차세대 무선통신 산업에 MEMS 기술의 응용

  • 박재영 (LG전자기술원 소자재료연구소 마이크로시스템그룹)
  • Published : 2002.04.01

Abstract

Keywords

References

  1. K. E. Petersen, 'Micromechanical membraneswitches on silicon', IBM J. Res. Dev. 23 376-85, 1979
  2. J. J. Yao and M. F. Chang, 'A surface micromachined miniature switch for telecom-munications applications with signal frequencies from DC up to 4 GHz', Tech. Digest, 8th Int. Conf. on Solid-State Sensors and Actuators, pp. 384-7, 1995
  3. C. Goldsmith, J. Randall, S. Eshelman, T-H. Lin, D. Denniston, S. Chen and B. Norvell, 'Characteristics of micromachined switches at microwave frequencies', Tech. Digest, IEEE Microwave Theory and techniques Symp., pp. 1141, 1996
  4. Jae Y. Park, Geun H. Kim, Ki W. Cheong, and Jong U. Bu, 'Electroplated RF MEMS Capaci-tive Switches', IEEE 13th International MEMSConference, Miyajaki, Japan, Jan. pp. 639-644, 2000
  5. D. J. Young and B. E. Boser, 'A micromachined variable capacitor for monolithic low-noise VCOs', Tech. Digesl, Sotid State Sensor and Actuator Workshop, pp. 869, 1996
  6. A. Dec and K. Suyama, 'Micromachined varac-tor with wide tuning range', Electron. Lett. 33 922-4, 1997 https://doi.org/10.1049/el:19970628
  7. Jae Y. Park, Young J. Yee, Hyo J. Nam, and Jong U. Bu, 'Micromachined RF MEMS Tunable Capacitors using Piezoelectric Actuators', Tech. Digest, IEEE Microwave Theory and techniques Symp, May 2001
  8. K. F. Harsh, W. Zhang, V. M. Bright and Y. C. Lee, 'Flip-chip assembly for Si-based RF MEMS', Proc. IEEE. I2th Ann. Int. Workshop on Micro EIectro MechanicaISystems, pp. 273-278, 1999
  9. J. J. Yao, S. Park and J. DeNatale, 'High tuning-ratio MEMS-based tunable capacitors for RF communications applications', Tech. Dieest, Solid State Sensor and Actuator Workshop, pp.124-127, 1998
  10. Jae Y. Park and Mark G. Allen, 'Microma-chined High Q Inductors for High frequency Applications', Micromachining & Microfabrica-tion '98 Conference, SPIE, vol. 3514, pp. 218-228, Santa Clara, CA. 1998
  11. A. Massarini, M. Kazimierczuk, and G. Grandi, 'Lumped parameter models for single- and multiple-layer inductors', 27th Annual 1EEE Power EIectronics Specialists Conference, vol. 1, pp. 295-301, 1996
  12. R. B. Strokes and J. D. Crawfold, 'X-band thin film acoustic filters on GaAs', IEEE Tran. Microwave theory Tech., vol. 41, pp. 1075-1080, July 1993 https://doi.org/10.1109/22.238530
  13. S. H. Kim, J. S. Lee, H. C. Choi, and Y. H. Lee, 'The Fabrication ofThin-Film Bulk Acoustic Wave Resonators Employing a ZnO/Si Composite Diaphragm Structure Using Porous Silicon Layer Etching', IEEE Electron Device Letter, vol. 20, no. 3, pp. 113-115, March 1999 https://doi.org/10.1109/55.748905
  14. K. M. Lakin, G. R. Kline, and K. T. McCarron, 'High Q Microwave Acoustic Resonators and Filters', Proceedings of the 1993 IEEE MTT-S International Microwave Symposium, vol. 5, pp.1517-1520, 1993