MEMS를 이용한 FBAR의 기술 및 시장 동향

References

1. R. Ruby, P. Bradley, J D Larson III and Y.Oshmyansky, 'PCS 1900MHz duplexers using film bulk acoustic resonators(FBARs)', Electronic Letters 13, vol. 35, no. 10, May 1999
2. Marc-Alexnadre Dubois, and Paul Muralt, 'Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications', Applied Pyhsics tetters, vol. 74,no. 20
3. Microwaves & RF Magzine, Sep. 2000
4. The Market for RF MEMS 2002-2007, WTC Consulting Report, 2002
5. Market Snapshot: RF MEMS, Cahners In-Stat Report, 2001