Experimental Investigation of 2kW Class Non-flammable Mixed Refrigerant Joule-Thomson Refrigerator with Cooling Temperature of -100 ℃ for Cryogenic Etching (초저온 식각을 위한 냉각용량 2kW 급 -100 ℃ 비가연성 혼합냉매 줄톰슨 냉각기의 실험적 고찰)
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- Journal of the Semiconductor & Display Technology
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- v.23 no.2
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- pp.6-11
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- 2024