Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Effect of Nano Buffer Layer on Property and Growth of Carbon Thin Film

탄소계 박막의 성장과 특성에 대한 나노 Buffer Layer의 영향

  • 류정탁 (대구대학교 정보통신공학부) ;
  • ;
  • Published : 2003.01.01
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Abstract

Using Platinum-silicide (PtSi) formed between silicon substrate and carbon film, we have improved the field emission of electrons from carbon films. Pt films were deposited on n-Si(100) substrates at room temperature by DC sputter technique. After deposition, these PtSi thin films were annealed at 400 ~ $600^{\circ}C$ in a vacuum chamber, and the carbon films were deposited on those Pt/Si substrates by laser ablation at room temperature. The field emission property of C/Pt/Si system is found to be better than that of C/Si system and it is showed that property was improved with increasing annealing temperature. The reasons why the field emission from carbon film was improved can be considered as follows, (1)the resistance of carbon films was decreased due to graphitization, (2)electric field concentration effectively occurred because the surface morphology of carbon film deposited on Pt/si substrates with rough surface, (3)it is showed that annealing induced reaction between Pt film and Si substrate, as a consequence that the interfacial resistance between Pt film and Si substrate was decreased.

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References

  1. Phys. Rev. B v.50 Surfactant mediated growth of Ge on Si(111) M. Horn-von Hoegen;M. Copel;J. C. Tsang;M. C. Reuter;R. M. Tromp https://doi.org/10.1103/PhysRevB.50.10811
  2. Phys. Rev. Lett. v.63 Surfactants in epitaxial growth M. Copel;M. C. Reuter;Efthimios Kaxiras;R. M. Tromp https://doi.org/10.1103/PhysRevLett.63.632
  3. Phys. Rev. Lett. v.66 Hydrogen-mediated epitaxy of Ag on Si(111) as studied by low energy ion scattering Koji Sumitomo;Tadashi Kobayashi;Fumiya Shoji;Kenjiro Oura;Itsuo Katayama https://doi.org/10.1103/PhysRevLett.66.1193
  4. Surface Science v.433 no.2 The growth of indium thin films on clean and hydrogen-terminated Si(100) surfaces J. T. Ryu;O. Kubo;H. Tani;T. Harada;M. Katayama;K. Oura https://doi.org/10.1016/S0039-6028(99)00033-3
  5. Thin Solid Films v.369 no.Issues 1;2 Ge thin film growth on Si(111) surface using hydrogen surfactant Toshiaki Fujino;Takashi Fuse;Jeong-Tak Ryu;Katsuhiko Inudzuka;Toshiaki Nakano;Koji Goto;Yujin Yamazaki;Mitsuhiro Katayama;Kenjiro Oura https://doi.org/10.1016/S0040-6090(00)00828-2
  6. J. of KIEEME(in Korean) v.12 no.5 Deposition and characterization of tribologic DLC thin films fabricated by pulsed laser deposition K. S. Shim;S. Y. Lee
  7. 전기전자재료학회논문지 v.15 no.8 유도결합형 플라즈마 화학기상증착법에서 탄소나노튜브의 수직성장과 전계방출 특성 향상 연구 김광식;류호진;장건익 https://doi.org/10.4313/JKEM.2002.15.8.713
  8. 전기전자재료학회논문지 v.15 no.7 레이저 증착법에 의한 탄소계 박막의 구조 및 전계방출특성 류정탁;K. Oura;김연보 https://doi.org/10.4313/JKEM.2002.15.7.634
  9. Appl. Phys. Lett. v.81 Fabrication and characterization of gated field emitter arrays with self-aligned carbon nanotubes grown by chemical vapor deposition In Taek Han;Ha Jin Kim;Young Jun Park;Naesung Lee;Jae Eun Jang;Jung Woo Kim;Jae Eun Jung;Jong Min Kim https://doi.org/10.1063/1.1506408
  10. Appl. Phys. Lett. v.80 Universal field emission model for carbon nanotubes on a metal tip D. Y. Zhong;G. Y. Zhang;S. Liu;T. Sakurai;E. G. Wang https://doi.org/10.1063/1.1430507
  11. Jpn. J. Appl. Phys. v.40 Emission properties from cabon nanotube field emitter arrays (FEAs) grown on Si emitters Tomomi Yoshimoto;Tatsuo Iwata;Ryuutaro Minesawa;Kazuhiko Matsumoto https://doi.org/10.1143/JJAP.40.L983
  12. Proc. of the IEEE v.82 no.7 Vacuum Microelectronic Devices Ivor Brodie;Paul Richard Schwoebel https://doi.org/10.1109/5.293159
  13. J. Vac. Sci. Technol. A v.5 no.6 Characterization of diamondlike carbon films and their application as overcoats on thin-film media for magnetic recording H. C. Tsai;D. B. Bogy https://doi.org/10.1116/1.574188
  14. Phys. Rev. B. v.29 no.6 Use of raman scattering to investigate disorder and crystallite formation in as-deposited and annealed carbon films R. O. Dillon;John A. Woollam https://doi.org/10.1103/PhysRevB.29.3482
  15. J. Appl. Phys. v.80 Raman spectroscopy on amorphous carbon films J. Schwan;S. Ulrich;V. Batori;H. Ehrhardt;S. R. P. Silva https://doi.org/10.1063/1.362745
  16. Thin Solid Films v.253 Thickness dependence of the properties and thermal stability of PtSi films S. R. Das;K. Sheerger;D. X. Xu;A. Naem https://doi.org/10.1016/0040-6090(94)90368-9