Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Manufacture of Precision Thin film Resistors using Ni-Cr Alloy and Their Properties

Ni-Cr계 합금을 이용한 정밀 박막저항체의 제조 및 특성

  • 이영화 (충남대학교 재료공학과) ;
  • 박세일 (한국표준과학연구원 전자소자그룹) ;
  • 김국진 (한국표준과학연구원 전자소자그룹) ;
  • 임영언 (충남대학교 재료공학과)
  • Published : 2006.01.01
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Abstract

Precision thin film resistors using evanohm R alloy were fabricated by do magnetron sputtering method. The physical and electrical properties of the resistors were studied after treatment of thermal annealing. The crystallization of the film was increased as the annealing temperature increase. Diffusion and oxidation of Cr and Al elements were occurred into the film surface. The minimum TCR values of 10.46 ppm/$^{\circ}C$ and 10.65 ppm/$^{\circ}C$ were measured at the annealing temperatures of $200^{\circ}C$ and $300^{\circ}C$, respectively. We are conducting additional studies to improve characteristics of our resistors for practical device application.

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References

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