Journal of the Korea Academia-Industrial cooperation Society (한국산학기술학회논문지)

The Korea Academia-Industrial cooperation Society (한국산학기술학회)
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A Study on the Compensation of Thermal Errors for Phase Measuring Profilometry

PMP 형상 측정법의 열 변위 보정에 관한 연구

  • Kim, Gi-Seung (Division of Information Communication, Sunmoon University) ;
  • Park, Yoon-Chang (Division of Mechanical and ICT Convergence Engineering, Sunmoon University)
  • 김기승 (선문대학교 정보통신학과) ;
  • 박윤창 (선문대학교 기계ICT융합공학부)
  • Received : 2019.05.15
  • Accepted : 2019.06.07
  • Published : 2019.06.30
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Abstract

Three-dimensional shape measurement technology is used in various industries. Among them, optical three-dimensional shape measurement techniques based on the optical trigonometry are mainly used in the field of semiconductor product inspection, where large quantities of three-dimensional shape measurements are made daily in factories and fine measurements are also required. The light source and the drive circuit, which are components of three-dimensional measurement equipment based on this optical trigonometry, produce heat generated by prolonged operation, and may be exposed to conditions where the ambient temperature is not constant, resulting in temperature-induced measurement errors. In this study, the compensation method of the Thermal Errors for Phase Measuring Profilometry is proposed. Three-Dimensional Shape Measurement Equipment based on Phase Measuring Profilometry is implemented to measure the height of an object and ambient temperature for 10 Hours, and a regression line was obtained line by making simple linear regression using measured temperature and height values. This regression line was used to correct the error of the height measurement according to the temperature, and thermal error was from 139.88 um(Micrometer) to 13.12 um.

삼차원 형상 측정 기술은 다양한 산업에서 활용하고 있는 기술이다. 그 중, 광 삼각법에 기초한 광학식 삼차원 형상 측정 기술들은 매일 공장에서 오랜 시간 동안 대량의 삼차원 형상 측정을 하고, 미세한 측정 또한 요구되는 반도체 생산품 검사 분야에서 주로 사용된다. 이러한 광 삼각법 기반의 삼차원 측정 장비들의 구성 요소인 광원과 구동 회로는 장시간 작동하게 되면 발열이 나타나게 되고 장시간 작동하며 주변의 온도가 일정하지 않은 상황에 노출되기도 하여 온도로 인한 측정 오차가 발생하게 된다. 본 논문에서는 장시간 반복해서 사용하는 PMP(Phase Measuring Profilometry) 형상 측정법에서의 열 변위 보정에 관한 방법을 제안하였다. PMP 형상 측정법 기반의 삼차원 형상 측정 장치를 구현하여 10시간에 걸쳐 물체의 높이와 주변 온도를 측정하는 실험을 진행하였고, 측정된 온도와 높이 값을 이용하여 단순 선형 회귀 분석을 하여 회귀직선을 얻었다. 이 회귀직선을 이용하여 온도에 따른 높이 측정값의 오차를 보정하게 되면 정상적인 측정값에서의 오차 값이 139.88 um(Micrometer) 에서 13.12 um로 보정되는 것을 확인하였다.

Keywords

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Fig. 1. PMP system

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Fig. 2. PMP images

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Fig. 3. Height value of Step Height

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Fig. 4. Measured Step Height 3D-Model

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Fig. 5. Experiment setup (PMP system)

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Fig. 6. Step Height

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Fig. 7. Experiment result

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Fig. 8. Distributed graph of Height Error for Temperature

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Fig. 9. Distributed graph of Measured & Calibrated Height for Temperature

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