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Electronics and Telecommunications Research Institute (한국전자통신연구원)
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Low-Noise MEMS Microphone Readout Integrated Circuit Using Positive Feedback Signal Amplification

  • Kim, Yi-Gyeong (ICT Materials & Components Research Laboratory, ETRI) ;
  • Cho, Min-Hyung (ICT Materials & Components Research Laboratory, ETRI) ;
  • Lee, Jaewoo (ICT Materials & Components Research Laboratory, ETRI) ;
  • Jeon, Young-Deuk (ICT Materials & Components Research Laboratory, ETRI) ;
  • Roh, Tae Moon (ICT Materials & Components Research Laboratory, ETRI) ;
  • Lyuh, Chun-Gi (ICT Materials & Components Research Laboratory, ETRI) ;
  • Yang, Woo Seok (ICT Materials & Components Research Laboratory, ETRI) ;
  • Kwon, Jong-Kee (ICT Materials & Components Research Laboratory, ETRI)
  • Received : 2015.07.25
  • Accepted : 2015.09.30
  • Published : 2016.04.01
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Abstract

A low-noise readout integrated circuit (ROIC) for a microelectromechanical systems (MEMS) microphone is presented in this paper. A positive feedback signal amplification technique is applied at the front-end of the ROIC to minimize the effect of the output buffer noise. A feedback scheme in the source follower prevents degradation of the noise performance caused by both the noise of the input reference current and the noise of the power supply. A voltage booster adopts noise filters to cut out the noise of the sensor bias voltage. The prototype ROIC achieves an input referred noise (A-weighted) of -114.2 dBV over an audio bandwidth of 20 Hz to 20 kHz with a $136{\mu}A$ current consumption. The chip is occupied with an active area of $0.35mm^2$ and a chip area of $0.54mm^2$.

Keywords

References

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