• The Korean Journal of Ceramics
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• v.5 no.4
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• pp.324-330
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• 1999

$Si_3N_4$-$TiB_2$ with 2 wt% $Al_2O_3$ and 4 wt% $Y_2O_3$ additives was hot pressed in a flowing $N_2$ environment with varying $TiB_2$ content from 10 to 50 vol%. Variations of mechanical (hardness, fracture toughness, and flexual strength), and tribological properties as a function of $TiB_2$ content were investigated. As the content of $TiB_2$ increased, relative density decreased due to the chemical reaction of $TiB_2$in $N_2$ environment. The reduction of density causes mechanical properties to be degraded with an increase of $TiB_2$ in $Si_3N_4$. Tribological properties were dependent of microstructure as well as mechanical properties, however, they were degraded strongly by the chemical reaction of $Si_3N_4$-$TiB_2$ during hot pressing in $N_2$ environment. SEM and TEM observations, and X-ray diffraction analysis that the chemical reaction products at the interface are TiCN, Si, and $SiO_2$. Also, the comparison of XRD patterns of the $Si_3N_4$-40 vol% $TiB_2$ composites hot pressed at $1,750^{\circ}C$ for 1 hour between in $N_2$ and in Ar gas was made. The XRD peaks of Si and $SiO_2$ were not found in Ar, but still a weak peak of TiCN was presented.

• JSTS:Journal of Semiconductor Technology and Science
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• v.1 no.4
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• pp.202-208
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• 2001

In Recent results suggested that doping $Ta_2O_5$ with a small amount of $TiO_2$ using standard ceramic processing techniques can increase the dielectric constant of $Ta_2O_5$ significantly. In this paper, this concept is studied using RTCVD (Rapid Thermal Chemical Vapor Deposition). Ti-doped $Ta_2O_5$ films are deposited using $TaC_{12}H_{30}O_5N$, $C_8H_{24}N_4Ti$, and $O_2$ on both Si and $NH_3$-nitrided Si substrates. An $NH_3$-based interface layer at the Si surface is used to prevent interfacial oxidation during the CVD process and post deposition annealing is performed in $H_2/O_2$ ambient to improve film quality and reduce leakage current. A sputtered TiN layer is used as a diffusion barrier between the Al gate electrode and the $TaTi_xO_y$ dielectric. XPS analyses confirm the formation of a ($Ta_2O_5)_{1-x}(TiO_2)_x$ composite oxide. A high quality $TaTi_xO_y$ gate stack with EOT (Equivalent Oxide Thickness) of $7{\AA}$ and leakage current $Jg=O.5A/textrm{cm}^2$ @ Vg=-1.0V has been achieved. We have also succeeded in forming a $TaTi_x/O_y$ composite oxide by rapid thermal oxidation of the as-deposited CVD TaTi films. The electrical properties and Jg-EOT characteristics of these composite oxides are remarkably similar to that of RTCVD $Ta_2O_5, suggesting that the dielectric constant of $Ta_2O_5$ is not affected by the addition of $TiO_2$.

• Journal of the Korean institute of surface engineering
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• v.22 no.2
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• pp.101-108
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• 1989

Effects of Na+ ion on zeta potential of SiC and Al2O3 particles suspended in nikel sufate and nickel chloride solutions were investigated. various complexing agents for Ni2+ ion were added to electroless Ni composite bath and the effects of the complexing agents on zeta potential and codeposition of the particles from the baths were studied. It was confirmed that Na+ ion was absorbed on the particles bringing about the positive surface charge and thus they promoted the entrapment of the particles into the nickel deposit. On the basis of these results it was possible to deposit SiCc particle in nickel chloride electrolyte containing complex agent such as trisodium citrate+sodium succinate.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.134-134
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• 2016

CMC(Ceramic Matrix Composites)는 $1500^{\circ}C$ 이상의 고온에서 내열성, 내산화성, 내식성이 우수하여, 초음속 비행체, 가스터빈 엔진 및 원자로용 초고온 부품 등에 수요가 증가하고 있다. 하지만 이러한 특성은 비산소 환경에 국한되는 것으로 약 $400^{\circ}C$ 이상의 산화 분위기에는 탄소섬유가 산화되는 문제로 인하여 적용의 한계를 가지고 있다. 따라서 CMC의 적용범위 확대를 위하여 내산화 코팅으로 CMC의 초고온 산화특성을 개선하는 것이 필수적이며, 장시간 초고온 산화환경 분위기에서 사용되기 위하여 안정적인 코팅기술이 최근 기술개발의 핵심현안으로 부각되고 있다. 본 연구에서는 pack cementation 공정을 이용하여 내산화성이 우수한 SiC 코팅층을 제조하였다. Pack cementation 공정에 사용된 코팅 분말은 57wt.% SiC, 30wt.% Si, 3wt.% B, 10wt.% Al2O3의 비율로 혼합된 것이다. 실험은 3D 직조된 CMC 모재를 혼합분말 내에 침적한 후, Ar 분위기에서 $1600^{\circ}C$, 4~12시간 반응시켜 수 마이크론 두께의 SiC 코팅층을 형성하였다. 더 우수한 산화 특성을 부여하기 위하여 pack 처리된 CMC 표면에 초고온 세라믹인 TaC 소재를 진공플라즈마 코팅 공정으로 적층시켰다. 제조된 코팅층을 SEM, XRD를 이용하여 미세구조 및 결정구조를 분석하였으며, pack cementation에 따른 내산화 특성을 비교 분석하고자 $2000^{\circ}C$에서 산화 실험을 진행하였다. 산화 실험 이후 미세구조 및 결정구조 분석으로 산화거동을 규명하고자 하였다.

• Korean Journal of Materials Research
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• v.9 no.1
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• pp.35-41
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• 1999

In this study we investigated the effects of process variables on the bond strength, and its dependency upon the interfacial chemistry when the joined $ZrO_2$ toughened $Na\beta$"-alumina to $\alpha$-alumina using B$_2$$O_3$-$SiO_2$-Al$_2$$O_3$-CaO glass sealant. We observed that bond strength is mainly determined by the strength of the glass, which, in turn, depends on the glass composition established after joining reaction. Joining at $950^{\circ}C$ for 15min yielded the highest average bond strength of 66MPa. Different types of interfacial reaction seem to occur at each interface. After joining at $950^{\circ}C$ for 15min we found that Ca and Si diffuse much deeper(~15$\mu\textrm{m}$) into the $\beta$"-alumina composite than into the $\alpha$-alumina(<1$\mu\textrm{m}$) as a result of ion exchange reaction and more effective grain boundary diffusion. Thermal expansion coefficient of the glass was found to have changed more closely to those of the $\beta$"-alumina composite and $\alpha$-alumina, which put the glass under a slight compressive stress.ressive stress.

• Journal of Powder Materials
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• v.24 no.4
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• pp.292-297
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• 2017

A metallic oxide layer of a heat-resistant element contributes to the high-temperature oxidation resistance by delaying the oxidation and has a positive effect on the increase in electrical resistivity. In this study, green compacts of Fecralloy powder mixed with amorphous and crystalline silica are oxidized at $950^{\circ}C$ for up to 210 h in order to evaluate the effect of metal oxide on the oxidation and electrical resistivity. The weight change ratio increases as per a parabolic law, and the increase is larger than that observed for Fecralloy owing to the formation of Fe-Si, Fe-Cr composite oxide, and $Al_2O_3$ upon the addition of Si oxide. Si oxides promote the formation of $Al_2O_3$ and Cr oxide at the grain boundary, and obstruct neck formation and the growth of Fecralloy particles to ensure stable electrical resistivity.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1996.10a
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• pp.52-57
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• 1996

Conductive Ceramic Matrix Composite(CMC) of TIC/Al2O3 and Metal Matrix Composite (MMC) of SiC/Al were experienced by the die sinking Electrical Discharge Machining(EDM) for different current and duty factor according to negative polarity. Inthis experimental study Material Removal Rate(MRR) maximum surface roughness four point bending stress distribution and Scanning Electron Microscopy(SEM) Photographs were analysed. the higher MRR was obtained for CMC than MMC but slowly decreased around duty factor of 0.67 for MMC and better surface morphology was found CMC than MMC. The SEM photographs of discharge traces for CMC showe uniform shape about 100 to 200${\mu}{\textrm}{m}$ in diameter but MMC showed irregular shape.

• Journal of the Korean Ceramic Society
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• v.46 no.4
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• pp.413-418
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• 2009

Glass systems based on Ca, Sr, Ba, and Zn modified alumino-boro silicates were investigated in order to improve the dielectric and mechanical properties of a typical LTCC (low temperature co-fired ceramic) which was developed for high frequency highly-integrated modules. The glass was prepared by a typical melting procedure and then mixed with cordierite fillers to fabricate glass/ceramic composite-type LTCC materials. The amount of cordierite filler was fixed at 50 volumetric%. For an optimal glass composition of 7.5% CaO, 7.5% BaO, 5% ZnO, 10% $Al_2O_3$, 30% $B_2O_3$, and 40% $SiO_2$ in mole ratio, the resultant LTCC composite showed a dielectric constant of 5.8 and a dielectric loss ($tan{\delta}$) of 0.0009 after firing at $900^{\circ}C$. An average bending strength of 160MPa was obtained for the optimal composition.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.177-177
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• 2008

The effect of several $SiO_2-B_2O_3-Al_2O_3$-R(R;Ca, Sr, Ba) borosilicate glass system on sintering behavior, dielectric properties and mechanical properties of glass/ceramic composites were investigated. The amount of '+2 valency' metal elements(Ca, Sr, Ba) were examined in LTCC composite of low k glass with cordierite filler. It was sintered for 60minutes in temperature range from 850C to 950. Properties of frit and glass/ceramic composites were analyzed by DTA, XRD, SEM, Network Analyzer, UTM and so on. Dielectric constant ($\varepsilon_r$) and $Q{\times}f_0$ (Q) of the composite with 50% glass contents demonstrated $\varepsilon_r$ = 5.4 $Q{\times}f_0$ = 1600 GHz. Sintering was complete and maximum bending strength of 160MPa was obtained.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09b
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• pp.1142-1143
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• 2006

Kinik Company pioneered diamond pad conditioners protected by DLC barrier ($DiaShield^{(R)}$ Coating) back in 1999 (Sung & Lin, US Patent 6,368,198). Kink also evaluated Cermet Composite Coating (CCC or $C^3$, patent pending) with a composition that grades from a metallic (e.g. stainless steel) interlayer to a ceramic (e.g. $Al_2O_3$ or SiC) exterior. The metallic interlayer can form metallurgical bond with metallic matrix on the diamond pad conditioner. The ceramic exterior is both wear and corrosion resistant. The gradational design of $C^3$ coating will assure its strong adherence to the substrate because there is no weak boundary between coating and substrate.