Laser Solutions (한국레이저가공학회지)
- Volume 15 Issue 4
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- Pages.16-19
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- 2012
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- 1229-0963(pISSN)
DPSS UV Laser Projection Ablation of IC Substrates using an INVAR Mask
INVAR 마스크 응용 반도체 기판 소재의 고체 UV 레이저 프로젝션 어블레이션
- Sohn, Hyonkee (Department of Laser & Electorn Beam Application, KIMM) ;
- Choe, Hanseop (R&D Division, QMC Co., Ltd.) ;
- Park, Jong-Sig (Applied Optics Team, LEES Optical System Inc.)
- Received : 2012.12.17
- Accepted : 2012.12.20
- Published : 2012.12.31
Abstract
Due to the fact that the dimensions of circuit lines of IC substrates have been forecast to reduce rapidly, engraving the circuit line patterns with laser has emerged as a promising alternative. To engrave circuit line patterns in an IC substrate, we used a projection ablation technique in which a metal (INVAR) mask and a DPSS UV laser instead of an excimer laser are used. Results showed that the circuit line patterns engraved in the IC substrate have a width of about 15um and a depth of
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