Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Electrical Properties and Reliability of the Photo-conductive CdS Thin Films for Flexible Opto-electronic Device Applications

유연성 광전도 CdS 박막의 증착조건에 따른 전기적 특성 및 신뢰성 평가 연구

  • 허성기 (충남대학교 신소재공학과) ;
  • 조현진 (충남대학교 신소재공학과) ;
  • 박경우 (충남대학교 신소재공학과) ;
  • 안준구 (충남대학교 신소재공학과) ;
  • 윤순길 (충남대학교 신소재공학과)
  • Published : 2009.12.01
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Abstract

Cadmium sulfide (CdS) thin film for flexible optical device applications were prepared at $H_2/(Ar+H_2)$ flow ratios on polyethersulfon (PES) flexible polymer substrates at room temperature by radio frequency magnetron sputtering technique. The CdS thin films deposited at room temperature showed a (002) preferred orientation and the smooth surface morphologies. Films deposited at a hydrogen flow ratio of 25% exhibited a photo- and dark-sheet resistance of about 50 and $2.7\;{\times}\;10^5\;{\Omega}/square$, respectively. From the result of the bending test, CdS films exhibit a strong adhesion with the PES polymer substrates and the $Al_2O_3$ passivation layer deposited on the CdS films only shows an increase of the resistance of 8.4% after exposure for 120 h in air atmosphere.

Keywords

References

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