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Deposition Process Load Balancing Analysis through Improved Sequence Control using the Internet of Things

사물인터넷을 이용한 증착 공정의 개선된 순서제어의 부하 균등의 해석

  • Jo, Sung-Euy (Autoware Co., Ltd.) ;
  • Kim, Jeong-Ho (Dept. of Computer Science, Hanbat National University) ;
  • Yang, Jung-Mo (Dept. of Business Support, Korea Association of University, Research Institute and Industry)
  • Received : 2017.10.23
  • Accepted : 2017.12.20
  • Published : 2017.12.28

Abstract

In this paper, four types of deposition control processes such as temperature, pressure, input/output(I/O), and gas were replaced by the Internet of Things(IoT) to analyze the data load and sequence procedure before and after the application of it. Through this analysis, we designed the load balancing in the sensing area of the deposition process by creating the sequence diagram of the deposition process. In order to do this, we were modeling of the sensor I/O according to the arrival process and derived the result of measuring the load of CPU and memory. As a result, it was confirmed that the reliability on the deposition processes were improved through performing some functions of the equipment controllers by the IoT. As confirmed through this paper, by applying the IoT to the deposition process, it is expected that the stability of the equipment will be improved by minimizing the load on the equipment controller even when the equipment is expanded.

본 논문에서는 사물인터넷을 증착 순서 공정에 적용하여 증착 공정을 진행하는 과정의 제어에 온도제어기, 압력제어기, 가스제어기, 입출력 제어기 등 네 가지 종류를 대체하여 개선된 순서제어에 따른 부하균등을 해석하였다. 먼저 증착 설비에서 사물인터넷의 적용 전과 후의 시퀀스 절차를 통해 각각의 기능을 갖는 온도제어기, 압력제어기, 가스제어기, 입출력 제어기로 제어에 필요한 데이터를 전송받아서 개선된 시퀀스 순서대로 실행을 비교하여 순서과정을 제안하였다. 또한, 증착 공정에서 사물인터넷의 도입 전과 후를 비교하면서 증착 공정의 시퀀스 다이어그램을 작성하여 증착과정의 센싱 영역에 대한 부하 균등을 수행하였다. 이를 위해 각 센서입출력을 랜덤 프로세스와 버스트 프로세스 도착으로 모델링하고 CPU 부하와 메모리 부하를 수행한 결과를 도출하였다. 결과적으로 증착설비의 증착 공정에 장비제어기에서 수행하던 일부 기능을 사물인터넷에서 수행함으로써 장비제어기의 부하 균등 조절로 부하를 감소시키고 순서제어의 감소로 신뢰성은 높아지는 결과를 확인하였다. 본 논문을 통해 확인한 바와 같이, 사물인터넷을 증착 공정에 적용하면 설비의 확장 시에도 장비제어기의 부하를 최소화 함으로써 설비의 안정성을 향상시킬 수 있을 것을 것으로 기대된다.

Keywords

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