The characteristic of $CF_{4}$ decomposition for High density streamer

고밀도스트리머를 이용한 $CF_{4}$ 분해특성

In this paper, the $CF_{4}$ decomposition rate are investigated for a simulated three plasma reactors which are metal particle reactor, spiral wire reactor and reactor with porous dielectric as applied voltage. The $CF_{4}$ decomposition rate by plasma reactor with porous dielectric had a gain of 20~25[%] over that by plasma reactor with spiral wire or metal particle electrode. The $CF_{4}$ decomposition efficiency increases with increasing applied voltage up to the critical voltage for spark formation. The $CF_{4}$ decomposition efficiency of metal particle reactor was about 80[%] at AC 24[kV]. However, decomposition efficiency is more than 90% in case of the reactor with porous dielectric. we think, the reactor with porous dielectric should be much better than other reactors for $CF_{4}$ decomposition.