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Effect of Composition and Coating of Precursor Solution on a Micro Structural Properties of PZT Thick Films

PZT 후막의 미세 구조적 특성에 조성과 전구체 용액의 코팅이 미치는 영향

  • 박상만 (경상대학교 공학연구원 세라믹공학과, i-cube 사업단) ;
  • 노현지 (경상대학교 공학연구원 세라믹공학과, i-cube 사업단) ;
  • 이성갑 (경상대학교 공학연구원 세라믹공학과, i-cube 사업단)
  • Published : 2006.11.01

Abstract

The influence of the number of solution coatings on the densification of the PZT thick films was studied. PZT powder and PZT precursor solution was prepared by a sol-gel method and PZT thick films were fabricated by the screen-printing method on the alumina substrates. The powder and solution of composition were (A) PZT(80/20)/PZT(20/80), (B) PZT(70/30)/PZT(30/70) and (C) PZT(60/40)/PZT(40/60), (D) PZT(52/48)/PT. The coating and drying procedure was repeated 4 times. And then the PZT precursor solution was spin-coated on the PZT thick films. A concentration of a coating solution was 0.5 moth and the number of coating was repeated from 0 to 6. The porosity of the thick films was decreased with increasing the number of coatings and the PZT thick films with 6-times coated showed the dense microstructure and thickness of about $60{\mu}m$. A grain size was increased with increasing the coating number. All PZT thick films showed the typical XRD patterns of a typical perovskite polycrystalline structure. The relative dielectric constant of PZT thick films was improved 30-100% as the number of coatings.

Keywords

References

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