Optical Properties of Sputtered $Ta_2O_5$ Thin Films by Using Spectroscopic Ellipsometry
(분광타원법을 이용한 스퍼터된 $Ta_2O_5$ 박막의 광학적 특성)
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- Proceedings of the Optical Society of Korea Conference
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- 2009.02a
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- pp.229-230
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- 2009