한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제26권4호
  • /
  • Pages.321-324
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  • 2013
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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Low-e용 산화물 다층박막 IGZO/Ag/IGZO의 구조적, 광학적 특성 분석

Structural and Optical Properties of Multilayer Films of IGZO / Ag / IGZO for Low Emissivity Applications

  • 왕홍래 (청주대학교 전자공학과) ;
  • 김홍배 (청주대학교 반도체공학과) ;
  • 이상렬 (청주대학교 반도체공학과)
  • Wang, Hong Rae (Department of Electronic Engineering Cheongju University) ;
  • Kim, Hong Bae (Department of Semiconductor Engineering Cheongju University) ;
  • Lee, Sang Yeol (Department of Semiconductor Engineering Cheongju University)
  • 투고 : 2013.01.28
  • 심사 : 2013.03.24
  • 발행 : 2013.04.01
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초록

In this study, The RF magnetron sputter and evaporator was on glass substrates 30 mm ${\times}$ 30 mm OMO multilayer thin film structure is applied to the low-e. Structural and optical properties, a thin film was produced, the variable was placed into a variable deposition time of the oxide layer. According to the XRD measurement results there is no peak that satisfies the Bragg's law ($2dsin{\theta}=n{\lambda}$) which confirmed that it is an amorphous structure. RMS value of the results of the AFM measurement, has a roughness of less than 2 nm. transmittance measurements results, visible light region an average 80%, IR region 40% showed.

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참고문헌

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