Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

Preparation of Iron Oxide-mixed ZnO films by Ultrasonic Spray Pyrolysis

초음파분무법을 이용한 산화철이 혼합된 ZnO막의 제조

  • Published : 2006.01.01
Download PDF
⟨ Previous Next ⟩

Abstract

In this Paper, ZnO films mixed with iron oxide were prepared by an ultrasonic spray pyrolysis method. The chemical composition and structural properties as a function of the Fe atomic ratio in the deposition solution were studied. Zinc acetate and ferrous chloride were used as precursors of Zn and Fe, respectively. Fe atomic ratio to Zn varied from 0.15 to 10.0. Substrate temperature was fixed at $250^{\circ}C$. The crystallographic properties and surface morphologies of the films were studied by X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively. Electron probe X-ray microanalysis (EPMA) and X-ray photoelectron spectroscopy (XPS) were carried out to analyse the chemical composition and state of Zn and Fe atoms.

Keywords

References

  1. I. Naoto Koshizaki and T. Oyama, 'Sensing characteristics of ZnO-based $NO_x$ sensor', Sensor Actuat. Vol. B66, p. 119, 2000
  2. S. Basu and A. Dutta, 'Room temperature hydrogen sensors based on ZnO', Mater. Chem. Phys., Vol. 47, p. 93, 1997
  3. T. Y. Ma and S. C. Lee, 'Effects of aluminum content and substrate temperature on the structural and electrical properties of aluminum-doped ZnO films prepared by ultrasonic spray pyrolysis', J. Mater. Sci., Vol. 11, p. 305, 2000
  4. T. Kobayashi, M. Haruta, H. Sana, and M. Nakane, 'A selective CO sensor using Tidoped ${\alpha}-Fe_{2}O_{3}$ with coprecipitated ultrafine particles of gold', Sensors and Actuators, Vol. 13, Iss. 4, p. 339, 1988 https://doi.org/10.1016/0250-6874(88)80047-7
  5. B. Yan, J. Peng, and C. Chai, 'Gas-sensing properties of ${\alpha}-Fe_{2}O_{3}$ thin films prepared by plasma-enhanced chemical vapour deposition', Thin Solid Films, Vol. 245, p. 225, 1994 https://doi.org/10.1016/0040-6090(94)90904-0
  6. S. Wang, W. wang, Z. Jiao, J, Liu, and Y. Qian, 'Characterization and gas-sensing properties of nanocrystalline iron(lll) oxide films prepared by ultrasonic spray pyrolysis on silicon', Sens. Actuators, Vol. B69, p. 22, 2000
  7. H. Tabet-Derraz, N. Benramdane, D. Nacer, A. Bouzidi, and M. Medles, ''nvestigations on $Zn_{x}Cd_{1-x}$ thin films obtained by spray pyrolysis', Solar Energy Mater. Solar Cells, Vol. 73, p. 249, 2002 https://doi.org/10.1016/S0927-0248(01)00134-9
  8. K. Tominaga, T. Murayama, I. Mori, T. Ushiro, T. Moriga, and I. Nakabayashi, 'Effect of insertion of thin ZnO layer in transparent conductive ZnO:AI film', Thin Solid Films, Vol. 386, p. 267, 2001
  9. K. Y. Cheong, N. Muti, and S. Roy Ramanan, 'Electrical and optical studies of ZnO:Ga thin films fabricated via the sol-gel technique', Thin Solid Films, Vol. 410, p. 142, 2002 https://doi.org/10.1016/S0040-6090(02)00286-9
  10. T. Yamamoto, T. Shiosaki, and A. Kawabata, 'Characterization of ZnO piezoelectric films prepared by RF planar-magnetron sputtering', J. Appl. Phys., Vol. 51, p. 3113, 1980 https://doi.org/10.1063/1.328100
  11. Y. Kashiwaba, K. Sugawara, K. Haga, H. Watanabe, B. P. Zhang, and Y. Segawa, 'Characteristics of c-axis oriented large grain ZnO films prepared by low pressure MOCVD method', Thin Solid Films, Vol. 411, p. 87, 2002 https://doi.org/10.1016/S0040-6090(02)00193-1
  12. T. Y. Ma and D. K. Shim, 'Effects of rapid thermal annealing on the morphology and electrical properties of ZnO/In films', Thin Solid Films, Vol. 410, p. 8, 2002
  13. 최무희, 마대영, '초음파분무법으로 제조한 ZnO/MgO막의 특성', 센서학회논문지, 14권, 5호, p. 362, 2005
  14. S. I. Yi, Y. Liang, S. Thevuthasan, and S. A. Chambers, 'Morphological and structural investigation of the early stages of epitaxial growth of ${\alpha}-Fe_{2}O_{3}(0001)$ on and ${\alpha}-Al_{2}O_{3}(0001)$ by oxygen-plasma-assisted MBE', Surf. Sci., Vol. 443, p. 212, 1999 https://doi.org/10.1016/S0039-6028(99)00992-9
  15. T. Y. Ma and I. C. Lee, 'Influence of substrate temperature on the structural and electrical properties of ${\alpha}-Fe_{2}O_{3}(0001)$ films prepared by ultrasonic spray pyrolysis', J. of Mater Sci: Materials in electronics, Vol. 15, p. 775, 2004 https://doi.org/10.1023/B:JMSE.0000045298.76893.75