Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
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Vanadium Oxide Microbolometer Using ZnO Sandwich Layer

  • Han, Myung-Soo (Medical Photonics Research Center, Korea Photonics Technology Institute) ;
  • Kim, Dae Hyeon (Medical Photonics Research Center, Korea Photonics Technology Institute) ;
  • Ko, Hang Ju (Medical Photonics Research Center, Korea Photonics Technology Institute) ;
  • Kim, Heetae (Rare Isotope Science Project, Institute for Basic Science)
  • Received : 2015.09.24
  • Accepted : 2015.09.30
  • Published : 2015.09.30
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Abstract

Optical, electrical and structural properties of VOx/ZnO/VOx thin film are studied. The VOx/ZnO/VOx multilayer is deposited by using a radio frequency (RF) sputtering system. The VOx/ZnO/VOx thin film shows the high temperature coefficient of resistance (TCR) of $-3.12%/^{\circ}C$ and the low sheet resistance of about 80 $k{\Omega}/sq$ at room temperature. The responsivity and detectivity of the bolometer are measured as a function of modulation frequency.

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References

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