• 한국광학회:학술대회논문집
• /
• 한국광학회 2008년도 동계학술발표회 논문집
• /
• pp.421-422
• /
• 2008

• International Journal of Precision Engineering and Manufacturing
• /
• 제6권2호
• /
• pp.34-39
• /
• 2005

The precision stage is an essential device for optic fiber assembly systems, micro machines and semiconductor equipments. A new piezoelectric inchworm type actuator is proposed to implement an actuator-integrated long-stroke linear stage. An in-and-quadrature phase (I/Q) heterodyne interferometer is developed as a feedback sensor of a servo system, and a synchronized counting method is proposed. The proposed measurement system can measure the accurate position of fast moving object with robustness to external sensing noise from actuator vibration. The developed servo stage will be applied to optic fiber device assembly system.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2004년도 ICCAS
• /
• pp.1142-1146
• /
• 2004

The ultra precision linear stage is an essential device in the fields of MEMS and Bio technology. A piezo electric motor is widely used for its better linear characteristics, faster response time, and smaller size than conventional electro-magnetic actuator. We develop a new inchworm type motor to implement an actuator-integrated a long stroke linear stage which can move fast. To implement a servo system, we use a heterodyne interferometer as a position sensor, and we propose a new measurement technique using I/Q demodulator, and we propose a counting method to measure the position of fast moving object with low cost circuitry. The characteristics of the actuator and servo system are evaluated by measuring its displacement with a commercial laser interferometer.

• 한국광학회지
• /
• 제8권2호
• /
• pp.161-164
• /
• 1997

편광유지 광섬유를 이용한 주파수가 안정화된, 두 개의 서로 수직으로 편광된 종모우드를 갖는 He-Ne레이저 빛을 LoTa $O_{3}$ 위상변조기로 구성된 센서부(sensor head)로 전달해 줌으로써 원격에서 전기장을 측정할 수 있는 hybrid, heterodyne 간섭식 센서를 구성하였다. In/quadrature-phase위상변조풀이 방식을 이용하여 전기광학 효과에 의해 서로 수직으로 편광된 두 모우드 사이에 유도된 위상차이를 측정함으로써 항상 높은 검지율을 유지할 수 있는 전기장 센서를 구성하고, 이를 이용하여 광학 물질에 유도된 복굴절도 측정을 할 수 있었다.