Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Fabrication of the Acceleration Sensor Body of Glass by Powder Blasting

미립분사가공을 이용한 유리 소재의 가속도 센서 구조물 성형

  • 박동삼 (인천대학교 기계공학과) ;
  • 강대규 (인천대학교 대학원 기계공학과) ;
  • 김정근 (인천대학교 대학원 기계공학과)
  • Published : 2006.02.01
Download PDF
⟨ Previous Next ⟩

Abstract

Acceleration sensors have widely been used in the various fields of industry. In recent years, micromachining accelerometers have been developed and commercialized by the micromachining technique or MEMS technique. Typical structure of such sensors consist of a cantilever beam and a vibrating mass fabricated on Si wafers using etching. This study investigates the feasibility of powder blasting technique for microfabrication of sensor structures made of the pyrex glass alternating the existing Si based acceleration sensor. First, as preliminary experiment, effect of blasting pressure, mass flow rate of abrasive and no. of nozzle scanning on erosion depth of pyrex and soda lime glass is studied. Then the optimal blasting conditions are chosen for pyrex sensor. Structure dimensions of designed glass sensor are 2.9mm and 0.7mm for the cantilever beam length and width and 1.7mm for the side of square mass. Mask material is from aluminium sheet of 0.5mm in thickness. Machining results showed that tolerance errors of basic dimensions of glass sensor ranged from 3um in minimum to 20um in maximum. This results imply the powder blasting can be applied for micromachining of glass acceleration sensors alternating the exiting Si based sensors.

Keywords

References

  1. Cho, Young Ho, 'Silicon Micromachining Technology and Industrial MEMS Applications,' Journal of the Korean Society of Precision Engineering, Vol. 17, No.7, pp.52-58, 2000
  2. Roylance, L. M. and Angell, J. B., 'A batch-fabricated silicon accelerometer,' IEEE Trans. Electron Devices, Vol. ED-26, pp.1887 -1896, 1979 https://doi.org/10.1109/T-ED.1979.19795
  3. Schmidt, M. A. and Howe, R. T., 'Silicon resonant microsensors,' Ceramic Eng. Science Proc., Vol. 8, No. 9-10, pp. 1911-1917, 1987
  4. Rudilf, E., Jornod, A., Bergqvist, J. and Leuthold, H., 'Precision accelerometers with ${\mu}$g resolution,' Sens. Actuators A, Phys., Vol. 21, No. 1-3, pp. 297-302, 1990 https://doi.org/10.1016/0924-4247(90)85059-D
  5. Matsumoto, Y. and Esashi, M., 'Integrated silicon capacitive accelerometer with PLL servo technique,' Sens. Actuators A, Phys., Vol. 39, No. 1, pp. 209-217, 1993 https://doi.org/10.1016/0924-4247(93)80221-2
  6. Kuehnel, W. and Sherman, S., 'A surface micromachined silicon accelerometer with on-chip detection circuitry,' Sens. Actuators A, Phys., Vol. 45, No.1, pp. 7-16, 1994 https://doi.org/10.1016/0924-4247(94)00815-9
  7. Parameswaran, L., Hsu, C. H. and Schmidt, M. A., 'IC process compatibility of sealed cavity sensors,' in Proc. Transducers, pp. 625-628. 1997 https://doi.org/10.1109/SENSOR.1997.613729
  8. Drieehuizen, van B. P., Maluf, N. I., Opris, I. E. and Kovacs, A. G. T., 'Force-balanced accelerometer with mg resolution, fabricated using silicon fusion bonding and deep reactive ion etching,' in Proc. Transducers, pp. 1229-1230. 1997 https://doi.org/10.1109/SENSOR.1997.635447
  9. Belloy, E., Sayah, A. and Gijs, M. A. M., 'Micromachining of Glass Inertial Sensors,' Journal of MICROELECTROCHEMICAL SYSTEMS, Vol. 11, No. 1, pp. 85-90, 2002 https://doi.org/10.1109/84.982867
  10. Belloy, E., Thurre, S., Walckiers, E., Sayah, A. and Gijs, M. A. M., 'The introduction of powder blasting for sensor and micro system applications,' Sensors and Actuators 84, pp. 330-337, 2000 https://doi.org/10.1016/S0924-4247(00)00390-3
  11. Belloy, E., Sayah, A. and Gijs, M. A. M., 'Powder blasting for three-dimensional microstructuring of glass,' Sensors and Actuators 86, pp. 231-237, 2000 https://doi.org/10.1016/S0924-4247(00)00447-7
  12. Park, D. S., Seo, T. I., 'Machinability in Oblique Powder Blasting of Glas,' J. of the Korean Society of Precision Engineering, Vol. 21, No.6, pp. 28-34, 2004
  13. Park, K. H., Oh, Y. T., Park, D. S., 'Mechanical Etching of Micro Pocket by Powder Blasting,' J. of the Korean Society of Precision Engineering, Vol. 19, No.1, pp. 219-226, 2002