Journal of the Institute of Electronics and Information Engineers (전자공학회논문지)

The Institute of Electronics and Information Engineers (대한전자공학회)
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Analysis of Quality factor and Effective inductance of Inductor for RF Integrated Circuits in 90nm CMOS Technology

RFIC 설계에 응용 가능한 90nm 공정 기반 인덕터의 Quality factor 및 Effective inductance 분석

  • Jang, Seong-Yong (Dept. of Electronics Engineering, Chungnam National University) ;
  • Shin, Jong-Kwan (Dept. of Electronics Engineering, Chungnam National University) ;
  • Kwon, Hyuk-Min (Dept. of Electronics Engineering, Chungnam National University) ;
  • Kwon, Sung-Kyu (Dept. of Electronics Engineering, Chungnam National University) ;
  • Sung, Seung-Yong (Dept. of Electronics Engineering, Chungnam National University) ;
  • Hwang, Sun-Man (Dept. of Electronics Engineering, Chungnam National University) ;
  • Jang, Jae-Hyung (Dept. of Electronics Engineering, Chungnam National University) ;
  • Lee, Ga-Won (Dept. of Electronics Engineering, Chungnam National University) ;
  • Lee, Hi-Deok (Dept. of Electronics Engineering, Chungnam National University)
  • Received : 2012.02.15
  • Published : 2013.05.25
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Abstract

In this paper, octagonal inductors for RFIC designs was fabricated with 90nm CMOS Technology to compare its quality factor and the effective inductance as functions of radius and number of turn. The quality factor decreases as the inner radius and the number of metal turned increase. However, the effective inductance increases with the increasing the inner radius and the number of metal turned. Therefore, the inductor structure should be decided according to the relative importance of Q-factor and inductance.

본 논문에서는 RFIC 설계에 응용 가능한 인덕터의 Quality factor 및 Effective inductance를 비교 분석하기 위해 Octagonal 인덕터를 90nm CMOS 공정을 이용하여 제작하였다. 내부반경을 설계변수로 갖는 인덕터의 경우 내부반경이 증가함에 따라 Quality factor가 감소하고 Effective inductance의 값이 증가하였다. 회전수를 설계변수로 갖는 인덕터의 경우 금속의 회전수가 증가함에 따라 Quality factor의 값이 감소하고 Effective inductance의 값이 증가하는 것을 확인하였다. 따라서 RFIC 회로 설계에 있어서 인덕터의 구조는 Q-factor 및 inductance 각각의 상대적 중요도에 따라 선택 되어져야 된다고 할 수 있다.

Keywords

References

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