Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Work Function Changes on MgO Protective Layer after O2plasma Treatment from Ion-induced Secondary Electron Emission Coefficient

산소 플라즈마 처리후의 이차전자방출계수(γ)를 이용한 MgO 보호막의 일함수(φW) 변화

  • 정재천 (광운대학교 전자물리학과) ;
  • 유세기 (한국외국어대학교 전자물리학과) ;
  • 조재원 (광운대학교 전자물리학과)
  • Published : 2005.03.01
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Abstract

The changes in secondary electron emission coefficient(${\gamma}$) and work function($\Phi$$_{\omega}$) have been studied on the surface of MgO protective layer aster plasma(Ar. $O_2$) treatment using ${\gamma}$-focused ion beam (${\gamma}$-FIB) system. The values of ${\gamma}$ varied as follows: $O_2$-treated MgO > Ar-treated MgO > Non-treated MgO, and the work functions varied in the reverse order. The result indicates that both the physical etching and the chemical reaction of $O_2$-plasma removed the contaminating materials from the surface of MgO.

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References

  1. H. Zama, Y. Ishii, H. Yamamoto, and T. Morishita, 'Atomically flat MgO singlecrystal surface prepared by oxygen thermal snnealing', Jpn. J. Appl. Phys., Vol. 40, p 465, 2001
  2. U. Toshinori, I. Toshiaki, O. Mitsuoki, N. Norihiko, and M. Itsuo, 'Protecting layer for the dielectric in AC plasma panels', IEEE trans electron devices., Vol. 23, p. 313, 1976
  3. Refson, K., Wogelius, R. A., Fraser, D. G., Payne, M. C., Lee, M. H., and Milman, V., 'Water chemisorption and reconstruction of the MgO surface', Physical Review B., Vol. 52, p. 10823, 1995
  4. J. Colin F, R. Robyn A, R. Ruppert, and S. Robert L, 'Surface area and the mechanism of hydroxylation of Ionic oxide surfaces', J. Chem. Soc. Faraday Trans. 1., Vol. 80, p. 2609, 1984
  5. J. H. Eun, J. H. Lee, S. G. Kim, M. Y. Urn, and S. Y. Park, 'The protection of MgO film against hydration by using $Al_2O_3$ capping layer deposited by magnetron sputtering method', Thin Solid Films, Vol. 435, p, 199, 2003
  6. K. Yasushige, Y. Emiko, A. Hiroyasu, M. Kazuhisa, and M, Tetsuo, 'Interaction of water with the surface of magnesium oxide', J. Chem. Soc. Fraday Trans. 1., Vol. 84, p. 2421, 1988
  7. J. H. Lee, J. H. Eun, S. Y. Park, S. G. Kim, and H. J. Kim, 'Hydration of r.f. magnetron sputtered MgO thin films for a protective layer in AC plasma display panel', Thin Solid Films, Vol. 435, p. 95, 2003
  8. O. Engkvist and A J. Stone, 'Adsorption of water on the MgO(001) surface', Surface Science, Vol. 437, p. 239, 1999
  9. Y. Chiba, K. Kashiwagi, and H. Kokai, 'Plasma surface treatment effect of TiO2 thin film', Vacuum, Vol. 74, p. 643, 2004
  10. G. Y. Kim, J. S. Oh, E. H. Choi, G. S. Cho, S. O. Kang, and J. Cho, 'Work function change on O-plasma treated indium-tinoxide', Materials Science and Engineering B, Vol. 100, p. 275, 2003
  11. J. Y. Lim, J. S. Oh, B. D. Ko, J. W. Cho, S. O. Kang, G. S. Cho, H. S. Uhm, and E. H. Choi, 'Work function of MgO single crystals from ion-induced secondary electron emission coefficient', J. Appl. Phys., Vol. 94, p. 764, 2003
  12. H. D. Hagstrum, 'Theory of auger ejection of electrons from metals by ions', Phys. Rev., Vol. 96, p. 336, 1954
  13. J. J. Kim, H. H. Park, and S. H. Hyun, 'The evolution of microstructure and surface bonding in $SiO_2$ aerogel film after plasma treatment using $O_2,N_2$, and $H_2$, gases', Thin Solid Films, Vol. 384, p. 236, 2001
  14. M. O. Aboelfotoh and J. A. Lorenzen, 'Influence of secondary-electron emission from MgO surfaces on voltage-breakdown curves in Penning mixtures for insulated-electrode discharges', J. Appl. Phys., Vol. 48, p, 4754, 1977
  15. L. Kantorovich, A. Shluger, J. Gunster, J. Stultz, S. Krischok, D. W. Goodman, P. Stracke, and V. Kempter, 'Mg clusters on MgO surfaces: characterization by MIES and electronic structure ab initio calculations', Nuclear Instruments and Methods in Physics Research B, Vol. 157, p. 162, 1999
  16. L. N. Kantorovich and M. J. Gillan, 'Adsorption of atomic and molecular oxygen on the MgO(001) surface', Surface Science, Vol. 374, p. 373, 1997