Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Densification and Electrical Properties of Screen-printed PZT Thick Films

스크린 프린팅법으로 제작한 PZT 후막의 치밀화와 전기적 특성

  • 박상만 (경상대학교 공학연구원 세라믹공학과) ;
  • 이성갑 (경상대학교 공학연구원 세라믹공학과)
  • Published : 2006.07.01
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Abstract

Ferroelectric $Pb(Zr_{0.52}Ti_{0.48})O_3$ (PZT(52/48)) thick films were fabricated by the screen-Printing method on the alumina substrates, and $PbTiO_3$ (PT) Precursor solution, which prepared by sol-gel method, was spin-coated on the PZT(52/48) thick films to obtain a densification. Its structural and electrical properties of the PZT(52/48) thick films with the treatment of PT precursor solution coating were investigated. The particle size of the thick films was increased with increasing the number of coatings and the thickness of the PZT-6 (6: number of coatings) films was about $60{\mu}m$. The relative dielectric constant increased and the dielectric loss decreased with increasing the number of PT sol coatings. The relative dielectric constant and dielectric loss of the PZT-6 thick film were 475 and 2 %, respectively. The remanent polarization, coercive field and breakdown strength of the PZT-6 film were $32.6{\mu}C/cm^2$, 15 kV/cm and 60 kV/cm, respectively.

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References

  1. D. Y. Jeong, Zhang, and H. B. Hwang, 'Dependence of domain stability on the thickness of the tetragonal $0.88Pb(Zn_{1/3}Nb_{2/3})O_3-0.12PbTiO_3$', J. Korean Phys. Soc., Vol. 44, No.6, p. 1531, 2004
  2. K. J. Lim, J. Y. Park, J. S. Lee, S. H. Kang, and H. H. Kim, 'Piezoelectric properties of PZT-PMN cermic for large displacement device application', Trans. EEM, Vol. 5, No.2, p. 76, 2004
  3. Y. H. Son, K. T. Km, and C. I. Kim, 'Ferroelectric properties of Tb-doped PZT thin films prepared by sol-gel process', J. of KIEEME(in Korean), Vol. 17, No.9, p. 947, 2004
  4. T. Futakuchi, Y. Matsui, and M. Adachi, 'Preparation of $PbZrO_3-PbTiO_3-Pb(Mg_{1/3}Nb_{2/3})O_3$ thick films by screen printing', Jpn. J. Appl. Phys., Vol. 38, p. 5528, 1999 https://doi.org/10.1143/JJAP.38.5528
  5. V. Walter, P. Delobelle, P. L. Mlal, E. Joseph, and M. Collet, 'V piezo-mechanical characterization of PZT thick films screen printed of alumina substrate', Sensors and Actuators A, Vol. 96, p. 157, 2002 https://doi.org/10.1016/S0924-4247(01)00767-1
  6. L. Simon, Le Dren, and P. Gonnard, 'PZT and PT screen printed thick films', J. Eur. Ceram. Soc., Vol. 21, p. 1441, 2001 https://doi.org/10.1016/S0955-2219(01)00160-1
  7. J. F. Fenandez and E. Nieto, 'Processing and microstructure of porous and dense PZT thick films of $Al_2O_3$', J. of Materials Science, Vol. 30, p. 5399, 1995
  8. R. W. West and J. Xu, '$PbTiO_3$ films from Metalloorganic precursors', Ferroelectrics Vol. 35, No.6, 1988
  9. K. Okazaki and K. Nagata, 'Effects of grain size and porosity on electrical and optical properties of PLZT ceramics', J. Am. Ceram. Soc., Vol. 56, p. 82, 1973
  10. G. H. Lee and K. C. Kang, 'Ceramic Eng. for Dielectric', Dae Kwang, p. 653, 2002