반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

초저온 식각을 위한 냉각용량 2kW 급 -100 ℃ 비가연성 혼합냉매 줄톰슨 냉각기의 실험적 고찰

Experimental Investigation of 2kW Class Non-flammable Mixed Refrigerant Joule-Thomson Refrigerator with Cooling Temperature of -100 ℃ for Cryogenic Etching

  • 은종민 (건국대학교 기계공학부) ;
  • 이천규 (한국생산기술연구원 지속가능기술연구소 산업에너지연구부문)
  • Jongmin Eun (Department of Mechanical Engineering, Konkuk University) ;
  • Cheonkyu Lee (Industrial Energy R&D department, Research Institute of Sustainable Development Technology, Korea Institute of Industrial Technology (KITECH))
  • 투고 : 2024.04.12
  • 심사 : 2024.06.21
  • 발행 : 2024.06.30
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초록

This paper presents the design and experimental analysis of a cryogenic refrigeration system for -100 ℃, primarily intended for semiconductor etching process. The refrigeration system utilizes non-flammable mixed refrigerant Joule-Thomson refrigeration cycle, incorporating a precooling stage to enhance overall performance. The selected refrigerants for the system include R1234yf for the precooling stage, and Ar, R14, R23 and R218 for the main cooling stage of the Joule-Thomson refrigeration cycle. Design results according to the system constraints and experimental results are discussed, including lowest evaporation temperature, compressor isentropic efficiency and overall pressure tendencies. The achieved refrigerant fraction from optimal design is Ar: R14: R23: R218 = 0.15: 0.4: 0.15: 0.3, indicating COP of 0.1118 at the isentropic compressor efficiency of 50%. The experimental result shows the developed system reaches steady state in approximately 3 hours.

키워드

과제정보

본 연구는 2021년도 산업통상자원부 기계·장비산업기술개발사업 "냉각용량 2 kW급 반도체 식각 공정(Etching Process)용 초저온 냉각 시스템 개발"의 연구비 지원에 의한 연구임 (No. 20014817)

참고문헌

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