Journal of the Korean Solar Energy Society (한국태양에너지학회 논문집)

The Korean Solar Energy Society (한국태양에너지학회)
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Spectroscopic Ellipsometry Measurement and Modeling of Hydrogenated Amorphous Silicon

수소화된 비정질 실리콘의 타원편광분광분석 측정 및 모델링

  • Kim, Ka-Hyun (Division of Energy & Optical Technology Convergence, Cheongju University)
  • 김가현 (청주대학교 에너지광기술융합학부)
  • Received : 2019.01.17
  • Accepted : 2019.01.30
  • Published : 2019.02.28
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Abstract

Spectroscopic ellipsometry is a powerful tool for analyzing optical properties of material. Ellipsometry measurement results is usually given by change of polarization state of probe light, so the measured result should be properly treated and transformed to meaningful parameters by transformation and modeling of the measurement result. In case of hydrogenated amorphous silicon, Tauc-Lorentz dispersion is usually used to model the measured ellipsometry spectrum. In this paper, modeling of spectroscopic ellipsometry result of hydrogenated amorphous silicon using Tauc-Lorentz dispersion is discussed.

Keywords

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Fig. 1 Schematic diagram of ellipsometry measurement

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Fig. 2 Schematic diagram of Lorentz oscillator

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Fig. 4 Modeled dielectric functions, ε1 and ε2 of hydrogenated amorphous silicon, deduced from the result of Fig. 3 and Table 1

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Fig. 3 (a) Spectroscopic ellipsometry measurement and modeling result of hydrogenated amorphous silicon deposited on a Corning XG glass, and (b) optical model of the sample

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Fig. 5 (a) Spectroscopic ellipsometry measurement and modeling result of p-type hydrogenated amorphous silicon carbon deposited on a Corning XG glass

Table 1 Fitting parameters of Tauc-Lorentz model shown in Fig. 3

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Table 2 Fitting parameters of Tauc-Lorentz model shown in Fig. 5

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