• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 제4회 영호남학술대회 논문집
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• pp.133-137
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• 2002

In this paper, the $CF_{4}$ decomposition rate are investigated for a simulated three plasma reactors which are metal particle reactor, spiral wire reactor and reactor with porous dielectric as applied voltage. The $CF_{4}$ decomposition rate by plasma reactor with porous dielectric had a gain of 20~25[%] over that by plasma reactor with spiral wire or metal particle electrode. The $CF_{4}$ decomposition efficiency increases with increasing applied voltage up to the critical voltage for spark formation. The $CF_{4}$ decomposition efficiency of metal particle reactor was about 80[%] at AC 24[kV]. However, decomposition efficiency is more than 90% in case of the reactor with porous dielectric. we think, the reactor with porous dielectric should be much better than other reactors for $CF_{4}$ decomposition.

• Transactions on Electrical and Electronic Materials
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• 제4권4호
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• pp.30-35
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• 2003

In this paper, the $CF_4$ decomposition efficiency is investigated for three simulated plasma reactors that are needle plate reactor, metal particle reactor, and dielectric barrier reactor with hole (DBH). The$CF_4$ decomposition efficiency by DBH is much better than that by needle plate reactor or metal particle reactor. When applied voltage is increased up to the critical voltage for spark formation in the all reactors, the $CF_4$ decomposition efficiency is increased. The $CF_4$ decomposition efficiency in needle plate reactor and metal particle reactor is about $12\%$ and $22\%$ respectively at applied voltage of 23 kV (consumption power: 110 W) and $CF_4$ concentration of 500 ppm, however, the $CF_4$ decomposition efficiency is more than $95\%$ in case of DBH. DBH should be much better than two reactors investigated for $CF_4$ decomposition.

• 한국전기전자재료학회논문지
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• 제15권6호
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• pp.543-550
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• 2002

In this paper, the $CF_4$ decomposition rate and by-product were investigated for two simulated plasma reactors which are metal particle reactor and spiral wire reactors as a function of mixed gases. The $CF_4$ decomposition rate by plasma reactor with metal particle electrode had a gain of 20~25% over that by plasma reactor with spiral wire electrode. The $CF_4$ decomposition efficiency increases with increasing applied voltage up to the critical voltage for spark formation. The $CF_4$ decomposition efficiency of metal particle reactor was about 80% at AC 24kV. The $CF_4$ decomposition rate used Ar-$N_2$ as base gas was the highest among three base gases of $N_2$, $Ar-N_2$, air. The by-products of the $N_2$, $N_2Ar$ base as were similar, but in case of air base they were different.

• 한국기후변화학회지
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• 제8권1호
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• pp.63-71
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• 2017

It is recognized that tetrafluoromethane ($CF_4$) has a great influence on global warming. The $CF_4$ is known to have a large impact on climate change due to its large global warming index. In this study, a waterjet plasma scrubber (WPS) was designed and manufactured for the $CF_4$ decomposition. The WPS is a novel technology which is combined a gliding arc plasma and water injection at the center of the plasma discharge. This can give an innovative way for $CF_4$ decomposition by achieving larger plasma columnand generating OH radicals. A performance analysis was achieved for the design factors such as waterjet flow rate, total gas flow rate, consumption electric power, and electrode gap. The highest $CF_4$ decomposition and energy efficiencies were 64.8% and 6.43 g/kWh, respectively; Optimal operating conditions were 20 mL/min of waterjet flow rate, 200 L/min total gas flow rate, 5.3 kW consumption electric power, and 4.4 mm electrode gap. As for the 2 stage reactor of the WPS, the $CF_4$ decomposition efficiency improved as the 85.3% while the energy efficiency decreased as the 5.57 g/kWh.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.912-916
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• 2002

In this paper, the $CF_4$ decomposition rate and by-product were investigated for a simulated two plasma reactors which are metal particle reactor and spiral wire reactor as function of mixed gases. The $CF_4$ decomposition rate by plasma reactor with metal particle electrode had a gain of 20~25[%] over that by plasma reactor with spiral wire electrode. The $CF_4$ decomposition efficiency increases with increasing applied voltage up to the critical voltage for spark formation. The $CF_4$ decomposition efficiency of metal particle reactor was about 80[%] at AC 24[kV]. The $CF_4$ decomposition rate used $Ar-N_2$ as base gas was the highest among three base gases of $N_2$, $Ar-N_2$, air. The by-products of the $N_2$, $Ar-N_2$ base as were similar, but in case of air base they were different.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2015년도 제51회 KOSCO SYMPOSIUM 초록집
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• pp.157-159
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• 2015

In this study, $CF_4$ decomposition was experimentally investigated in a high temperature flow reactor. Effects of temperature, reactant composition and concentration, and residence time on its decomposition into other stable species were analyzed. Then the results were compared to numerical results obtained using Chemkin Plug Flow Reactor model with Princeton Chemistry. As a preliminary result higher decomposition rate is obtained for higher reactor temperature and long residence time when proper reactants are supplied.

• Journal of Electrical Engineering and Technology
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• 제13권6호
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• pp.2385-2391
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• 2018

This paper is devoted to detecting decomposition characteristics of Iodotrifluoromethane ($CF_3I$) under alternating current (AC) discharges or load current interruptions. The decomposition products are measured utilizing chromatography-mass spectroscopy. It is found that less than 1% $CF_3I$ gas decomposed after several interruptions at load current of 200 A or hundred times of AC discharges. However, under interruptions at a current of 400 A, more than 95% $CF_3I$ gas decomposed into carbon tetrafluoride ($CF_4$) and hexafluoroethane ($C_2F_6$). The equilibrium compositions based on Gibbs free energy minimization of $CF_3I$ was calculated to explain the decomposition mechanism.

• 한국연소학회지
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• 제22권4호
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• pp.51-56
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• 2017

The decomposition of tetrafluoromethane has been investigated with the reaction mechanism proposed for freely propagating $CH_4/CF_4/O_2/N_2$ premixed flames on the oxygen enrichment. The factors affecting on the removal efficiency of tetrafluoromethane were analyzed. The increase in flame temperature due to oxygen enrichment has a great influence on the removal efficiency of tetrafluoromethane. At the same oxygen enrichment condition, the removal efficiency in the rich flame is higher than one in the lean flame. The increase of the F/H ratio leads to decrease the flame temperature and the removal efficiency of tetrafluoromethan is decreased at the flame temperature of 2600 K or lower, The elementary reactions that dominate the consumption of tetrafluoromethane are (R1) $CF_4+M=CF_3+F+M$ and (R2) $CF_4+H=CF_3+HF$. (R1) has the greatest effect on the consumption of tetrafluoromethane under the oxygen enhanced flames.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 2004년도 춘계학술대회 논문집
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• pp.475-478
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• 2004

we studied the effect of the type of non-thermal plasma on the decomposition of $CF_4$. 3 types of reactors were manufactured to generate different types of plasma respectively, and went into the experiments. As the results, we found that high density of the energy of non-thermal plasma and the minimization of non-discharged area should be met in order to elevate decomposition rate of $CF_4$. Among the reactors used in the study, the hole-type reactor was such one that satisfying that requirement. Using the hole-type reactor, treatment efficiency for high concentration of $CF_4$ was excellent. We got decomposition rate of more than 95[%] between 500[ppm] around and less than 400[ppm], and up to 85[%] at 900[ppm].

• 한국환경과학회지
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• 제22권9호
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• pp.1097-1103
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• 2013

Tetrafluoromethane($CF_4$) have been widely used as etching and chemical vapor deposition gases for semiconductor manufacturing processes. $CF_4$ decomposition efficiency using microwave system was carried out as a function of the microwave power, the reaction temperature, and the quantity of $Al_2O_3$ addition. High reaction temperature and addition of $Al_2O_3$ increased the $CF_4$ removal efficiencies and the $CO_2/CF_4$ ratio. When the SA30 (SiC+30wt%$Al_2O_3$) and SA50 (SiC+50wt%$Al_2O_3$) were used, complete $CF_4$ removal was achieved at $1000^{\circ}C$. The $CF_4$ was reacted with $Al_2O_3$ and by-products such as $CO_2/CF_4$ and $AlF_3$ were produced. Significant amount of by-product such as $AlF_3$ was identified by X-ray powder diffraction analysis. It also showed that the ${\gamma}-Al_2O_3$ was transformed to ${\alpha}-Al_2O_3$ after microwave thermal reaction.