Thermal Characterization of Individual Pixels in Microbolometer Image Sensors by Thermoreflectance Microscopy

  • Ryu, Seon Young (Division of Scientific Instrumentation, Korea Basic Science Institute) ;
  • Choi, Hae Young (Division of Scientific Instrumentation, Korea Basic Science Institute) ;
  • Kim, Dong Uk (Division of Scientific Instrumentation, Korea Basic Science Institute) ;
  • Kim, Geon Hee (Division of Scientific Instrumentation, Korea Basic Science Institute) ;
  • Kim, Taehyun (National NanoFab Center) ;
  • Kim, Hee Yeoun (National NanoFab Center) ;
  • Chang, Ki Soo (Division of Scientific Instrumentation, Korea Basic Science Institute)
  • Received : 2015.04.21
  • Accepted : 2015.09.21
  • Published : 2015.10.30


Thermal characterization of individual pixels in microbolometer infrared image sensors is needed for optimal design and improved performance. In this work, we used thermoreflectance microscopy on uncooled microbolometer image sensors to investigate the thermal characteristics of individual pixels. Two types of microbolometer image sensors with a shared-anchor structure were fabricated and thermally characterized at various biases and vacuum levels by measuring the temperature distribution on the surface of the microbolometers. The results show that thermoreflectance microscopy can be a useful thermal characterization tool for microbolometer image sensors.


Supported by : Korea Basic Science Institute, National Research Council, MKE (Ministry of Knowledge Economy)


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