KSTLE International Journal

Korean Tribology Society (한국트라이볼로지학회)
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Pre-processing for the Design of Micro-fluid Flow Sensing Elements

  • Kim Jin-Taek (Department of Precision Mechanical Engineering, Chonbuk National University) ;
  • Pak Bock-Choon (School of Mechanical & Aerospace Engineering, Chonbuk National University) ;
  • Lee Cheul-Ro (School of Advanced Materials Engineering, Chonbuk National University) ;
  • Baek B.J. (School of Mechanical & Aerospace Engineering, Chonbuk National University)
  • Published : 2006.06.01
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Abstract

A simple finite element analysis is performed to simulate the thermal characteristics of a micro sensor package with thin film heater embedded in the glass wall of a micro-channel. In this paper, Electric characteristics of ITO sputtered heater were presented in this study, which can be used as a map of heater design in the range of available system temperature. The effects of thermo-physical properties of materials, geometrical structure and boundary condition on the thermal performance are also investigated. Finally, the design of micro-flow induced thermal sensor that is capable of measuring fluid flow with a lower flow detection limit of approximately 24pL/s is presented.

Keywords

References

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