Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Development of a Contact Type Temperature Sensor Using Single Crystal Silicon Thermopile

단결정 실리콘 써모파일을 이용한 접촉형 온도센서 개발

  • Lee, Young-Tae (Department of IT & Electronics Education, Andong National University) ;
  • Lee, You-Na (IT Convergence Technology Research Team, Gumi Electronics and Information Technology Research Institute) ;
  • Lee, Wang-Hoon (IT Convergence Technology Research Team, Gumi Electronics and Information Technology Research Institute)
  • Received : 2013.08.05
  • Accepted : 2013.09.11
  • Published : 2013.09.30
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Abstract

In this paper, we developed contact type temperature sensor with single crystal silicon strip thermopile. This sensor consists of 15 p-type single crystal silicon strips, 17 n-types and contact electrodes on silicon dioxide silicon membrane. The result of electromotive force measuring showed very good characteristic as $15.18mV/^{\circ}C$ when temperature difference between the two ends of the thermopile occurs by applying thermal contact on the thermopile which was fabricated with silicon strip of $200{\mu}m$ length, $20{\mu}m$ width, $1{\mu}m$ thickness.

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References

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