• Title/Summary/Keyword: thermoreflectance microscopy

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Thermal Characterization of Individual Pixels in Microbolometer Image Sensors by Thermoreflectance Microscopy

  • Ryu, Seon Young;Choi, Hae Young;Kim, Dong Uk;Kim, Geon Hee;Kim, Taehyun;Kim, Hee Yeoun;Chang, Ki Soo
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.15 no.5
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    • pp.533-538
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    • 2015
  • Thermal characterization of individual pixels in microbolometer infrared image sensors is needed for optimal design and improved performance. In this work, we used thermoreflectance microscopy on uncooled microbolometer image sensors to investigate the thermal characteristics of individual pixels. Two types of microbolometer image sensors with a shared-anchor structure were fabricated and thermally characterized at various biases and vacuum levels by measuring the temperature distribution on the surface of the microbolometers. The results show that thermoreflectance microscopy can be a useful thermal characterization tool for microbolometer image sensors.

Thermoreflectance Microscopy for Thermal Analysis of Electronics (전자소자 열분석을 위한 열반사 현미경 기술)

  • Kim, Hyeon-Beom;Lee, Seunghwan;Jang, Hyejin
    • Journal of the Microelectronics and Packaging Society
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    • v.29 no.2
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    • pp.19-31
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    • 2022
  • With the advent of technologies based on big data, the trend of electronics towards high performance and high integration density continues. However, this development of electronics suffers from overheating issues, which seriously threaten the reliability of the devices. To develop effective strategies for thermal management, it is crucial to accurately evaluate the temperature distribution and design the heat dissipation path within the device in the operating condition. This paper introduces thermoreflectance microscopy that can observe the temperature distribution of a device with high spatial and temporal resolutions in a non-contact way. Specifically, the working principle and various forms of thermoreflectance microscopy are presented along with the latest research trends to improve the temperature, space, and time resolutions. We further review several examples in which thermoreflectance microscopy is applied to investigate the temperature and thermal characteristics of electronic devices.