Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
권호 표지
DOI QR코드

DOI QR Code

Selective Electrodeposition Using Laser Masking and DC Voltage

레이저 마스킹과 직류전원을 이용한 선택적 전해도금

  • Shin, Hong Shik (Department of Energy System Engineering, Korea National University of Transportation) ;
  • Kim, Sung Yong (Department of Energy System Engineering, Korea National University of Transportation)
  • Received : 2014.12.01
  • Accepted : 2015.01.05
  • Published : 2015.02.15
Download PDF
⟨ Previous Next ⟩

Abstract

This paper proposes a selective electrodeposition process that uses laser masking and a DC voltage. Selective electrodeposition using laser masking and a DC voltage is more efficient than that using laser masking and a pulse voltage. In other words, electrodeposition with a DC voltage allows for precise selective deposition without the limitation of the deposition region. Also, a selective electrodeposition method that uses laser masking and DC voltage can reduce the electrodeposition time. The characteristics of a copper layer deposited by laser masking and DC voltage were examined under various conditions. A selective copper layer with various micro patterns of $2{\mu}m$ thickness was successfully fabricated.

Keywords

References

  1. Madou, M. J., 2002, Fundamental of Microfabrication, CRC Press LLC, Boca Raton.
  2. Paunovic, M., Schlesinger, M., 2006, Fundamentals of Electrochemical Deposition, John Wiley & Sons, NJ.
  3. Schlesinger, M., Paunovic, M., 2010, Modern Electroplating, Wiley, NJ.
  4. Paik, B. M., Lee, J. H., Shin, D. S., Lee, K. S., 2012, Development of Three Dimensions Laser Direct Patterning System, KSMTE. 21:1 116-122.
  5. Romankiw, L. T., 1997, A path: from Electroplating through Lithographic Masks in Electronics to LIGA in MEMS, Microsyst. Technol., 42:20-22 2985-3005.
  6. Wee, L. M., Li, L., 2005, Multiple-layer Laser Direct Writing Metal Deposition in Electrolyte Solution, Appl. Surf. Sci., 247:1-4 285-293. https://doi.org/10.1016/j.apsusc.2005.01.142
  7. Cho, C. H., Shin, H. S., Chu, C. N., 2013, Selective Electrodeposition of Copper on Stainless Steel using Laser Irradiation, Surf. Coat. Technol., 222:5 15-24. https://doi.org/10.1016/j.surfcoat.2013.01.046
  8. Shin, H. S., Chung, D. K., Park, M. S., Chu, C. N., 2011, Analysis of Machining Characteristics in Electrochemical Etching using Laser Masking, Appl. Surf. Sci., 258:5 1689-1698. https://doi.org/10.1016/j.apsusc.2011.10.010

Cited by

  1. 레이저 마스킹과 직류전원을 이용한 선택적 전해도금의 재현성 개선 vol.25, pp.1, 2015, https://doi.org/10.7735/ksmte.2016.25.1.36
  2. 레이저빔을 이용한 티타늄 표면에서의 선택적 구리 전해도금 vol.26, pp.1, 2015, https://doi.org/10.7735/ksmte.2017.26.1.44