Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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A Study on the Reduction of Dishing and Erosion Defects in Tungsten CMP

텅스텐 CMP에서 디싱 및 에로젼 결함 감소에 관한 연구

  • 박범영 (부산대학교 대학원 정밀기계공학과) ;
  • 김호윤 (동부아남반도체) ;
  • 김구연 (부산대학교 대학원 정밀기계공학과) ;
  • 김형재 (부산대학교 대학원 정밀기계공학과) ;
  • 정해도 (부산대학교 정밀정형 및 금형가공 연구소)
  • Published : 2005.02.01
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Abstract

Chemical mechanical polishing(CMP) has been widely accepted for the planarization of multi-layer structures in semiconductor fabrication. But a variety of defects such as abrasive contamination, scratch, dishing, erosion and corrosion are occurred during CMP. Especially, dishing and erosion defects increase the metal resistance because they decrease the interconnect section area, and ultimately reduce the lift time of the semiconductor. Due to this reason dishing and erosion must be prohibited. The pattern density and size in chip have a significant influence on dishing and erosion occurred by over-polishing. The fixed abrasive pad(FAP) was applied and tested to reduce dishing and erosion in this paper. The abrasive concentration decrease of FAP results in advanced pattern selectivity which can lead the uniform removal in chip and declining over-polishing. Consequently, reduced dishing and erosion was observed in CMP of tungsten pattern wafer with proposed FAP and chemicals.

Keywords

References

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