DOI QR코드

DOI QR Code

Properties Optimization for Perovskite Oxide Thin Films by Formation of Desired Microstructure

  • Liu, Xingzhao (National Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China) ;
  • Tao, Bowan (National Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China) ;
  • Wu, Chuangui (National Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China) ;
  • Zhang, Wanli (National Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China) ;
  • Li, Yanrong (National Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China)
  • Published : 2006.11.30

Abstract

Perovskite oxide materials are very important for the electronics industry, because they exhibit promising properties. With an interest in the obvious applications, significant effort has been invested in the growth of highly crystalline epitaxial perovskite oxide thin films in our laboratory. And the desired structure of films was formed to achieve excellent properties. $Y_1Ba_2Cu_3O_{7-x}$ (YBCO) superconducting thin films were simultaneously deposited on both sides of 3 inch wafer by inverted cylindrical sputtering. Values of microwave surface resistance R$_2$ (75 K, 145 GHz, 0 T) smaller than 100 m$\Omega$ were reached over the whole area of YBCO thin films by pre-seeded a self-template layer. For implementation of voltage tunable high-quality varactor, A tri-layer structured SrTiO$_3$ (STO) thin films with different tetragonal distortion degree was prepared in order to simultaneously achieve a large relative capacitance change and a small dielectric loss. Highly a-axis textured $Ba_{0.65}Sr_{0.35}TiO_3$ (BST65/35) thin films was grown on Pt/Ti/SiO$_2$/Si substrate for monolithic bolometers by introducing $Ba_{0.65}Sr_{0.35}RuO_3$ (BSR65/35) thin films as buffer layer. With the buffer layer, the leakage current density of BST65/35 thin films were greatly reduced, and the pyroelectric coefficient of $7.6\times10_{-7}$ C $cm^{-2}$ $K^{-1}$ was achieved at 6 V/$\mu$m bias and room temperature.

Keywords

References

  1. A. I. Braginski, 'Superconducting Electronics Coming to Market,' IEEE Trans. Appl. Supercond., 9 2825 (1999)
  2. N. McN. Alford, T. W. Button, M. J. Adams, S. Hedges, B. Nicholson, and W. A. Philips, 'Low Surface Resistance in $YBa_2Cu_3O_x$ Melt-Processed Thick Films,' Nature, 349 680 (1991) https://doi.org/10.1038/349680a0
  3. P. Selvan, E. W. Seibt, D. Kumar, R. Pinto, and P. R. Apte, 'Enhanced Jc and Improved Grain-Boundary Properties of Ag-Doped $YBa_2Cu_3O_{7-\delta} $ Films,' Appl. Phys. Lett., 71 137 (1997) https://doi.org/10.1063/1.119452
  4. H. Kittle, M. Klauda, C. Newmann, J. Dutzi, Y. R. Li, R. Smithey, E. Brecht, R. Schneider, J. Geerk, J. Keppler, and K. Klinger, 'Resonators for a 2 Pole Filter Fabricated from YBCO Coated $LaAlO_3$ Cylinders,' IEEE Trans. Appl. Supercond., 7 2784 (1997) https://doi.org/10.1109/77.621815
  5. J. Xu, Y. R. Li, B. W. Tao, X. Z. Liu, and H. L. Wang, '$YBa_2Cu_3O_{7-\delta} $ Thin Films with Low Surface Resistance Prepared by Self-Template Sputtering Method,' Physica, C331 67 (2000)
  6. X. Z. Liu, B. W. Tao, A. Luo, S. M. He, and Y. R. Li, 'The Preparation of Double-Sided YBCO Thin Films by Simultaneous Sputtering from Single Target,' Thin Solid Films, 396 225 (2001)
  7. N. Newman and W. G. Lyons, 'High-Temperature Superconducting Microwave Devices: Fundamental Issues in Materials, Physics, and Engineering,' J. Supercond., 6 119 (1993) https://doi.org/10.1007/BF00625741
  8. A. M. Hermann, J. C. Price, J. F. Scott, R. M. Yandrofski, A. Naziripour, D. Galt, H. M. Duan, M. Paranthaman, R. Tello, J. Cuchario, and R. K. Ahrenkiel, 'Oxide superconductors and Ferroelectrics Materials for a New Generation of Tunable Microwave Devices,' Bull. Am. Phys. Soc., 38 689 (1993)
  9. A. Naziripour, A. Outzourhit, J. U. Trefny, Z.-H. Zhang, F. Barnes, J. Cleckler, and A. M. Hermann, 'Fabrication of $Ba_{1-x}Sr_xTiO_3$ Tunable Capacitors with $Tl_2Ba_2Ca_1Cu_2O_x$ Electrod,' Physica, C233 387 (1994)
  10. A. M. Hermann, R. M. Yandrofski, J. F. Scott, A. Naziripour, D. Galt, J. C. Price, J. Cuchario, and R. K. Ahrenkiel, 'Oxide Superconductors and Ferroelectrics Materials for a New Generation of Tunable Microwave Devices,' J. Supercond., 7 463 (1994) https://doi.org/10.1007/BF00724590
  11. R. A. Chakalov, Z. G. Ivanov, Y. A. Biokov, P. Larsson, E. Carlsson, S. Gevorgian, and T. Claeson, 'Fabrication and Investigation of $YBa_2Cu_3O_{7-\delta}/(Ba_{0.05}Sr_{0.95})TiO_3$ Thin Film Structures for Voltage Tunable Devices,' Physica, C308 279 (1998)
  12. Y. Gim, T. Hudson, Y. Fan, C. Kwon, A. T. Findikoglu, B. J. Gibbons, B. H. Park, and Q. X. Jia, 'Microstructure and Dielectric Properties of $Ba_{1-x}Sr_xTiO_3$Films Grown on $LaAlO_3 $Substrates,' Appl. Phys. Lett., 77 1200 (2000) https://doi.org/10.1063/1.1289272
  13. C. L. Canedy, H. Li, S. P. Alpay, L. Salamanca-Riba, A. L. Roytburd, and R. Ramesh, 'Dielectric Properties in Heteroepitaxial $Ba_{0.6}Sr_{0.4}TiO_3$ Thin Films: Effect of Internal Stresses and Dislocation-Type Defects,' Appl. Phys. Lett., 77 1695 (2000) https://doi.org/10.1063/1.1308531
  14. W. T. Chang, J. S. Horwitz, A. C. Carter, J. M. Pond, S. W. Kirchoefer, C. M. Gilmore, and D. B. Chrisey, 'The Effect of Annealing on the Microwave Properties of $Ba_{0.5}Sr_{0.5}TiO_3$ Thin Films,' Appl. Phys. Lett., 74 1033 (1999) https://doi.org/10.1063/1.123446
  15. J. S. Horwitz, W. T. Chang, W. J. Kim, S. B. Qadri, J. M. Pond, S. W. Kirchoefer, and D. B. Chrisey, 'The Effect of Stress on the Microwave Dielectric Properties of $(Ba_{0.5}Sr_{0.5}TiO_3)$ Thin Films,' J. Electroceramics, 4 357 (2000) https://doi.org/10.1023/A:1009974929096
  16. Y.-A. Jeon, E.-S. Choi, T.-S. Seo, and S.-G. Yoon, 'Improvements in Tunability of $(Ba_{0.5}Sr_{0.5})TiO_3$ Thin Films by Use of Metalorganic Chemical Vapor Deposited (Ba,Sr) RuO3 Interfacial Layers,' Appl. Phys. Lett., 79 1012 (2001) https://doi.org/10.1063/1.1394723
  17. E. J. Tarsa, E. A. Hachfield, F. T. Quinlan, J. S. Park, and M. Eddy, 'Growth-Related Stress and Surface Morphology in Homoepitaxial $SrTiO_3$ Films,' Appl. Phys. Lett., 68 490 (1996) https://doi.org/10.1063/1.116376
  18. S. T. Lee, N. Fujimura, and T. Ito, 'Epitaxial Growth of $BaTiO_3$Thin Films and thier Internal Stresses,' Jpn. J. Appl. Phys. Part 1, 34 5168 (1995) https://doi.org/10.1143/JJAP.34.5168
  19. X. Z. Liu and Y. R. Li, 'Dielectric Properties of Multilayered $SrTiO_3$ Thin Films with Graded Oxygen Vacancy Concentration,' Appl. Phys., A83 67 (2006)
  20. W. T. Chang, J. S. Horwitz, A. C. Carter, J. M. Pond, S. W. Kirchoefer, C. M. Gilmore, and D. B. Chrisey, 'The Effect of Annealing on the Microwave Properties of $(Ba_{0.5}Sr{0.5})TiO_3$ Thin Films,' Appl. Phys. Lett., 74 1033 (1999) https://doi.org/10.1063/1.123446
  21. W. T. Chang, C. M. Gilmore, W.-J. Kim, J. M. Pond, S. W. Kirchoefer, S. B. Qadri, and D. B. Chrisey, 'Influence of Strain on Microwave Dielectric Properties of $(Ba,Sr)TiO_3$ Thin Films,' J. Appl. Phys., 87 3044 (2000) https://doi.org/10.1063/1.372297
  22. C. L. Canedy, H. Li, S. P. Alpay, L. Salamanca-Riba, A. L. Roytburd, and R. Ramesh, 'Dielectric Properties in Heteroepitaxial $(Ba_{0.6}Sr_{0.4})TiO_3$ Thin Films: Effect of Internal Stresses and Dislocation-Type Defects,' Appl. Phys. Lett., 77 1695 (2000) https://doi.org/10.1063/1.1308531
  23. S. P. Alpay, I. B. Misirlioglu, V. Nagarajan, and R. Ramesh, 'Can Interface Dislocations Degrade Ferroelectric Properties-,' Appl. Phys. Lett., 85 2044 (2004) https://doi.org/10.1063/1.1788894
  24. I. B. Misirlioglu, A. L. Vasiliev, M. Aindow, S. P. Alpay, and R. Ramesh, 'Threading Dislocation Generation in Epitaxial (Ba,Sr)TiO3 Films Grown on (001) $LaAlO_3$ by Pulsed Laser Deposition,' Appl. Phys. Lett., 84 1742 (2004) https://doi.org/10.1063/1.1664035
  25. V. Nagarajan, C. L. Jia, H. Kohlstedt, R. Waser, I. B. Misirlioglu, S. P. Alpay, and R. Ramesh, 'Misfit Dislocations in Nanoscale Ferroelectric Heterostructures,' Appl. Phys. Lett., 86 192910 (2005) https://doi.org/10.1063/1.1922579
  26. W. J. Kim, W. Chang, S. B. Qadri, J. M. Pond, S. W. Kirchoefer, D. B. Chrisey, and J. S. Horwitz, 'Microwave Properties of Tetragonally Distorted $(Ba_{0.5}Sr{0.5})TiO_3$ Thin Films,' Appl. Phys. Lett., 76 1185 (2000) https://doi.org/10.1063/1.125977
  27. C. M. Hanson and H. R. Beratan, 'Thin Film Ferroelectrics: Breakthrough ,' Proceedings of SPIE, 4721 298 (2002)
  28. D. F. Murphy, M. Ray, R. Wyles, et al., 'High-Sensitivity $(25-{\mu}m\;Pitch)$ Microbolometer FPAs and Application Development,' Proceedings of SPIE, 4369 222 (2001)
  29. R. Murphy, M. Kohin, B. S. Backer, et al., 'Recent Developments in Uncooled IR Technology,' Proceedings of SPIE, 4028 12 (2000)
  30. M. A. Todd, P. A. Manning, P. P. Donohue, et al., 'Thin Film Ferroelectric Materials for Microbolometer Arrays,' Proceedings of SPIE, 4130 128 (2000)
  31. K. Sreenivas, I. Reaney, T. Maeder, N. Setter, et al., 'Investigation of Pt/Ti Bilayer Metallization on Silicon for Ferroelectric Thin Film Integration,' J. Appl. Phys., 75 232 (1994) https://doi.org/10.1063/1.355889
  32. S. B. Majumder, B. Roy, R. S. Katiyar, et al., 'Effect of Nd Doping on the Dielectric and Ferroelectric Characteristics of Sol-Gel Derived PZT Thin Films,' J. Appl. Phys., 90 2975 (2001) https://doi.org/10.1063/1.1391416
  33. H. Han, X. Song, J. Zhong, et al., 'Highly a-Axis-Oriented Nb-Doped $Pb(Ti_xZr_{1-x})O_3$ Thin Films Grown by Sol-Gel Technique for Uncooled Infrared Dectors,' Appl. Phys. Lett., 85 5310 (2004) https://doi.org/10.1063/1.1825062
  34. C. G. Wu, W. L. Zhang, Y. R. Li, X. Z. Liu, J. Zhu, and B. W. Tao, 'High Pyroelectric $(Ba_{0.65}Sr{0.35})TiO_3$ Thin Films with $(Ba_{0.65}Sr{0.35})RuO_3$ Seeding-Layer for Monolithic Ferroelectric Bolometer,' Infrared Physics & Technology, 48 187 (2006) https://doi.org/10.1016/j.infrared.2005.09.006
  35. A. G. Chynoweth, 'Spontaneous Polarization of Guanidine Aluminum Sulfate Hexahydrate at Low Temperatures,' J. App. Phys., 27 78 (1956) https://doi.org/10.1063/1.1722201