과제정보
연구 과제 주관 기관 : 중소기업청
참고문헌
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- K. C. Ko, Y. H. Moon, K. W. Ko and M. Y. Kim, "Development of three-Dimension Inspection equipment for Inspection of BGA," Proceedings of the Korean Society of Precision Engineering Conference, pp. 61-62, June 2007.
- D. K. Lee, K. W. Ko, "A Fast Algorithm of White light Scanning Interferometry(WSI) for a Semiconductor Defect Inspection," Proceedings of the Korean Society of Precision Engineering Conference, pp. 63-64, June 2007.
- Kuk-Won Ko, Kyung-Cheol Ko and Jong-Hyeong Kim, "Pole Height Inspection on LCD Glass via High Speed White Light Light Interferometry," Journal of the Korean Society of Precision Engineering, vol. 24, no. 4, pp. 21-28, April 2007.
- J. H. You, S. W. Kim, "Meso-scale surface measurement using the low-coherence interferometry," Proceedings of the Korean Society of Precision Engineering Conference, pp. 43-44, Nov. 2007.
- Kuk Won Ko, Soo-Yong Cho, and Min Young Kim, "Development of Elimination Method of Measurement noise to Improve accuracy for White Light Interferometry," Journal of Institute of Control, Robotics and Systems, vol. 14, no. 6, pp. 519-522, June 2008. https://doi.org/10.5302/J.ICROS.2008.14.6.519
- J. You, S. W. Kim, "Fast and large-area measurement for a microscopic surface," Proceedings of the Korean Society of Precision Engineering Conference, pp. 735-736, Nov. 2008.
- Jae-Hwan Sim, Kuk-Won Ko, "Development of High Speed 3D height Measurement for White light Scanning Interferometer," Proceedings of the KAIS Fall Conference, Part2, pp. 761-764, May 2011.
- D. Malacara, Optical Shop Testing, John Wiley & Sons, 2007.
- M. Born and E. Wolf, Principles of Optics, Cambridge University Press, 2010.
- M. C. Park, S. W. Kim, "Direct quadratic polynomial fitting for fringe peak detection of white light scanning interferograms," Optical Engineering, vol. 39, no. 4, pp. 952-959, 2000. https://doi.org/10.1117/1.602445
- A. Harasaki, J. Schmit and J. C. Wyant, "Improved vertical-scanning interferometry," Applied Optics, vol. 39, no. 13, pp. 2107-2115, 2000. https://doi.org/10.1364/AO.39.002107
- K. G. Larkin, "Efficient nonlinear algorithm for envelope detection in white light interferometry," J. Opt. Soc. Am. A., vol. 13, no. 4, pp. 832-843, 1996. https://doi.org/10.1364/JOSAA.13.000832
피인용 문헌
- 3D Accuracy Enhancement of BGA Shiny Round Ball Using Optical Triangulation Method vol.32, pp.9, 2015, https://doi.org/10.7736/KSPE.2015.32.9.799