Transactions of the Korean Society for Noise and Vibration Engineering (한국소음진동공학회논문집)

The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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Dynamics of a Micro Three-axis Ring Gyroscope Considering Electrode Effects

전극 효과를 고려한 마이크로 3축 링 자이로스코프의 동역학

  • 김창부 (인하대학교 기계공학부) ;
  • 강태민 (인하대학교 대학원 기계공학과)
  • Published : 2004.01.01
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Abstract

In this paper. we analyse and present electro-mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. The motions of the ring are electro-statically derived. sensed and balanced by electrodes. The equations of motion are formulated. The measuring method of angular velocities by force-to-rebalance is presented. The dynamic characteristics of a ring gyroscope are calculated and compared.

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References

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