Abstract
The velocity changes of magneto surface acoustic wave (MSAW) have been investigated in the MSAW devices composed of wedge type transducer and as-sputtered ($Fe_{1-x}$ $Co_{x}$ )$_{89}$ $Zr_{ 11}$ (x=0~1.0)amorphous films on glass substrates. The velocity changes of devices depended sensistively on exciting frequency of MSAW, applying the DC bias magnetic field. film thickness and film composition. Particularly. it was conformed that velocity changes increased with the increase of the exciting frequency of MSAW and the thickness of magnetic films. A device deposited x= 0.8 film along the MSAW propagation direction among the devices exhibited a large velocity change of 0.062% at 8.7 MHz for the applied field of 70 Oe.
쐐기형 전극 사이에 열처리전 비정질 ($Fe_{1-x}$ $Co_{x}$ )$_{89}$ $Zr_{ 11}$ (x=0~1.0) 자성막이 증착된 MSAW 소자를 구성하고 외부 인가자기장에 의한 MSAW 속도변화율을 조사하였다. 그 결과 MSAW 속도변화율은 직류 인가자기장, 구동주파수, 자성막의 두께 및 조성에 민감하게 의존하였으며, 특히 구동주파수 및 자성막의 두께가 증가할수록 증가함을 확인하였다. 열처리전 시편에서 나타난 최대 속도변화율은 x=0.8에서 얻어진 0.062%였다.