International Journal of Precision Engineering and Manufacturing

  • 제6권2호
  • /
  • Pages.34-39
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  • 2005
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  • 2234-7593(pISSN)
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  • 2005-4602(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

New Inchworm type Actuator with I/Q heterodyne Interferometer Feedback for a Long Stroke Precision Stage

  • Moon Chanwoo (Precision machinery Research Center, Korea Electronics Technology Institute) ;
  • Lee Sungho (Precision machinery Research Center, Korea Electronics Technology Institute) ;
  • Chung J.K (Precision machinery Research Center, Korea Electronics Technology Institute)
  • 발행 : 2005.04.01
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초록

The precision stage is an essential device for optic fiber assembly systems, micro machines and semiconductor equipments. A new piezoelectric inchworm type actuator is proposed to implement an actuator-integrated long-stroke linear stage. An in-and-quadrature phase (I/Q) heterodyne interferometer is developed as a feedback sensor of a servo system, and a synchronized counting method is proposed. The proposed measurement system can measure the accurate position of fast moving object with robustness to external sensing noise from actuator vibration. The developed servo stage will be applied to optic fiber device assembly system.

키워드

참고문헌

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