except Benlate 0.5ppm; but after 12 days, distingushed diflerences were shown among the different concentrations. As compared with the control, mycelial growth was inhibited by $66\%$ at 0.5ppm and by $92\%$ at 2.0ppm of Benlate, and by$54\%$ at 1ppm and about $77\%$ at 1.5ppm or 2.0ppm of Tachigaren. The mycelial growth was inhibited completely at 500ppm of both fungicides, and the formation of sclerotia was checked at 1,000ppm of Benlate ant at 500ppm or 1,000ppm of Tachigaren. 20. Consumptions of glucose or ammonium nitrogen in the culture solution usually increased with the increment of mycelial growth, but when Benlate or Tachigaren were applied, consumptions of glucose or ammonium nitrogen were inhibited with the increment of concentration of the fungicides. At the low concentrations of Benlate (0.5ppm or 1ppm), however, ammonium nitrogen consumption was higher than that of the ontrol. 21. The amount of mycelia produced by consuming 1mg of glucose or ammonium nitrogen in the culture solution was lowered markedly by Benlate or Tachigaren. Such effects were the severest on the third day after their treatment in all concentrations, and then gradually recovered with the progress of time. 22. In the sand culture, mycelial growth was not inhibited. It was indirectly estimated by the amount of $CO_2$ evolved at any concentrations, except in the Tachigaren 100mg/g sand in which mycelial growth was inhibited significantly. Sclerotial production was completely depressed in the 10mg/g sand of Benlate or Tachigaren. 23. There was no visible inhibitory effect on the germination of sclerotia when the sclerotia were dipped in the solution 0.1, 1.0, 100, 1.000ppm of Benlate or Tachigaren for 10 minutes or even 20 minutes.

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A Study on Preparation of 3'-$[^{18}F]$Fluoro-3'-deoxythymidine and Its Biodistribution in 9L Glioma Bearing Rats (3'-$[^{18}F]$Fluoro-3'-deoxythymidine의 합성과 9L glioma 세포를 이식한 래트에서의 체내동태에 관한 연구)

  • Shim, Ah-Young;Moon, Byung-Seok;Lee, Tae-Sup;Lee, Kyo-Chul;An, Gwang-Il;Yang, Seung-Dae;Yu, Kook-Hyun;Cheon, Gi-Jeong;Choi, Chang-Woon;Lim, Sang-Moo;Chun, Kwon-Soo
    • Nuclear Medicine and Molecular Imaging
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    • v.40 no.5
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    • pp.263-270
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    • 2006
  • Purpose: Several radioisotope-labeled thymidine derivatives such as $[^{11}C]$thymidine was developed to demonstrate cell proliferation in tumor. But it is difficult to track metabolism with $[^{11}C]$thymidine due to rapid in vivo degradation and its short physical half-life. 3'-$[^{18}F]$fluoro-3'-deoxythymidine ($[^{18}F]$FLT) was reported to have the longer half life of fluorine-18 and the lack of metabolic degradation in vivo. Here, we described the synthesis of the 3'-$[^{18}F]$fluoro-3'-deoxythymidine ($[^{18}F]$FLT) and compared with $([^{18}F]FET)\;and\;([^{18}F]FDG)$ in cultured 9L cell and obtained the biodistribution and PET image in 9L tumor hearing rats. Material and Methods: For the synthesis of $[^{18}F]$FLT, 3-N-tert-butoxycarbonyl-(5'-O-(4,4'-dimet hoxytriphenylmethyl)-2'-deoxy-3'-O-(4-nitrobenzenesulfonyl)-${\beta}$-D-threopentofuranosyl)thymine was used as a FLT precursor, on which the tert-butyloxycarbonyl group was introduced to protect N3-position and nitrobenzenesulfonyl group. Radiolabeling of nosyl substitued precursor with $^{18}F$ was performed in acetonitrile at $120^{\circ}C$ and deproteced with 0.5 N HCI. The cell uptake was measured in cultured 9L glioma cell. The biodistribution was evaluated in 9L tumor bearing rats after intravenous injection at 10 min, 30 min, 60 min and 120 min and obtained PET image 60 minutes after injection. Results: The radiochemical yield was about 20-30% and radiochemical purity was more than 95% after HPLC purification. Cellular uptake of $[^{18}F]$FLT was increased as time elapsed. At 120 min post-injection, the ratios of tumor/blood, tumor/muscle and tumor/brain were $1.61{\pm}0.34,\;1.70{\pm}0.30\;and\;9.33{\pm}2.22$, respectively. The 9L tumor was well visualized at 60 min post injection in PET image. Conclusion: The uptake of $[^{18}F]$FLT in tumor was higher than in normal brain and PET image of $[^{18}F]$FLT was acceptable. These results suggest the possibility of $[^{18}F]$FLT at an imaging agent for brain tumor.

Effect of hydrogen in Ni-silicide with Iodine Catalyst Deposited Ni Film by using Atomic Layer Deposition

  • Gang, Hui-Seong;Ha, Jong-Bong;Kim, Gi-Won;Kim, Dong-Seok;Im, Gi-Sik;Kim, Seong-Nam;Lee, Gwang-Man;Lee, Jeong-Hui
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.234-234
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    • 2010
  • 최근 CMOS 소자 크기가 축소됨에 따라 소스와 드레인 영역에서의 접촉저항을 줄이기 위하여, 실리사이드 공정이 많이 연구되고 있다. 실리사이드 물질로서 NiSi는 낮은 저항률과 낮은 실리콘 소모, 낮은 공정온도, 등의 장점을 가지고 있다. 그러나, 실리사이드 형성으로 인한 나노소자의 소오스/드레인에서정션(junction) 누설전류의 증가는 큰 문제가 되므로 실리콘과 실리사이드 계면의 특성이 중요하다. 본 연구에서는 니켈을 이용한 실리사이드 형성시 계면 활성제인 에틸 요오드를 이용하여 실험을 진행하였다. 금속 유기 전구체인 MABONi을 사용하여 ALD 방식으로 증착 한 니켈 박막과 니켈 핵 형성시 계면활성제인 에틸요오드의 처리 방법에 따른 Ni-silicide 박막의 특성을 비교, 분석하였다. 먼저 자연산화막을 건식식각으로 제거한 뒤, 첫 번째 샘플에서는 10회의 주기로 초기 니켈을 증착한 뒤, 에틸요오드로 니켈의 표면 위를 처리하고, 다시 200회의 주기로 니켈을 증착하였으며, 두 번째는 첫 번째 방식에서 에틸요오드 주입 시 동시에 수소도 함께 주입하였다. 세 번째는 비교를 위해 에틸요오드 처리를 하지 않고 니켈 박막만을 증착 하였다. 이어서, 각 샘플을 급속 열처리 장비에서 $400^{\circ}C$부터 $900^{\circ}C$까지 각각 30sec간 열처리를 진행후, 반응하지 않은 잔여 니켈을 제거한 후, XRD(x-ray diffraction), AES(auger), 그리고 4-point probe 등을 이용하여 형성된 실리사이드의 특성을 분석하였다. 에틸요오드와 함께 수소를 주입한 경우 계면에서의 산소 불순물과 카본 성분이 효과적으로 제거되어 $400^{\circ}C$에서 $2.9{\Omega}/{\Box}$ 의 낮은 면저항을 가지는 NiSi가 형성되었고 모든 온도구간에서 다른 샘플에 비하여 가장 낮은 면저항 분포를 보였다. 이는 분해 흡착된 요오드에 의한 계면 특성 향상과 카본 성분이 포함된 잔여물들이 수소처리에 의해 효율적으로 제거되어 실리사이드의 특성이 향상되었기 때문이다. 계면활성제를 사용하지 않은 경우에는 $500^{\circ}C$에서 NiSi가 형성되었다. 반면에 에틸요오드로만 표면을 처리한 경우에는 니켈과 실리콘 계면에서의 카본 성분에 의하여 silicidation 이 충분히 일어나지 않았다. 이러한 결과는 향후 45nm 이하의 CMOS 공정상에서 소스와 드레인의 낮은 누설전류를 가지고, 접촉저항을 줄이기 위한 니켈 실리사이드 형성에 큰 도움을 줄 것으로 기대된다.

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다양한 활성제 이온이 치환 고용된 MgNb2O6 형광체의 특성

  • Kim, Ji-Seon;Jo, Sin-Ho
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.167-167
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    • 2013
  • 최근에 산화물 형광체는 황화물 형광체에 비해 높은 화학적 안정성을 나타내기 때문에 백색 발광 다이오드, 전계방출 디스플레이와 플라즈마 디스플레이 패널에 그 응용성을 넓히고 있다. 마그네슘 니오베이트(magnesium niobate, MgNb2O6)는 우수한 유전 특성(상대 유전상수=18.4)을 나타내기 때문에 마이크로파 유전체로 응용 가능하며, 단일상 릴랙서 페라브스카이트(relaxor perovskite) Pb(Mg1/3Nb2/3)O3을 합성하기 위한 전구체 (precursor)로 널리 사용되고 있으며, 나이오븀산염 이온에서 다양한 색상을 방출하는 활성제 이온으로 효율적인 에너지 전달이 일어남으로써 Sm3+, Dy3+, Eu3+와 같은 희토류 이온의 좋은 모체 격자로 개발할 수 있다. 본 연구에서는 마그네슘 니오베이트 MgNb2O6 모체 결정에 다양한 활성제 이온, 즉 Eu3+, Sm3+, Dy3+, Tb3+를 선택적으로 주입하여 발광 효율이 높은 천연색 형광체를 합성하고자 한다. 특히, 모체 결정에 주입되는 활성제 이온 주위의 국소적인 환경이 반전 대칭에서 변형되는 척도를 조사하여 활성제의 주 발광 파장의 세기가 최대가 되는 최적의 조건을 결정하고자 한다. Mg1-1.5xNb2O6:REx3+ 형광체 분말 시료는 초기 물질 MgO, Nb2O5와 희토류 이온을 화학 반응식에 맞게 정밀 저울로 측량하여 플라스틱 용기에 ZrO2 볼과 함께 넣고, 소정의 에탄올을 채운 뒤 밀봉하고서, 300 rpm의 속도로 20시간 볼밀 (ball-mill) 작업을 수행하였다. 그 후, 체(sieve)로 ZrO2 볼을 걸러낸 다음에 혼합된 용액을 각 비커에 담아서 $40^{\circ}C$의 건조기에서 24시간 건조하였고, 건조된 시료를 막자 사발에 넣고 잘게 갈고 80 ${\mu}m$의 체로 걸러낸 후에, 알루미나 도가니에 활성제 이온별로 각각 담아, 전기로에 장입하여 매분당 $5^{\circ}C$의 비율로 온도를 상승시켜 $350^{\circ}C$에서 5시간 동안 하소 공정을 실시한 후에, 온도를 계속 일정한 율로 증가시켜 $1,200^{\circ}C$에서 5시간 동안 소성하여 합성하였다. 합성된 형광체 분말의 결정 구조는 $Cu-K{\alpha}$ 복사선(파장: 1.5406)을 사용하여 X-선회절장치로 측정하였으며, 형광체의 표면 형상은 전계형 주사전자현미경으로 관측하였다. 흡광와 발광스펙트럼은 제논 램프를 광원으로 갖는 형광 광도계를 사용하여 측정하였다. 모체 결정에 활성제 이온 Eu3+, Sm3+, Dy3+, Tb3+가 도핑된 형광체 분말은 각각 적색, 주황색, 황색, 녹색 발광이 관측되었다. 각 발광 스펙트럼과 결정 입자의 크기와 형상 사이의 상호 관계를 조사하였다. 실험 결과로부터, 각 형광체의 발광 파장은 활성제 이온의 종류 와 서로 밀접하게 관련되어 있으며, 형광체 시료 합성시 활성제 이온의 농도를 선택적으로 조절함으로써 발광의 세기를 제어할 수 있음을 확인하였다.

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Characterization of Chemical Composition in Poplar wood (Populus deltoides) by Suppression of CCoAOMT Gene Expression (CCoAOMT 유전자 발현 억제에 의한 현사시나무의 화학조성 변화)

  • Eom, In-Yong;Kim, Kwang-Ho;Lee, Soo-Min;Yi, Yong-Sub;Choi, Joon-Weon
    • Journal of the Korean Wood Science and Technology
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    • v.38 no.3
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    • pp.213-222
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    • 2010
  • In this study, chemical compositions - holocellulose, lignin and monomeric sugars - were characterized with two poplar wood cell walls, one of which was grown at normal condition (CPW) and the other was genetically modified by antisence suppression of CCoAOMT gene expression (ACPW). Milled wood lignins were isolated from CPW and ACPW and subjected to methoxyl group, DFRC, Py-GC/MS, GPC, $^{13}C$-NMR analysis, respectively. There were few differences in holocellulose contents in both cell walls, which were determined to 81.6% in CPW and to 82.3% in ACPW. However, lignin contents in ACPW was clearly decreased by the suppression of CCoAOMT gene expression. In CPW 21.7% of lignin contents was determined, while lignin contents in ACPW was lowered to 18.3%. The relative poor solubility of ACPW in alkali solution could be attributed to the reduction of lignin content. The glucose contents of CPW and ACPW were measured to 511.0 mg/g and 584.8 mg/g and xylose contents 217.8 mg/g and 187.5 mg/g, respectively, indicating that suppression of CCoAOMT gene expression could be also influenced to the formation of monomeric sugar compositions. In depth investigation for milled wood lignin (MWL) isolated from both samples revealed that the methoxyl contents at ACPW was decreased by 7% in comparison to that of CPW, which were indirectly evidenced by $^{13}C$-NMR spectra and Py-GC/MS. According to the data from Py-GC/MS S/G ratios of lignin in CPW and ACPW were determined to 0.59 and 0.44, respectively. As conclusive remark, the biosynthesis of syringyl unit could be further influenced by antisense suppression of CCoAOMT during phenylpropanoid pathway in the plant cell wall rather than that of guaiacyl unit.