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The Fabrication of FET-Type NOx Gas Sensing System Using the MWCNT

다중벽 카본 나노튜브를 이용한 FET식 NOx 가스 센싱 시스템 제작

  • Kim, Hyun-Soo (Department of Electrical Engineering, Gachon University) ;
  • Jang, Kyung-Uk (Department of Electrical Engineering, Gachon University)
  • Received : 2013.02.27
  • Accepted : 2013.03.05
  • Published : 2013.04.01

Abstract

Carbon nanotubes(CNT) have excellent electrical, chemical stability and mechanical properties. These can be used in a variety of fields. MWCNT are extremely sensitive for minute changes in the ambient gas, namely, their sensing properties varies greatly with the absorption of gas such as NOx and $H_2$. We investigate the electrical properties of CNTs and make a NOx gas sensor based on Multi-walled carbon nanotubes (MWCNT) materials. We obtained the NOx gas sensor of MWCNT based on P-type Si wafer that has the resistivity of $1.667{\times}10^{-1}[{\Omega}{\cdot}cm]$. We knew that the sensitivity of sensor decreased with increasing of NOx gas concentration. And the sensitivity of sensor shows the largest value at $20^{\circ}C$. The sensitivity of sensor decrease with increasing the temperature. Also absorption energy of NOx gas molecule on the MWCNT surface decreases with increasing concentration of NOx gas.

Keywords

References

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