• Title/Summary/Keyword: $BF_3.SiO_2$

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Synthesis and Biological Evaluation of 2-Amino-4H-pyran-3,4,5-tricarboxylate Salt Derivatives

  • Akbari, Ali;Azami-Sardooei, Zabihollah;Hosseini-Nia, Asghar
    • Journal of the Korean Chemical Society
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    • v.57 no.4
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    • pp.455-460
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    • 2013
  • A novel and simple method for the synthesis of 2-amino-4H-pyran-3,4,5-tricarboxylate derivative and the evaluation of their antibacterial activity against Pseudomonas syringae, Xanthomonas citi and Pectobacterium carotovorum are reported. The structure of the isolated compounds has been determined by means of $^1H/^{13}C$ NMR and FT-IR Spectroscopy. The reaction of alkyl isocyanides with acetylenic esters in the presence of dimethyl acetone-1,3-dicarboxylate in the present of $BF_3.SiO_2$ at ambient temperature. Some of the compound showed significant inhibition to growth of bacteria.

Esterification of Methacrylic acid with Ethylene glycol over Heteropolyacid supported on ZSM-5 (ZSM-5 위에 지지된 Heteropolyacid 하에서 Methacrylic acid와 Ethylene glycol의 에스테르화 반응)

  • Prabhakarn, A.;Fereiro, J.A.;Subrahmanyam, Ch.
    • Journal of the Korean Chemical Society
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    • v.55 no.1
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    • pp.14-18
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    • 2011
  • Esterification of methacrylic acid with ethylene glycol was carried out over Heteropolyacids [HPA: $H_4SiW_{12}O_{40}$ (STA) and $H_3PW_{12}O_{40}$ (PTA)] supported on ZSM-5. For comparison, the same reaction was carried out over unsupported HPA, $H_2SO_4$, $BF_3$ and PTSA. Among the catalysts studied, HPA showed better activity compared to $H_2SO_4$, $BF_3$ and PTSA. Catalytic activity was compared with HPA supported ZSM-5 catalysts. Typical results indicated that 30 wt% PTA supported on ZSM-5 showed nearly the same activity as that of bulk PTA. It was found that the reaction follows first order kinetics with respect to methacrylic acid. The reaction products were identified by $^1H$-NMR and FT-IR.

Fabrication of Planar Multi-junction Thermal Converter (평면형 다중접합 열전변환기의 제작)

  • Kwon, Sung-Won;Park, S.I.;Cho, Y.M.;Kang, J.H.
    • Journal of Sensor Science and Technology
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    • v.5 no.4
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    • pp.17-24
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    • 1996
  • Planar multi-junction thermal converters were fabricated for precise measurements of the ac voltage and current by an ac-dc transfer method. A heater and a thermocouple array were fabricated onto a sandwiched membrane, $Si_{3}N_{4}$ (200 nm) / $SiO_{2}$ (400 nm) / $Si_{3}N_{4}$ (200 nm), a thickness of $0.8\;{\mu}m$ and a size of $2{\times}4\;mm^{2}$, which is supported by a surrounding frame. The NiCr heater is located at the center of the membrane vertically. Hot junctions of $48{\sim}156$ pairs of thermocouples (Cu-CuNi44) are located near or onto the heater, and cold junctions are located onto the silicon frame. Output of the thermal converters for 10 mA dc input was $76\;mV{\sim}382\;mV$ dependent on a model, and short term stability of the outputs was ${\pm}5{\sim}15\;ppm$/ 10 min with 5 mA dc input. Responsivity in air was in the range of $3.9{\sim}14.5V/W$. Responsivity of the model BF48 in air which has 48 thermocouples was 2 times or greater than that of 3 dimensional multi-junction thermal converter in vacuum which has 56 thermocouples. AC-DC transfer differences with an input of 10 mA or less were less than ${\pm}1\;ppm$ in the frequency range from 5 Hz to 2 kHz, and about $2{\sim}3\;ppm$ at 5 kHz and 10 kHz.

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A Study on the Improvement of Early-age Compressive Strength of Smart BFS Powder Added Cement Mortar (스마트 고로슬래그 미분말을 첨가한 시멘트 모르타르의 초기 압축강도 향상에 관한 연구)

  • Yi, Seong Tae;Noh, Jae Ho;Kim, Jin Hyung;Lee, Kang Jin
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.17 no.2
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    • pp.135-141
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    • 2013
  • In this study, to improve the early-age compressive strength of mortar, the compressive strength tests of mortar mixed smart BFS powder added powder of rapid setting additives milled by processing, using functional grinding aid, the power-typed rapid setting cement clinker developed by sintering industrial waste and by-products with much CaO-$SiO_2-Al_2O_3$ to cement were performed. From the tests, the followings are found that (1) for BFS early-age strength improvement test (Series I): early-age strength improvement of BFS mixed rapid setting additive milled after adding functional grinding aid, when the clinker is milled, is superior and (2) for OPC early-age strength improvement test (Series II): case of additive mixed rapid setting powder typed activator milled after adding functional grinding aid to Clinker-C showed the higher compressive strength.

Suppression of Boron Penetration into Gate Oxide using Amorphous Si on $p^+$ Si Gated Structure (비정질 실리론 게이트 구조를 이용한 게이트 산화막내의 붕소이온 침투 억제에 관한 연구)

  • Lee, U-Jin;Kim, Jeong-Tae;Go, Cheol-Gi;Cheon, Hui-Gon;O, Gye-Hwan
    • Korean Journal of Materials Research
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    • v.1 no.3
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    • pp.125-131
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    • 1991
  • Boron penetration phenomenon of $p^{+}$ silicon gate with as-deposited amorphous or polycrystalline Si upon high temperature annealing was investigated using high frequency C-V (Capacitance-Volt-age) analysis, CCST(Constant Current Stress Test), TEM(Transmission Electron Microscopy) and SIMS(Secondary Ion Mass Spectroscopy), C-V analysis showed that an as-deposited amorphous Si gate resulted in smaller positive shifts in flatband voltage compared wish a polycrystalline Si gate, thus giving 60-80 percent higher charge-to-breakdown of gate oxides. The reduced boron penetration of amorphous Si gate may be attributed to the fewer grain boundaries available for boron diffusion into the gate oxide and the shallower projected range of $BF_2$ implantation. The relation between electron trapping rate and flatband voltage shift was also discussed.

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Kinetic Study on the Cationic Polymerization of Glycidyl Azide Monomer(GAM) by Real-Time In-suti IR (실시간 In-situ IR을 이용한 Glycidyl Azide Monomer(GAM)의 양이온중합 반응속도 연구)

  • Kim, Hyoung-Sug;Kim, Kwan-Yung;Kang, Shin-Choon;Noh, Si-Tae;Kim, Jin-Seuk;Yu, Jae-Chul;Choi, Keun-Bae
    • Journal of the Korea Institute of Military Science and Technology
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    • v.12 no.2
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    • pp.228-235
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    • 2009
  • We synthesized glycidyl azide monomer(GAM) as a monomer for polymerization of glycidy azide polymer(GAP) which is a promising energetic prepolymer for a plastic-bonded explosive. Using quantitative real-tim in-situ infrared(in-situ IR) spectroscopy, kinetic study on the cationic ring opening polymerization of GAM was carried out. The reaction rate was obtained from monitoring the change of ether C-O stretching band($1050cm^{-1}$) in series IR spectra. The reaction was in accordance with the first-order reaction law for each of reaction temperature at 100/1 mole ratio of [GAM]/[$BF_3*etherate$]. In the ring opening polymerization of GAM, with ratio of [GAM]/[$BF_3*etherate$] to equal 100/1 at various temperature, the activation parameters obtained from the evaluation of kinetic data were ${\Delta}H^*$=14.34kcal/mol, ${\Delta}S^*=-12.31cal/mol{\cdot}K$ and $E_a$=14.89kcal/mol.

The Analytic Gradient with a Reduced Molecular Orbital Space for the Equation-of-Motion Coupled-Cluster Theory: Systematic Study of the Magnitudes and Trends in Simple Molecules

  • Baek, Gyeong Gi;Jeon, Sang Il
    • Bulletin of the Korean Chemical Society
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    • v.21 no.7
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    • pp.720-726
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    • 2000
  • The analytic gradient method for the equation-of-motion coupled-cluster singles and doubles (EOM-CCSD) energy has been extended to employ a reduced molecular orbital (MO) space. Not only the innermost core MOs but also some of the outermost virtua l MOs can be dropped in the reduced MO space, and a substantial amount of computation time can be reduced without deteriorating the results. In order to study the magnitudes and trends of the effects of the dropped MOs, the geometries and vibrational properties of the ground and excited states of BF, CO, CN, N2, AlCl, SiS, P2, BCl, AIF, CS, SiO, PN and GeSe are calculated with different sizes of molecular orbital space. The 6-31 G* and the aug-cc-pVTZ basis sets are employed for all molecules except GeSc for which the 6-311 G* and the TZV+f basis sets are used. It is shown that the magnitudes of the drop-MO effects are about $0.005\AA$ in bond lengths and about 1% on harmonic frequencies and IR intensities provided that the dropped MOs correspond to (1s), (1s,2s,2p), an (1s,2s,2p,3s,3p) atomic orbitals of the first, the second, and the third row atoms, respectively. The geometries and vibrational properties of the first and the second excited states of HCN and HNC are calculated by using a drastically reduced virtual MO space as well as with the well defined frozen core MO space. The results suggest the possibility of using a very smalI MO space for qualitative study of valence excited states.

반도체 MEMS 공정에 적용하기 위한 micro blaster 식각 특성

  • Kim, Dong-Hyeon;Gang, Tae-Uk;Kim, Sang-Won;Gong, Dae-Yeong;Seo, Chang-Taek;Kim, Bong-Hwan;Jo, Chan-Seop;Lee, Jong-Hyeon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.245-245
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    • 2010
  • 최근에 반도체 소자 및 마이크로머신, 바이오센서 등에 사용되는 미세 부품에 대한 연구 개발이 활발히 진행되고 있다. 미세 부품을 제작하기 위한 MEMS 공정은 대표적으로 화학용액을 이용한 습식식각, 플라즈마를 이용한 건식식각 등이 주를 이룬다. Micro blaster는 경도가 강하고 화학적 내성을 가지며 용융점이 높아 반도체 MEMS 공정에 어려움이 있는 기판을 다양한 형태로 식각 할 수 있는 기계적인 식각 공정 기술이라 할 수 있다. Micro blaster의 식각 공정은 고속의 날카로운 입자가 공작물을 타격할 때 입자의 아래에는 고압축응력이 발생하게 되고, 이 고압축 응력에 의하여 소성변형과 탄성변형이 발생된다. 이러한 변형이 발전되어 재료의 파괴 초기값보다 크게 되면 크랙이 발생되고, 점점 더 발전하게 되면 재료의 제거가 일어나는 단계로 이루어진다. 본 연구에서는 micro blaster 장비를 반도체 MEMS 공정에 적용하기 위한 식각 특성에 관하여 확인하였다. Micro blaster 장비와 식각에 사용한 파우더는 COMCO INC. 제품을 사용하였다. Micro blaster를 $Al_2O_3$ 파우더의 입자 크기, 분사 압력, 기판의 종류, 노즐과 기판과의 간격, 반복 횟수, 노즐 이동 속도 등의 공정 조건에 따른 식각 특성에 관하여 분석하였다. 특히 실제 반도체 MEMS 공정에 적용 가능한지 여부를 확인하기 위하여 바이오 PCR-chip을 제작하였다. 먼저 glass 기판과 Si wafer 기판에서의 식각률을 비교 분석하였고, 이 식각률을 바탕으로 바이오 PCR-chip에 사용하게 될 미세 홀과 미세 채널, 그리고 미세 챔버를 형성 하였다. 패턴을 형성하기 위하여 TOK Ordyl 사의 DFR(dry film photoresist:BF-410)을 passivation 막으로 사용하였다. Micro blaster에 사용되는 파우더의 직경이 수${\mu}m$ 이상이기 때문에 $10\;{\mu}m$ 이하의 미세 채널과 미세홀을 형성하기 어려웠지만 현재 반도체 MEMS 공정 기술로 제작 연구되어지고 있는 바이오 PCR-chip을 직접 제작하여 micro blaster를 이용한 반도체 MEMS 공정 기술에 적용 가능함을 확인하였다.

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