Journal of Mechanical Science and Technology

  • 제19권8호
  • /
  • Pages.1576-1581
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  • 2005
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  • 1738-494X(pISSN)
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  • 1976-3824(eISSN)
대한기계학회 (The Korean Society of Mechanical Engineers)
권호 표지

A Swing-Arm On-Machine Inspection Method for Profile Measurement of Large Optical Surface in Lapping Process

  • Sung In Kyoung (School of Mechanical Engineering, Chungbuk National University) ;
  • Oh Chang Jin (School of Mechanical Engineering, Chungbuk National University) ;
  • Lee Eung Suk (School of Mechanical Engineering, Chungbuk National University) ;
  • Kim Ock Hyun (School of Mechanical Engineering, Chungbuk National University)
  • 발행 : 2005.08.01
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초록

Generally, the optical components are fabricated by grinding, lapping, and polishing. And, those processes take long time to obtain such a high surface quality. Therefore, in the case of large optical component, the on-machine inspection (OMI) is essential. Because, the work piece is fragile and difficult to set up for fabricating and measuring. This paper is concerned about a swing-arm method for measuring surface profile of large optical concave mirror. The measuring accuracy and uncertainty for suggested method are studied. The experimental results show that this method is useful specially in lapping process with the accuracy of $3\~5\;{\mu}m$. Those inspection data are provided for correcting the residual figuring error in lapping or polishing processes.

키워드

참고문헌

  1. Ando, M., Negishi, M., Takimoto, M., Deguchi, A. and Nakamura, N., 1995, 'Super-smooth Polishing on Aspherical Surface,' Nanotechnology 6, pp. 111-120 https://doi.org/10.1088/0957-4484/6/4/002
  2. Burge, J. H., 1996, 'Measurement of Large Convex Aspheres,' Proc. of SPIE on Optical Telescopes of Today and Tommorrow, Vol. 2871
  3. Daniel Malacara-Hernandez and Daniel Malacara-Doblado, 1999, 'Testing of Aspheric Wavefronts,' Fabrication and Testing of Aspheres, Optical Society of America, pp.74-85
  4. David Walker, Ho-Soon Yang and Sug-Whan Kim, 2003, 'Novel Hybrid Stylus for Nanometric Profilometry for Large Optical Surface,' Optics Express, Vol. 11, No. 15
  5. David Williamson, Robert Kestner and Daniel Bajuk, 1999, 'Asphere in Microlithography,' Fabrication and Testing of A spheres, Optical Society of America, pp.8-16
  6. Ho Soon Yang and David Walker, 2001, 'Development of Prototype Stylus Profilometry for Large Optics Testing,' Journal of the Optical Society of Korea, Vol. 6, No.2, pp. 60-66
  7. Martin, H. M. et aI., 2002, 'Optics for the 20/20 Telescope,' Proc. of SPIE, Vol. 4840, pp. 1-12 https://doi.org/10.1117/12.459968
  8. Negishi, M., Deguchi, A., Ando, M., Takimoto, M. and Nakamura, N., 1995, 'A High-precision Coordinate Measuring System for Super-smooth Polishing,' Nanotechnology 6, pp. 139-147 https://doi.org/10.1088/0957-4484/6/4/006
  9. Jong Hui Hong, Chang Jin Oh, Eung Suk Lee and Ock Hyn Kim, 2003, 'Precision Manufacturing for a Large Concave Mirror using Spherical Surface Referenced Shack-Hartmann Test,' KSME conference