Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
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Fabrication of Gallium Phosphide Tapered Nanostructures on Selective Surfaces

  • Song, Young Min (Department of Electronics Engineering, Pusan National University) ;
  • Park, Hyun Gi (Department of Electronics Engineering, Pusan National University)
  • Received : 2014.09.11
  • Accepted : 2014.09.30
  • Published : 2014.09.30
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Abstract

We present tapered nanostructures fabricated on a selective area of gallium phosphide substrates for advanced optoelectronic device applications. A lithography-free fabrication process was accomplished by dry etching of metal nanoparticles. Thermal dewetting of micro-patterned metal thin films provides etch masks for tapered nanostructures. This simple process also allows the formation of plasmonic surfaces with corrugated shapes. Rigorous coupled-wave analysis calculations provide design guidelines for tapered nanostructures on gallium phosphide substrates.

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References

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