Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

The Characteristics of Ga-doped ZnO Transparent Thin Films by using Multilayer

다층박막을 이용한 Ga-doped ZnO 투명전도막의 특성

  • 김봉석 (성균관대학교 정보통신공학과 전자소자응용연구실) ;
  • 이규일 (성균관대학교 정보통신공학과 전자소자응용연구실) ;
  • 강현일 (성균관대학교 정보통신공학과 전자소자응용연구실) ;
  • 이태용 (성균관대학교 정보통신공학과 전자소자응용연구실) ;
  • 오수영 (성균관대학교 정보통신공학과 전자소자응용연구실) ;
  • 이종환 (성균관대학교 정보통신공학과 전자소자응용연구실) ;
  • 송준태 (성균관대학교 정보통신공학과 전자소자응용연구실)
  • Published : 2007.12.01
Download PDF
⟨ Previous Next ⟩

Abstract

With development of electronic products the demands for miniaturization and weight-lightening have increased until a recent date. Accordingly, The effort to substitute glass substrates was widely made. However, polymer substrates have weak point that substrates were damaged at high temperature. In this paper, we deposited transparent conductive film at low temperature. And we inserted Au thin film between oxide to compensate for deteriorated electrical characteristics. Ga-doped ZnO(GZO) multilayer coatings were deposited on glass substrate by DC sputtering. The optimization of deposition conditions of both AZO and Au layers were performed to obtain better electrical and optical characteristics in advance. We presumed that the properties of multilayer were affected by the deposition process of both GZO and Au layers. The best multilayer coating exhibited the resistivity of $2.72{\times}10^{-3}\;{\Omega}-cm$ and transmittance of 77 %. From these results, we can confirm a possibility of the application as transparent conductive electrodes.

Keywords

References

  1. E. Bertran, C. Corbella, M. Vives, A. Pinyol, C. Person, and I. Porqueras, 'RF sputtering deposition of Ag/ITO coatings at room temperature', Solid State Ionics, Vol. 165, p. 139, 2003 https://doi.org/10.1016/j.ssi.2003.08.055
  2. K. H. Choi, J. Y. Kim, Y. S. Lee, and H. J. Kim, 'ITO/ Ag/lTO multilayer films for the application of a very low resistance transparent electrode', Thin Solid Films, Vol. 341, p. 152, 1999 https://doi.org/10.1016/S0040-6090(98)01556-9
  3. W. C. Song, 'Electrical and optical properties of ITO thin films prepared on the PET substrate', J. of KlEEME(in Korean), Vol. 17, No. 12, p. 1277, 2004
  4. D. R. Sahu and J. L. Huang, 'Design of ZnO/Ag/ZnO multilayer transparent conductive films', Materials Science and Engineering B, Vol. 130, p. 295, 2006 https://doi.org/10.1016/j.mseb.2006.03.003
  5. T. Toshino, S. Takanezawa, T. Ohmori, and H. Masuda, 'Preparation of ZnO/Au nanocomposite thin films by electrodeposition', Japan J. Applied Physics, Vol. 35, p. 1512, 1996 https://doi.org/10.1143/JJAP.35.L1512
  6. C.-H. Cheng and J-M. Ting, 'Transparent conducting GZO, Pt/GZO, and GZO/Pt/GZO thin films', Thin Solid Films, article in press, 2007
  7. Y. Yamamoto, Y. Hayashi, Y. Tachibana, N. Shimodaira, and M. Kudo, 'Chemical state analysis of ZnO/Ag film interface utilizing the matrix effect', Applied Surface Science, Vol. 203-204, p, 863, 2003
  8. J. M. Ting and C. K Lin, 'Characteristics of transparent conducting nano-scaled thin films based on ZnO', J. Am. Ceram. Soc., Vol. 89, No. 12, p. 3676, 2006 https://doi.org/10.1111/j.1551-2916.2006.01316.x
  9. A. Kloppel, W. Kriegseis, B. K Meyer, A. Scharmann, C. Daube, J. Stollenwerk, and J. Trube, 'Dependence of the electrical and optical behaviour of ITO-silver-ITO multilayers on the silver properties', Thin Solid Films, Vol. 365, p. 139, 2000 https://doi.org/10.1016/S0040-6090(99)00949-9
  10. K. H. Choi, J. Y. Kim, Y. S. Lee, and H. J. Kim, 'ITO/Ag/ITO multilayer films for the application of a very low resistance transparent electrode', Thin Solid FIlms, Vol. 341, p. 152, 1999 https://doi.org/10.1016/S0040-6090(98)01556-9
  11. M. Sawada, M. Higuchi, S. Kondo, and H. Saka, 'Characteristics of Indium-Tin-OxideSilver/Indium-Tin-Oxide sandwich films and their application to simple-matrix liquid-crystal displays', Jpn. J. Appl, Phys., Vol. 40, p. 3332, 2001 https://doi.org/10.1143/JJAP.40.3332
  12. John C. C. Fan, Frank J. Bachner, George H. Foley, and Paul M. Zavracky, 'Transparent heat-mirror films of $TiO_2/Ag/TiO_2$ for solar energy collection and radiation insulation', Applied Physics Letters, Vol. 25, No. 12, p. 693, 1974 https://doi.org/10.1063/1.1655364
  13. L. Holland, F. Inst. P., and G. Siddall, 'Heat-reflecting windows using gold and bismuth oxide films', British J. of Applied Physics, Vol. 9, p. 359, 1958 https://doi.org/10.1088/0508-3443/9/9/304

Cited by

  1. Electrical and Optical properties of TiO2-doped ZnO Films prepared on PEN by RF-magnetron Sputtering Method vol.22, pp.10, 2009, https://doi.org/10.4313/JKEM.2009.22.10.837