Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Design and Fabrication of Six-Degree of Freedom Piezoresistive Turbulent Water Flow Sensor

  • Dao, Dzung Viet (Graduate School of Science and Engineering, Ritsumeikan University) ;
  • Toriyama, Toshiyuki (New Energy and Industrial Technology Development Organization) ;
  • Wells, John (Graduate School of Science and Engineering, Ritsumeikan University) ;
  • Sugiyama, Susumu (Graduate School of Science and Engineering, Ritsumeikan University)
  • Published : 2002.07.31
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Abstract

This paper presents the design concept, theoretical investigation, and fabrication of a six-degree of freedom (6-DOF) turbulent flow micro sensor utilizing the piezoresistive effect in silicon. Unlike other flow sensors, which typically measure just one component of wall shear stress, the proposed sensor can independently detect six components of force and moment on a test particle in a turbulent flow. By combining conventional and four-terminal piezoresistors in Si (111), and arranging them suitably on the sensing area, the total number of piezoresistors used in this sensing chip is only eighteen, much fewer than the forty eight piezoresistors of the prior art piezoresistive 6-DOF force sensor.

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